Leybold Trivac D16B D25B Manual
Leybold Trivac D16B D25B Manual
GA 01.202/9.02
TRIVAC® B
Rotary Vane Vacuum Pump
S/D 16, 25 B
Cat.-No.
102 65/66/75/76
103 25/26/27/28/31/32/35/36/37/38/48/49
112 65/66/75/76
113 25/26/27/28/29/31/32
113 35/36/37/38/39/48/49
113 33
Operating Instructions
Contents
Contents Figures
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Page The references to figures, e.g. (1/2) consist of the Fig.
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . .3 No. and the Item No. in that order.
1.1 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
1.2 Supplied Equipment . . . . . . . . . . . . . . . . . . . .5
1.3 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . .6 Leybold-Service
1.4 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . .6 If a pump is returned to Leybold, indicate whether the
1.5 Transportation . . . . . . . . . . . . . . . . . . . . . . . .6 pump is free of substances damaging to health or
1.6 Technical Data . . . . . . . . . . . . . . . . . . . . . . . .7 whether it is contaminated.
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . .9 If it is contaminated also indicate the nature of the
2.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . .9 hazard. Leybold must return any pumps without a
2.2 Connection to the System . . . . . . . . . . . . . . . .9 „Declaration of Contamination“ to the sender’s address.
2.3 Electrical Connection . . . . . . . . . . . . . . . . . .10
2.4 Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
2.5 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . .13
2.6 Switching off / Shutdown . . . . . . . . . . . . . . . .14
Disposal of waste oil
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . . .15
3.1 Checking the Oil Level . . . . . . . . . . . . . . . . .15 Under the amended law relating to waste disposal dated
3.2 Oil Change . . . . . . . . . . . . . . . . . . . . . . . . . .16 November 1, 1986 (valid in the Federal Republic of Ger-
3.3 Cleaning the Dirt Trap . . . . . . . . . . . . . . . . . .17 many) the disposal of used oil is subject to new provi-
3.4 Removing and Fitting the Internal Demister . .17 sions. According to legislation relating to waste disposal
3.5 Disassembly and Reassembly of the Electric . . the so-called principle of causality is applied. Hence,
Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18 anyone in possession of used oil is responsible for its
3.6 Replacing the Outer Shaft Seal . . . . . . . . . . .19 proper disposal.
3.7 Removing and Remounting the Pump Module20
3.8 Service at Leybold’s . . . . . . . . . . . . . . . . . . .20 Used oils coming from vacuum pumps must not be
3.9 Storing the Pump . . . . . . . . . . . . . . . . . . . . .21 mixed with other substances.
3.10 Maintenance Plan . . . . . . . . . . . . . . . . . . . . .22 Used oils from vacuum pumps (LH-oils on the basis of
mineral oils) having been affected by normal contamina-
4 Troubleshooting . . . . . . . . . . . . . . . . . . . . .24 tion due to oxygen from the ambient air, increases in
temperature and mechanical wear, must be disposed of
EC Declaration of Conformity . . . . . . . . . .26 as used oil in accordance with the regulations.
Used oils from vacuum pumps that have been contami-
nated by other substances must be labelled, stored and
disposed of as special waste with reference to the kind
of contamination.
When disposing of used oil please observe the safety
regulations that are valid in your country.
In many countries proof of were the oil has finally been
left is required by Law and often shipping of such conta-
minated waste requires permission by the authorities.
Warning Indicates procedures that must be strictly Waste disposal information is available through:
observed to prevent hazards to persons. Bundesamt für Gewerbliche Wirtschaft (BAW)
Frankfurter Str. 29-31
D-65760 Eschborn/Taunus
Phone: +49 (0)6196 4041 - Telex: 415603/04
2 GA 01.202/9.02 - 03/96
Description
1 2 3
Key to Fig. 1
1 Oil filter OF 4-25
2 Exhaust filter AF 16-25
3 Condensate trap AK 16-25
GA 01.202/9.02 - 03/96 3
Description
Key to Fig. 2
1 Intake port
2 Dirt trap
3 Anti-suckback valve
4 Intake channel
5 Vanes
6 Pump chamber
7 Rotor
8 Cover plate, connection for inert gas ballast
9 Exhaust channel
10 Exhaust valve
11 Internal demister
12 Spring buckles
13 Cover plate, connection for oil filter
The gas ballast valve is opened and closed by turning During operation of the TRIVAC-B the control piston
the gas ballast knob (7/5) on the front. (4/3) remains sealed against a spring (4/2) by the oil
To enable the TRIVAC-B to be used at intake pressures pressure. The valve disc (4/6) of the anti-suckback valve
as high as 1,000 mbar, a special lubricating system was is held at the lower position by its own weight (valve
developed featuring force-lubrication of the sliding bea- open). When the pump stops (because it has been swit-
rings. ched off or because of a failure), the oil pressure drops
and the spring (4/2) presses the control piston (4/3) up.
An oil pump (3/6) pumps the oil from the oil reservoir Thus a connection is provided between the oil case or
(3/5) into a pressure-lubrication system which supplies the oil reservoir (4/1) and the piston (4/4) of the anti-
oil to all bearing points (3/2). From there the oil enters suckback valve. Due to the pressure difference between
the pump chamber area (2/6) of the vacuum pump. the oil case and the intake port the oil presses the piston
The oil pump is fitted in the front end plate on the cou- (4/4) up and the valve plate (4/6) against the valve seat
pling side of the pump module. The oil suction line is pla- (4/5). The quantity of oil in the oil reservoir (4/1) prevents
ced low, resulting in a large usable oil reservoir. the entry of air into the intake port (2/1) at the beginning
of this process.
The oil is separated from the gas in the TRIVAC-B in two
steps as described above. First, small droplets are After the oil has flowed out from the reservoir and when
coalesced into large drops in the internal demister (2/11) the valve plate rests on the valve seat, air follows in,
fitted above the exhaust valve (2/10). Then, the large which vents the pump chamber and forces the valve disc
drops fall into the oil reservoir as the exhaust gas is (4/6) against its seat. This effectively prevents backstre-
diverted by the inner walls of the oil case. Thus a low aming of oil. The anti-suckback valve (2/3) operates
loss of oil is obtained. This and the large usable oil reser- independently of the operating mode of the pump, i.e.
voir ensure long intervals between oil changes even at also with gas ballast.
high intake pressures.
The vacuum is maintained by the TRIVAC-B by an inte-
grated hydropneumatic anti-suckback valve (2/3) which
is controlled via the oil pressure.
4 GA 01.202/9.02 - 03/96
Description
Key to Fig. 3
1 Accessories
2 Bearings
3 Non-return valve
4 Pump chamber of the TRIVAC
5 Oil reservoir
6 Oil pump
Key to Fig. 4
1 Oil reservoir 5 Valve seat
2 Spring 6 Valve disk
3 Control piston 7 Gas inlet
4 Anti-suckback piston
Fig. 4 Hydropneumatic anti-suckback valve
GA 01.202/9.02 - 03/96 5
Description
6 GA 01.202/9.02 - 03/96
Description
Weight1) kg 23 26 27 32
10 2
Saugvermögen/Pumping speed/Débit
m
3 . h -1
D25B
D16B
10 1
S25B
0 S16B
10
8
6
4
-1
10
2 4 6 8
10 -5 10 -4 10 -3 10 -2 10 -1 10 0 10 1 10 2 mbar 10 3
Druck/Pressure/Pression
with gas ballast
without gas ballast
GA 01.202/9.02 - 03/96 7
8
Motor related data
S 16 B D 16 B S 25 B D 25 B
Cat. No. l (mm) W (kg) Cat. No. l (mm) W (kg) Cat. No. l (mm) W (kg) Cat. No. l (mm) W (kg) Motor-connection voltage, frequency Motor Rated Speed Motor Order No. for
Description
power current noise level the motor
102 65 507 26 112 65 507 29 - - 11, 230 V, 50 Hz 550 W 5A 1400 48 dB (A) 380 66 003
- - 102 75 511 30 112 75 572 35 11, 230 V, 50 Hz 750 W 6.3 A 1350 50 dB (A) 380 66 004
103 25 510 33 113 25 510 36 103 35 510 33 113 35 572 38 11, 230 V, 60 Hz 750 W 6.2 A 1650 52 dB (A) 200 10 407
103 26 560 30 113 26/291) 560 33 103 36 560 30 113 36/391) 621 35 11, 100 V, 50 Hz / 110 V, 60 Hz 750 W 14 A 1400/1700 53/58 dB (A) 220 10 408
103 31 560 30 113 31 560 33 103 48 560 30 113 48 621 35 11, 115 V, 60 Hz 750 W 12.5 A 1650 58 dB (A) 200 10 679
103 32 560 30 113 32 560 33 103 49 560 30 113 49 621 35 11, 200 V, 50/60 Hz 750 W 6.2/5.8 A 1420/1700 53/58 dB (A) 200 10 419
102 66 482 23 112 66 482 26 - - 31, 230/400, 50 Hz 550 W 2.85/1.65 A 1370 47 dB (A) 380 66 001
250/440, 60 Hz 2.5/1.45 A 1675 51 dB (A)
- - 102 76 507 27 112 76 568 32 31, 230/400, 50 Hz 750 W 3.55/2.05 A 1400 48 dB (A) 380 66 002
250/440, 60 Hz 3,25/1.85 A 1705 52 dB (A)
103 27 507 23 113 27 507 27 103 37 507 28 113 37 568 33 31, 230/400 V, 50 Hz 750 W 3.4/1.97 A 1405 48 dB (A) 200 10 409
EExeIIT3
The Cat. Nos. 113 29 and 1123 39 are equipped with UI-cable NEMA 5-158 2.5 m
b
b2
a c
a b b1 b2 c h h1 h2 h3 m n o
Fig. 6 Dimensional drawing for the TRIVAC rotary vane pumps (Dimensions a, l, b to b2 and h1 are approximate)
GA 01.202/9.02 - 03/96
Operation
Key to Fig. 7
1 Handle
2 Intake port
3 Exhaust port
4 Oil-level glass
5 Gas ballast knob
6 Threaded connection M 16 x 1.5 for inert gas ballast
7 Adapter
8 Cover plate
9 Cover plate; connection for oil filter
2 Operation
below +12 °C (55 °F) (see Section 2.5.3).
2.1 Installation The max. amount of heat given off approxi-
Warning The standard pump (except the versions mately corresponds to the rated motor
equipped with an explosion hazard rated power.
motor) is not suited for installation in explo-
sion hazard areas. Pumps equipped with
EExcIIT3 motors may only be used in type
2 areas. When planning such an application
please contact us first.
2.2 Connection to the
System
The TRIVAC-B pump can be set up on a flat, horizontal
surface. Rubber feet under the coupling housing ensure
that the pump can not slip. Before connecting the TRIVAC-B, remove the shipping
seals from the connection flanges (7/2) and (7/3).
If you wish firmly install the pump in place, insert bolts
through bore holes in the rubber feet. Caution Retain the shipping seals in case you need
to store the pump in the future.
Caution Max. tilt for the pump (without further The pump is shipped with intake and exhaust flanges
attachment) with possibly fitted standard mounted for horizontal connection of the connecting
accessories is 10° from the vertical. lines. You can easily convert the ports for vertical
connection by removing the four capscrews, rotating the
The rubber feet act as vibration absorbers. flanges as required, and reinstalling the capscrews.
They must therefore not be compressed by Connect the intake and exhaust lines with a centering
screws. When installing the TRIVAC-B ring and a clamping ring each. Use the centering ring
pump, make sure that the connections and with dirt trap for the intake port.
controls are readily accessible.
Connect the intake and exhaust line using anti-vibration
The site chosen should allow adequate air bellows, without placing any strain on the pump.
circulation to cool the pump (keep front and The intake line must be clean. Deposits in the intake line
rear unobstructed). The ambient temperatu- may outgas and adversely affect the vacuum. The
re should not exceed +40 °C (104 °F) and connecting flanges must be clean and undamaged.
not drop
GA 01.202/9.02 - 03/96 9
Operation
10 GA 01.202/9.02 - 03/96
Operation
GA 01.202/9.02 - 03/96 11
Operation
12 GA 01.202/9.02 - 03/96
Operation
2.5 Operation Once all vapours have been pumped off from a process
(e.g. during drying), the gas ballast valve can be closed
TRIVAC-B pumps can pump condensable gases and to improve the attainable ultimate pressure.
vapours, provided that the gas ballast valve (7/5) is open
and the pump has attained its operating temperature. 2.5.3 Operating Temperature
Proper operation of the TRIVAC-B is ensured in the
2.5.1 Pumping of Non-Condensable Gases ambient temperature range between 12 °C to 40 °C
If the process contains mainly permanent gases, the (55 °F to 104 °F).
pump may be operated without gas ballast, provided that At operating temperature, the surface temperature of the
the saturation vapour pressure at operating temperature oil case may lie between 40 °C and over 80 °C (104 °F
is not exceeded during compression. and 176 °F), depending on the load.
If the composition of the gases to be pumped is not
known and if condensation in the pump cannot be ruled Caution The surface temperature of the TRIVAC-B
out, run the pump with the gas ballast valve open in pumps may rise above 80 °C.
accordance with Section 2.5.2. There is the danger of receiving burns.
GA 01.202/9.02 - 03/96 13
Operation
14 GA 01.202/9.02 - 03/96
Operation
GA 01.202/9.02 - 03/96 15
Maintenance
Key to Fig. 9
1 Oil-fill plug
2 Oil-level mark maximum 4
3 Oil-level mark minimum
4 Oil-drain plug
3.2 Oil Change Screw the oil-drain plug back in (check the flat gasket
and reinstall a new one if necessary).
For proper operation of the pump, it is essential that the Remove the oil-fill plug (9/1) and fill in with fresh oil.
pump has an adequate supply of the correct and clean
oil at all times. Screw the oil-fill plug (9/1) back in.
16 GA 01.202/9.02 - 03/96
Maintenance
Key to Fig. 10
1 Oil case
2 Spring buckles
3 Demister
4 Frame for demister
5 Hex. socket screws (5 pcs.)
6 Silencing nozzle
7 Gasket
3.3 Cleaning the Dirt Trap The resultant noise at high intake pressures indicates
that the internal demister is dirty.
A wire-mesh sieve is located in the intake port of the Periodically clean or replace the internal demister; the
pump to act as a dirt trap for coarse particles. It should maintenance interval depends on the application. Use a
be kept clean to avoid a reduction of the pumping speed. suitable solvent for cleaning.
For this purpose, remove the dirt trap (2/2) from the inta- Shutdown the pump and drain the oil (see Section 3.2).
ke port and rinse it in a suitable vessel with solvent. Then
thoroughly dry it with compressed air. If the dirt trap is Pull the handle upward.
defective, replace it with a new one. Remove the five recessed screws (10/5) on the oil case
(10/1). Don’t remove the non-recessed screws; they hold
Attention The cleaning intervals depend on the appli- the motor flange in place.
cation. If the pump is exposed to large amo-
unts of abrasive materials, a dust filter Pull the oil case forward off the pump.
should be fitted into the intake line. Remove the gasket (10/7).
Press the spring buckles (10/2) sideways away from the
frame (10/4). Lift off the frame (10/4) and remove the
3.4 Removing and Fitting internal demister (10/3).
the Internal Demister Clean all parts and check that they are in perfect condi-
tion; if not, replace them with new parts.
Required tools:
Reassemble in the reverse order.
Allen keys 5 mm and 8 mm.
The internal demister is spring-mounted in a frame. Attention Torque for the screws (10/5) is 5 Nm.
When it is clogged, it rises periodically to reduce the
pressure difference created.
GA 01.202/9.02 - 03/96 17
Maintenance
Key to Fig. 11
1 Gasket
2 Handle
3 Hex. socket screw
4 Electric motor
5 Intermediate flange
6 Hex. socket screw
7 Coupling
8 Threaded pin
18 GA 01.202/9.02 - 03/96
Maintenance
Key to Fig. 12
1 Coupling element
2 Hexagon socket screw
3 Spring washer
4 Coupling (one half)
5 Key
6 Bushing
7 O-ring
8 Shaft seal
9 Centering disk
10 Hexagon socket screws
GA 01.202/9.02 - 03/96 19
Maintenance
If you do not have a shaft seal driver, place the shaft seal 3.7.2 Remounting the Pump Module
on the centering disk and carefully force it in with light
blows of the plastic hammer. When installing a new pump module, it is also advisable
to use a new gasket (13/4).
The shaft seal must not be bent.
Check the coupling element (13/5) for damage; if neces-
Carefully push the O-ring (12/7) and the bushing (12/6) sary, install a new one.
onto the shaft.
Use the tie rods supplied with the new pump module only
Push the centering disk (12/1) with the shaft seal onto if the old ones are damaged. To do so, unscrew the old
the shaft and up against the end plate; fasten it with the tie rods with lock nuts, and screw in the new ones. With
hex. socket screws (12/10). the aid of the lock nuts, tighten the tie rods. Then remo-
Insert the key (12/5). ve the lock nuts.
Mount the pump-half of the coupling (12/4) on the shaft. Before mounting the pump module, make sure that sea-
ling disc (13/3) fits correctly in its bore.
Install the spring washer (12/3) and tighten the screw
(12/2). Push the gasket (13/4) onto the tie rods (13/6), push the
coupling element (13/5) onto one coupling half.
Insert the coupling element (12/1) into the coupling and
mount the motor (see Section 3.5). Push the entire pump module (new or repaired) onto the
tie rods.
Allen keys 3 mm, 5 mm, 8 mm, box wrench 10 mm, pos- Fill in oil.
sibly pliers.
20 GA 01.202/9.02 - 03/96
Maintenance
Key to Fig. 13
1 Hex. nuts
2 Pump module
3 Washer
4 Gasket
5 Coupling element
6 Tie rods
GA 01.202/9.02 - 03/96 21
Maintenance
2 Check the oil level, change the oil Oil: N 62 or special and alter- x x Refill: only after the pump has been switched off.
if required. native oils, see Section 1.3
3 Check the quality of the oil, visually x x Visually: normally light and transparent, oil chan-
change the oil if required. ge is required when discolorations increase.
4 Clean the dirt trap in the intake Suitable cleaning agent and x ❏ Clean dirt trap with a cleaning agent and blow it
port, change it as required. compressed air. out with compressed air under a suction hood.
5 Clean the internal demister, chan- Suitable cleaning agent. x Already clean before the maintenance interval has
ge it as required. elapsed when the noise level increases.
22 GA 01.202/9.02 - 03/96
Maintenance
clean the oil level glass. ❏ Clean the oil level glass with a cleaning agent
Suitable cleaning agent and and blow it out with compressed air under a suction
compressed air. hood.
Cleaning agent according to national / international
specifications.
GA 01.202/9.02 - 03/96 23
Troubleshooting
4 Troubleshooting
Fault Possible cause Remedy Repair*
Pump does not Measuring technique or gauge is unsuitable. Use correct measuring technique and gauge. -
reach ultimate Measure the pressure directly at pump’s intake port.
pressure. External leak1). Repair the pump. Service
Anti-suckback valve is malfunctioning. Repair the valve. Service
Exhaust valve is malfunctioning. Repair the valve. Service
Oil is unsuitable. Change the oil (degas it, if necessary). 3.2
Vacuum lines are dirty. Clean vacuum lines. -
Pump is too small. Check the process data; replace the pump, if necessary. -
Pumping speed is Dirt trap in the intake port is clogged. Clean the dirt trap; 3.3
too low. Precaution: install a dust filter in intake line.
Exhaust filter is clogged. Install new filter elements. -
Connecting lines are too narrow or too long. Use adequately wide and short connecting lines. 2.2
Pump gets hotter Cooling air supply is obstructed. Set pump up correctly. 2.1
than usually obser- Ambient temperature is too high. Set pump up correctly. 2.1/2.5.3
ved. Process gas is too hot. Change the process. -
Oil level is too low. Add oil. 3.1
Oil is unsuitable. Change the oil. 3.2
Oil cycle is obstructed. Clean or repair the oil lines and channels. Service
Exhaust filter/exhaust line is obstructed. Replace the exhaust filter, clean the exhaust line. -
Exhaust valve is malfunctioning. Repair the valve. Service
Pump module is worn out. Replace the pump module. 3.7
Deviating mains voltage. Check the motor voltage and check the available mains voltage.
Oil in the intake line Oil comes from the vacuum system. Check the vacuum system. -
or in vacuum vessel. Anti-suckback valve is obstructed. Clean or repair the valve. Service
Sealing surfaces of anti-suckback valve are damaged or Clean or repair the intake port and valve. Service
dirty. Drain the excess oil.
Oil level is too high. 3.1
Oil is turbid. Condensation. Degas the oil or change the oil and clean the pump. Precaution: 2.5.2/3.2
open the gas ballast valve or insert a condensate trap.
Pump is excessively Oil level is much too low (oil is no longer visible). Add oil. 3.1/3.2
noisy. Silencing nozzle is clogged. Clean the silencing nozzle located near the top of the rear end Abb. 10
Intake pressure is too high. plate.
Internal demister is clogged. Lower the intake pressure. -
Coupling element is worn. Clean or replace demister. 3.4
Vanes or bushings are damaged. Install new coupling element. 3.5/3.6
Repair pump. Service
* Repair information: refer to the Section in the Operation Instruction stated here.
1) Bubble test: The warm pump with degassed oil is running without gas ballast and the intake blanked off. The exhaust line is led in to a vessel with water. If a an even-
ly spaced line of bubbles appears then the pump has an external leak.
24 GA 01.202/9.02 - 03/96
Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara-
tion.
This declaration can only be completed and signed by authorized and qualified staff.
____________________________________________
- Equipment type/model: _________________________________
____________________________________________
- Code No.: _________________________________
- Serial No.: _________________________________
____________________________________________
E
- Invoice No.: _________________________________ ____________________________________________
- Delivery date: __________________________ ____________________________________________
M
- Is the equipment free from potentially
harmful substances? - biological hazard*) yes ❒ no ❒
yes ❒ (go to Section 5) - radioactive*) yes ❒ no ❒
A
no ❒ (go to Section 4) - other harmful substances yes ❒ no ❒
S
*) Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances,
will not accepted without written evidence of decontamination!
Please list all substances, gases and by-products which may have come into contact with the equipment:
Trade name
Product name Chemical name Dangerous Measures First aid in case of
Manufacturer (or Symbol) material class if spillage human contact
1.
2.
3.
4.
5.
Copyright © 1991 by MaschinenbauVerlag GmbH, Lyoner Straße 18, 6000 Frankfurt/M. 71 Order No.: 2121
GA 01.202/9.02 - 03/96 25
EC Declaration of Conformity
We - LEYBOLD Vakuum GmbH - herewith declare that The products conform to the following directives:
the products defined below meet the basic requirements
• EC Directive on Machinery (89/392/EEC) and subse-
regarding safety and health of the relevant EEC direc-
quent 91/368/EEC
tives by design, type and versions which are brought into
circulation by us. • EC Directive on Low-Voltages (73/23/EEC)
In case of any product changes made without our appro- • EC -Electromagnetic Compatibility Guideline
val, this declaration will be void. (89/336EEC)
Designation of the products: Rotary vane pump, single Applied harmonised standards:
and dual stage
• EN 292, Part 1 and Part 2 Nov. 1991
• pr. EN 1012, Part 2 1993
Types: TRIVAC -B
• EN 60 204 1993
S/D 16 B; S/D 25 B
Cat. Nos.:
Applied national standards and technical specifica-
102 65; 103 25 103 26, 103 31, 103 32; 102 66; tions:
103 27; 112 65; 113 25; 113 26; 113 31; 113 32; • DIN 31 001 April 1983
112 66; 113 27; 114 06;
102 75; 103 35; 103 36; 103 48; 103 49;
102 76; 103 37; 112 75; 113 35; 113 36;
113 48; 113 49; 112 76; 113 37
113 29; 113 39; 113 33
————————————————————— —————————————————————
Plingen, Business Area Manager Frings, Design Department Manager
Forevacuum pumps Forevacuum pumps
LK.GV.0004.17.01.96
26 GA 01.202/9.02 - 03/96
GA 01.202/9.02 - 03/96 27
Printed in Germany on chlorine-free bleached paper
03.96
OF/RSP
1.80.6.637.04
GA 01.202/9.02 - 03/96