Vacuum Measuring,

Vacuum
Controlling

Vacuum Gauges

Calibration Service

260.00.02
Excerpt from the Leybold Full Line Catalog 2018
Catalog Part Vacuum - Measuring, Controlling
2 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold
Contents

Vacuum Measuring, Controlling

General
Applications for Vacuum Gauges 5
Select the Combination of Sensor and Gauges which is ideal for your Application 6
Basic Terms of Vacuum Metrology 10
Connection Accessories for Small Flanges 12
Products
Handheld Measurement Instruments
PIEZOVAC Sensor PV 101 / THERMOVAC Sensor TM 101 14
Active Sensors / Transmitters
CERAVAC Transmitters CTR 100 N and CTR 101 N 16
Linear Pressure Sensors DI/DU 200, DI/DU 201, DI/DU 2000, DI/DU 2001, DI/DU 2001 rel 20
THERMOVAC Transmitters TTR 91 N (S), TTR 96 N, TTR 911 N (C), TTR 916 N 24
THERMOVAC Transmitters TTR 101 N (S) 30
PENNINGVAC Transmitters PTR 90 N 34
PENNINGVAC Transmitters PTR 225 N, PTR 237 N 38
Loadlock Transmitter TTR 200 N, PTR 200 N 42
IONIVAC Transmitter ITR 90 46
IONIVAC Transmitter ITR 200 S 50
Spiral Tube 54
Connection Cables for Active Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Controller and Operating Units for Active Sensors
GRAPHIX ONE, TWO, THREE 58
DISPLAY ONE 60
DISPLAY TWO, THREE 62
Passive Sensors
THERMOVAC Sensors TR 211, TR 211 NPT, TR 212, TR 216 64
PENNINGVAC Sensors PR 25, PR 26, PR 27, PR 28 66
IONIVAC Sensors IE 414 and IE 514 68
Operating Unit for Passive Sensors
COMBIVAC CM 51, CM 52 70
IONIVAC IM 540 74
Mechanical Gauges (Vacuum Gauges Analog Display)
Bourdon Vacuum Gauges 77
Capsule Vacuum Gauges 78
Diaphragm Vacuum Gauge DIAVAC DV 1000 80
Additional Sensors
Older Sensors / Replacement Sensors 82

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 3

Pressure Switches and Control Instruments
Pressure Control System Move 84
Low Pressure Safety Switch PS 113 A 92
Pressure Switches PS 115 94
Switching Amplifier SV 110 96
Diaphragm Pressure Regulators MR 16 and MR 50 98
Miscellaneous
Leybold Calibration Service 100

4 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

General

Applications for Vacuum Gauges

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Mechanical engineering
Automotive industry;
filling of brake and air conditioning systems n n n n
Vacuum conveying technology n n n n n n
Packaging technology n n n n
Isolation vacuum n n n n n n n
Chemical processes
Absolute pressure measurements in gas mixtures n n n n n n
Drying and degassing processes n n n n
Solvent recovery n n n
Vacuum pressure control
in existing central vacuum supply systems n n
Electrics/electronics/optics
Evaporation and coating systems n n n n
Monitoring and controlling of sputter systems n n n
Semiconductor technology (CVD, plasma etching etc ) n n n
Ion implantation n n n
Lamp production n n n n n
Analytical instruments and surface physics
ESCA, SIMS, AES, XPS n n n n
Electron microscopy n n n n
Crystal growing n n n
Gas analysis systems, mass spectrometers n n n n
Research
Measurement of ultimate pressure in UHV systems n
Application in MBE systems n n n
Application in MBE systems n
Beam guidance systems, cyclotron n n
Fusion experiments n
Space simulation chamber n n n n
System control/pressure control
Pressure checks on backing pumps and vacuum systems n n
Safety circuits in vacuum systems,
protection of vacuum gate valves n n n n
Control of ionization vacuum gauges n
Pressure measurements on HV pump systems,
e g diffusion, TMP, cryopump systems n n n n
Venting systems n n
Valve control, pressure dependant systems control n n n n n n n
Simple pressure control arrangements n n n n n
Calibration
Calibration of vacuum gauges and mass spectrometers n n
Reference instruments for the determination
of the physical properties of gases n
Precision measurements of low pressures also,
in the presence of corrosive or reactive gases‚ n
Miscellaneous
Vacuum annealing, melting, soldering and
hardening furnaces n n n n
Cooling and air conditioning technology n n n n
Electron beam welding n n n n
Metallurgy n n n

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 5

Select the Combination of Sensor and
Operating Ranges for Active Sensors

mbar 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103

Capacitance Diaphragm
CERAVAC-Transmitters (x = 2, 3, 4 oder 5)
CTR 100 / 100 N (1000 Torr) 0,13 1330
CTR 100 / 100 N (100 Torr) 0,013 133
CTR 100 / 100 N (10 Torr) 0,0013 13
CTR 100 / 100 N (1 Torr) 0,00013 1,3
CTR 100 / 100 N (0,1 Torr) 0,000013 0,13
CTR 101 / 101 N (1000 Torr) 0,13 1330
CTR 101 / 101 N (100 Torr) 0,013 133
CTR 101 / 101 N (10 Torr) 0,0013 13
CTR 101 / 101 N (1 Torr) 0,00013 1,3
CTR 101 / 101 N (0,1 Torr) 0,000013 0,13
Thermal Conductivity (according to Pirani)
THERMOVAC-Transmitters
TTR 101
(Pirani combined with capacitance diaphragm) 5 · 10-5 1500
TTR 91 / 91 N 5 · 10 -5
1000
TTR 96 S / 96 N S 5 · 10-5 1000
TTR 911 / 911 N 1 · 10-5 1000

TTR 911 CC / 911 N C S 5 · 10 -5

1000
TTR 916 / 916 N 5 · 10-5 1000
Cold Cathode Ionization (according to Penning)
PENNINGVAC-Transmitters
PTR 90 / 90 N, DN 40 CF 1 · 10-8 1000
PTR 90 / 90 N, DN 40 ISO-KF 1 · 10-8 1000
PTR 90 / 90 N, DN 25 CF 1 · 10-8 1000
PTR 225 / 225 N, DN 25 ISO-KF 1 · 10-8 0,05
PTR 237 / 237 N, DN 40 CF 1 · 10-8 0,05

Hot Cathode Ionization

IONIVAC-Transmitters
(Bayard-Alpert combined with Pirani)
ITR 90 5 · 10-10 1000
ITR 200 with and without display 5 · 10-10 1000
Linear Pressure Sensors 1)

DI/DU 200 and 201 0,1 200

DI/DU 2000 and 2001
DI/DU 2001 rel . -1000 +1000

Handheld Measurement Instruments

THERMOVAC Sensors
TM 101 5 · 10-4 1200

Loadlock Transmitters
TTR 200 N, DN 16 ISO-KF 5 · 10-5 1500
PTR 200 N, DN 16 ISO-KF 1 · 10-8 1500
mbar 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103

6 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Gauges which is ideal for your Application
Operating Units for Active Sensors

DISPLAY GRAPHIX
ONE TWO THREE ONE TWO THREE IM 540
Part No. EU / US 230 001 230 024 230 025 230680V01 230681V01 230682V01 230 10

1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 3, 4

1 1, 2 1, 2, 3 1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3 3, 4
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3 3, 4

1 1, 2 1, 2, 3 1 1, 2 1, 2, 3
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3
1 1, 2 1, 2, 3 1 1, 2 1, 2, 3
1, 2 1, 2, 3 1 1, 2 1, 2, 3
1, 2 1, 2, 3 1 1, 2 1, 2, 3

1 1, 2 1, 2, 3
1 1, 2 1, 2, 3

1 (Only DU) 1,2 (Only DU) 1,2,3 (Only DU) 1 (Only DU) 1,2 (Only DU) 1,2,3 (Only DU)
1 (Only DU) 1,2 (Only DU) 1,2,3 (Only DU) 1 (Only DU) 1,2 (Only DU) 1,2,3 (Only DU)
1 (Only DU) 1,2 (Only DU) 1,2,3 (Only DU) 1 (Only DU) 1,2 (Only DU) 1,2,3 (Only DU)

1, 2, 3, 4 indicate the channel to which the sensor may be connected

1)
Possible

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 7

Select the Combination of Sensor and

Operating Ranges for passive Sensors

mbar 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103

Thermal Conductivity (according to Pirani)

THERMOVAC Sensors
TR 211 0.0005 1000
TR 211 NPT 0.0005 1000
TR 212 0.0005 1000
TR 216 0.0005 1000
Cold Cathode Ionization (according to Penning)
PENNINGVAC Sensors
PR 25 1 x 10-9 0.01
PR 26 1 x 10-9 0.01
PR 27 1 x 10-9 0.01
PR 28 1 x 10-9 0.01

IONIVAC Sensors
IE 414 (Bayard-Alpert) 2 x 10-11 0.01
IE 514 (Extractor) 11 x 10-12
-12 0.0001
mbar 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103

8 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Gauges which is ideal for your Application

Operating Units for passive Sensors

IONIVAC COMBIVAC
IM 540 CM 51 CM 52
Part No. EU / US 230 100 – –
Part No. RS 232 C – 230 110 230 115
Part No. Profibus – 230 111 230 116

1, 2 1, 2
1, 2 1, 2
1, 2 1, 2
1, 2 1, 2

3
3
3
3

1, 2 3
1, 2 3

1, 2, 3 indicate the channel to which the sensor may be connected

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 9

Basic Terms of Vacuum Metrology
Today, the total range of vacuum pres- Vacuum Gauges where the With increasing evacuation, the differ-
sure accessible to measurement ex- Pressure Readings are ence between the pressure which is to
tends from atmospheric pressure Independent of the Type of be measured and the pressure within
(about 1000 mbar (750 Torr)) down to Gas (Mechanical Vacuum the reference chamber becomes less,
10-12 mbar/Torr, i e it extends over Gauges) causing the diaphragm flex This flexure
15 powers of ten. The instruments may be transferred by mechanical
used for measuring the pressure within means like a lever, for example, to a
BOURDON Vacuum Gauge
this wide range are called vacuum pointer and scale, or electrically by
gauges For physical reasons it is not The inside of a tube which is bent into means of a strain gauge or a bending
possible to create a single vacuum a circular arc (the so-called Bourdon bar for conversion into an electrical
sensor through which it might be pos- tube) is connected to the vacuum measurement signal The measurement
sible to perform quantitative measure- system Due to the effect of the exter- range of such diaphragm vacuum
ments within the entire pressure range nal atmospheric pressure, the end of gauges extends from 1 mbar (0.75 Torr)
Therefore, a variety of different vacuum the tube bends more or less during the to over 2000 mbar (1500 Torr)
gauges are available, each with their evacuation process This actuates the
own characteristic measurement range pointer arrangement which is attached
which commonly extends over several to this point The corresponding pres- Capacitance Vacuum Gauge
powers of ten A difference is made sure can be read off on a linear scale
The pressure sensitive diaphragm of
between direct and indirect pressure With Bourdon gauges it is possible to
these capacitive absolute pressure
measurements In the case of direct (or roughly determine pressures between
sensors is made of Al2O3 ceramics The
absolute) pressure measurements, the 10 mbar (7 5 Torr) and atmospheric
term “capacitive measurement” means
readings obtained through the vacuum pressure
that a plate capacitor is created by the
gauge are independent of the type of diaphragm with a fixed electrode
gas and the pressure which is to be behind the diaphragm When the dis-
measured Common are so-called Capsule Vacuum Gauge
tance between the two plates of this
mechanical vacuum gauges where the This vacuum gauge contains a her- capacitor changes, a change in capaci-
pressure is determined directly by re- metically sealed, evacuated, thinwalled tance will result This change, which is
cording the force acting on the surface diaphragm capsule which is located proportional to the pressure, is then
of a diaphragm In the case of so- within the instrument As the vacuum converted into a corresponding electri-
called indirect pressure measurements pressure reduces, the capsule bulges cal measurement signal Here too, an
the pressure is determined as a func- This movement is transferred via a evacuated reference chamber serves
tion of a pressure dependant property system of levers to a pointer and can as the reference for the pressure mea-
of the gas (thermal conductivity, ioniza- then be read off as the pressure on a surements With capacitance gauges it
tion probability, for example) These linear scale is possible to accurately measure pres-
properties do not only depend on the sures from 10-5 mbar/Torr to well above
pressure, but also on the molar mass atmospheric pressure, whereby differ-
of the gases For this reason, the pres- Diaphragm Vacuum Gauge ent capacitance gauges having dia-
sure readings obtained through phragms of different thickness (and
vacuum gauges which rely on indirect In the case of the diaphragm vacuum
gauge which is capable of absolute therefore sensitivity) will have to be
pressure measurements, depend on used
the type of gas The readings usually pressure measurements, a sealed and
relate to air or nitrogen as the mea- evacuated vacuum chamber is sepa-
surement gas For the measurement of rated by a diaphragm from the vacuum
other vapors or gases the correspond- pressure to be measured This serves
ing correction factors must be applied as the reference quantity

10 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Vacuum Gauges where the Cold Cathode Ionization Other electrode arrangements permit
Pressure Readings depend of Vacuum Gauge (Penning) access to a higher range of pressures
the Type of Gas from 10-1 mbar/Torr down to
Here the pressure is measured through
10-10 mbar/Torr For the measurement
Thermal Conductivity Gauge a gas discharge within a gauge head
of pressures below 10-10 mbar/Torr so-
(Pirani) whereby the gas discharge is ignited by
called extractor ionization sensors after
applying a high tension The resulting
This measurement principle utilizes the Redhead are employed In extractor
ion current is output as a signal which
thermal conductivity of gases for the ionization gauges the created ions are
is proportional to the prevailing pres-
purpose of pressure measurements in focused onto a very thin and short ion
sure The gas discharge is maintained
the range from 10-4 mbar/Torr to detector Due to the geometrical
also at low pressures with the aid of a
atmospheric pressure Today, only the arrangement of this system, interfering
magnet
principle of the controlled Pirani gauge influences such as X-ray effects and ion
is used by Leybold in order to attain a New concepts for the design of such desorption can be almost completely
quick response The filament within the sensors permit safe and reliable ope- eliminated The extractor ionization
gauge head forms one arm of a Wheat- ration of these so-called Penning sen- gauge permits pressure measurements
stone bridge The heating voltage sors in the pressure range from 10-2 to in the range from 10-4 to 10-12 mbar/
which is applied to the bridge is con- 1 x 10-9 mbar/Torr Torr
trolled in such a way, that the filament
resistance and thus the temperature of
the filament remains constant regard- Cold Cathode Ionization Selection of the right Vacuum
less of the quantity of heat given off by Vacuum Gauge (Penning) Gauge
the filament Since the heat transfer These sensors commonly use three When selecting a suitable instrument
from the filament to the gas increases electrodes A hot cathode emits elec- for pressure measurements, the pres-
with increasing pressures, the voltage trons which impinge on an anode The sure range is not the only criteria The
across the bridge is a measure of the gas, the pressure of which is to be operating conditions for the instrument
pressure measured, is thus ionized The resulting play an important part If, for example,
Improvements with regard to tempe- positive ion current is detected through there is the risk of excessive contami-
rature compensation have resulted in the third electrode - the so-called ion nation, vibrations, or if air inrushes are
stable pressure readings also in the detector - and this current is used as to be expected etc , the instrument
face of large temperature changes, in the signal which is proportional to the must be rugged enough Thus for in-
particular when measuring low pres- pressure dustrial applications diaphragm gaug-
sures es, controlled thermal conductivity
The hot cathode sensors which are
gauges as well as cold cathode ioniza-
mostly used today, are based on the
tion gauges after Penning are strongly
Bayard-Alpert principle With this elec-
recommended Precision instruments
trode arrangement it is possible to
are very often quite sensitive to rough
make measurements in the pressure
operating conditions These should
range from 10-10 to 10-2 mbar/Torr
therefore only be used while observing
the corresponding applications infor-
mation

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 11

Connection Accessories for Small Flanges
Ordering Information DN 10 ISO-KF DN 16 ISO-KF DN 25 ISO-KF

Part No. Part No. Part No.

Outer centering ring with O-ring

Aluminum / FPM (FKM) ((Viton)) 183 53 183 53 183 54

Fine filter on centering ring with O-ring

Stainless steel / FPM (FKM) ((Viton)) 883 95 883 96 883 97

Baffle with centering ring (FPM) ((FKM)) – – 230 078

Connection accessories for metal seals

or bake out room up to 150 °C
Ultra sealing ring, aluminum (Set of 3) 883 73 883 73 883 75
Outer support ring 883 74 883 74 883 76

Clamping ring 882 75 882 75 882 77

Ordering Information DN 40 ISO-KF DN 16 CF DN 40 CF

Part No. Part No. Part No.

Outer centering ring with O-ring

Aluminum / FPM (FKM) ((Viton)) 183 55 – –

Fine filter on centering ring with O-ring

Stainless steel / FPM (FKM) ((Viton)) 883 98 – –

Baffle with centering ring (FPM) ((FKM)) 230 079 – –

Connection accessories for metal seals

or bake out room up to 150 °C
Ultra sealing ring, aluminum (Set of 3) 883 77 – –
Outer support ring 883 78 – –
Clamping ring 882 78 – –

Connection accessories
for CF connections
Copper seals, (set of 10 pieces) – 839 41 839 43
Screw (set of 25 pieces) – 839 00 839 01

Replacement sinter filter with centering ring 231 93 515 – –

12 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Notes

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 13

Products
Handheld Measuring Instruments
Digital PIEZOVAC Sensor PV 101
Digital THERMOVAC Sensor TM 101
The digital compact PIEZOVAC PV 101
and THERMOVAC TM 101 combine
high-quality sensor technology with
modern processor technology in a
handy design

Owing to their battery mode, the

devices can be attached and operated
at any pressure measuring point, and
directly display or store up to 2,000
values for later evaluations and
visualizations All data values stored
can be exported and displayed on a
computer via USB link and by means
PIEZOVAC Sensor PV 101 (left) and THERMOVAC Sensor TM 101 (right)
of the optional VacuGraph software
The software is especially useful for
28 61
setting up the devices or calculating
60 60
25 25 rises in pressure for detecting rough
leaks
G 1/4 A carrying case providing space for all
required accessories and for storing
120 30 120 30 and transport protection is enclosed
with the device and the software
44 44 DN 16 ISO-KF

Dimensional drawings PIEZOVAC PV 101 (mm) Dimensional drawings THERMOVAC TM 101 (mm)

The PIEZOVAC PV 101 has been measuring range of the high-precision Typical Applications
specially developed for food sector Pirani sensor, pressures of up to 5x10-4 - Versatile deployment with vacuum
deployments The device can be mbar can be displayed pump and vacuum plant servicings
operated directly under vacuum
- Comparative measurements of fixed
conditions Thanks to its detachable Advantages to the User
pressure gauges
flange connection the size of the
- Direct display of measuring values; - Direct measuring inside vacuum
sensor was significantly reduced. In the
other monitoring devices are not vessels or vacuum packs
medium vacuum range pressures of up
necessary
to 0 1 mbar will be traced and read - Measuring of rough leaks after main-
out The exclusive use of its piezo - Developed for deployments in tenance services
sensor significantly increases the demanding environments
battery’s service life so that the device - Versatile deployment due to mains-
is continuously ready for operation independent power supply
With a measuring rate of minimum 50 - High-precision measurements of all
ms, you are informed in short process common gas types
times on the current pressure
- Export and analysis of stored meas-
urement values via USB interface
The THERMOVAC TM 101 is the
essential device for on-site service - Online analysis of measurement val-
calls Thanks to the easy use and ues via USB interface
integrated measurement data memory,
pressures can be directly measured at
different locations for monitoring the
application Owing to the advanced

14 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data PIEZOVAC Sensor THERMOVAC Sensor
PV 101 TM 101
Piezo-resistive (gas type independent) and
Measurement principle Piezo-resistive
thermal conductance Pirani
Indicated units of measurement mbar, Torr, microns, hPa mbar, Torr, microns, hPa
Measurement range mbar (Torr) 1200 to 0,1 (900 to 0,075) 1200 to 5 x 10-4 (900 to 3 75 x 10-4)
Maximum overload bar abs . 2 2
Maximum overload
1200 – 10 mbar (900 to 75 Torr) ±0,3 % of full-scale ±0,3 % of full-scale
10 – 2 x 10-3 mbar -
(7 .5 to 1 .5 x 10-3 Torr) - 10 % of measured value
< 2 x 10-3 mbar
(< 1 .5 x 10-3 Torr) < factor 2 of measured value
Gas type correction factor Ar, CO2,He, CO, H2, N2, Kr Ar, CO2,He, CO, H2, N2, Kr
Materials in contact with the vacuum Stainless steel 1 4305, Viton®, silicon gel Stainless steel, gold, tungsten, nickel, glass, Viton
Measurement cycle s 0,1 (50 ms, from 2018 series) 10
Data storing rate s 0 1 to 6000 1 to 6000
Operating temperature
Sensor °C +5 to +50 +5 to +50
Battery °C -20 to +45 -20 to +45
Storage temperature
Sensor °C -20 to +60 -20 to +60
Battery °C +10 to +25 +10 to +25
Supply voltage Rechargeable 9 V battery (recommendation: Rechargeable 9 V battery (recommendation:
type Panasonic 6LR61PM, 9 V / 500 mAh) type Panasonic 6LR61PM, 9 V / 500 mAh)
or 12 – 15 V DC external adaptor or 12 – 15 V DC external adaptor
(miniature jack, + terminal at the tip) (miniature jack, + terminal at the tip)
Power consumption
< 200 mbar (< 150 Torr) mW 2 60
> 200 mbar (> 150 Torr) mW 2 2
Operating duration
6LR61 alkaline (vacuum operation) h < 2500 up to 75
Display LCD 12 mm LCD 12 mm
Connection (stainless steel) G 1/4 internal thread DN 16 ISO-KF
(DN 16 ISO-KF with adaptor, removable)
PC interface Mini USB-B connector Mini USB-B connector
Dimensions mm 60 x 120 x 50 (DN 10 ISO-KF) 60 x 120 x 61
mm 60 x 120 x 28 (G 1/4)
Protection class IP 40 40
Weight (including battery) kg (lbs) 0 2 (0 44) 0 23 (0 51)

Ordering Information PIEZOVAC Sensor THERMOVAC Sensor

PV 101 TM 101
Part No. Part No.
Sensor
230 080 V01 230 081 V01
Including AlMn battery, 9 V block 6LR 61
Accessory kit for VacuGraph Windows 230 082 V01 230 082 V01
software including
USB interface cable (2 m)
protection case with foam insert and
15 V wall power supply for 100 – 260 V,
50/60 Hz mains and AlMn battery,
9 V block 6LR 61

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 15

Active Sensors
CERAVAC Transmitters
CTR 100 N and CTR 101 N
The CERAVAC transmitters with an
advanced all-welded INCONEL® and
stainless steel sensor and microproces-
sor-based electronics offer excellent
accuracy and reproducibility The
CTR 100 N and CTR 101 N allow gas
type independent pressure measure-
ments and are able to tolerate bursts of
pressure without suffering physical
damage or calibration shifts The
robust sensor is suited for the most
corrosive processes as the sensor is
CERAVAC Transmitter CTR 100 N (left) und CERAVAC Transmitter CTR 101 N (right)
highly resistant to corrosion from com-
mon process chemicals The sensor of
Advantages to the User Typical Applications the CTR 101 N is internally heated and
- Excellent accuracy and long-term - General vacuum measurement and regulated to 45 °C to offer full-scale
stability control with very low measurement pressure ranges from 1000 to 0 1 Torr
- Very good temperature compensa- uncertainty
tion regardless of ambient condi- - Fore and medium vacuum pressure
tions measurement
- Highly resistant against corrosion - Research & Development
and aggressive gases - System process control
- Fast and accurate response to pres- - Chemical and Semiconductor pro-
sure changes cesses
- Improved reliability by high overpres- - LED and solar cell manufacturing
sure rating
- Physical Vapor Deposition (PVD)
- Serial Interface (RS 232 protocol)
- Reference sensor for calibration sys-
- Zero adjust push button tems
- Optional heated (45 °C) version
offers 2x better accuracy

INCONEL® is a registered trademark of

Inco Alloys International, Inc

16 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

79,7
79.7 104,6
104.6
74,7
74.7 100,4
100.4

37,6
37.6 26,6
26.6
40.9
40,9 43,5
43.5 41.4
41,4 29.9
29,9 32,5
32.5 30.4
30,4

1/2 Rohr
Tube DN 16 ISO-KF DN 16 CF
1/2
1/2 Rohr
Tube DN
DN 16
16 ISO-KF
ISO-KF DN
DN 16
16 CF
CF 8-VCR
8-VCR
8-VCR

RUN STATUS
STATUS

SP1
SP1
ZERO

SP2
SP2
ZERO
ZERO
SPSP

65
76,8
76.8

Dimensional drawing for the CERAVAC Transmitter CTR 100 N (mm) Dimensional drawing for the CERAVAC Transmitter CTR 101 N (mm)

100 %

80 %
Percentage of Full Scale

60 %

40 %

20 %

0%
0 2 4 6 8 10
VDC
Output Voltage

Characteristic of the CERAVAC Transmitter CTR 100 N and CTR 101 N

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 17

Technical Data CERAVAC Transmitter
CTR 100 N CTR 101 N
(Temperature Compensated) (45 °C heated)
Full scale (FS) / Measurement range 0 1 Torr / 1 x 10-5 to 0 1 Torr 0 1 Torr / 1 x 10-5 to 0 1 Torr
1 Torr / 1 x 10-4 to 1 Torr 1 Torr / 1 x 10-4 to 1 Torr
10 Torr / 1 x 10-3 to 10 Torr 10 Torr / 1 x 10-3 to 10 Torr
20 Torr / 2 x 10-3 to 20 Torr −
100 Torr / 0 01 to 100 Torr 100 Torr / 0 01 to 100 Torr
1000 Torr / 0 1 to 1000 Torr 1000 Torr / 0 1 to 1000 Torr
Measurement uncertainty 0 2% ± temperature effect 0 12% ± temperature effect
0 5% ± temperature effect (0 1 Torr) 0 15% ± temperature effect (0 1 Torr)
Sensor INCONEL® membrane INCONEL® membrane
Measurement principle Capacitance diaphragm gauge Capacitance diaphragm gauge
Supply voltage V DC +14 to +30 +14 to +30
Power consumption W ≤1 ≤ 11 (at operating temperature ≤ 8)
Electrical connection D-Sub 15 PIN D-Sub 15 PIN
Analog output
Measurement range V 0 – 10 0 – 10
Interface RS 232 RS 232
Setpoints 0 2
Status indicators LED LED
Max . cable lenght m 30 30
Max . overrange pressure bar (hPa) 3 1 (3100) 3 1 (3100)
Operating temperature range °C (°F) +15 to +50 +15 to +40
Storage temperature range °C (°F) -20 to +80 -20 to +80
Max . bakeout temperature °C (°F) Not bakeable Not bakeable
Max . rel . humidity % n .c . 25 to 95 25 to 95
Installation orientation Any Any
Wetted part material INCONEL®, Stainless steel 316 INCONEL®, Stainless steel 316
Dead volume, approx . cm3 6 29 6 29
Weight g (lbs) 513 (0 11) 669 (0 15)
Protection class IP 40 40
CE certification EMC Directive 2014/30/EEC EMC Directive 2014/30/EEC
Controller type GRAPHIX ONE / TWO / THREE GRAPHIX ONE / TWO / THREE
Temperature effects
Zero of FS % / °C 0 005 (1000/100/20/10 Torr) 0 0025 (1000/100/10/1 Torr)
0 015 1 Torr) 0 005 (0 1 Torr)
0 02 (0 1 Torr)
Span of reading % / °C 0 01 (1000/100/20/10/1 Torr) 0 01 (1000/100/10/1 Torr)
0 03 (0 1 Torr) 0 03 (0 1 Torr)
Response time (10% to 90% FS) ms 40 / 80 (1 Torr) / 120 (0 1 Torr) 40 / 80 (1 Torr) / 120 (0 1 Torr)

18 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information CERAVAC Transmitter
CTR 100 N CTR 101 N
Part No. Part No.

DN 16 ISO-KF
1000 Torr 230300V02 230320V02
100 Torr 230301V02 230321V02
20 Torr 230340V02 –
10 Torr 230302V02 230322V02
1 Torr 230303V02 230323V02
0 .1 Torr 230304V02 230324V02

DN 16 CF-R
1000 Torr 230305V02 230325V02
100 Torr 230306V02 230326V02
10 Torr 230307V02 230327V02
1 Torr 230308V02 230328V02
0 .1 Torr 230309V02 230329V02

Cajon 8-VCR
1000 Torr 230310V02 230330V02
100 Torr 230311V02 230331V02
10 Torr 230312V02 230332V02
1 Torr 230313V02 230333V02
0 .1 Torr 230314V02 230334V02

1/2" Tube
1000 Torr 230315V02 230335V02
100 Torr 230316V02 230336V02
10 Torr 230317V02 230337V02
1 Torr 230318V02 230338V02
0 .1 Torr 230319V02 230339V02
Calibration See Section “Miscellaneous”, paragraph See Section “Miscellaneous”, paragraph
“Leybold calibration service” “Leybold calibration service”

Operating Units
0GRAPHIX ONE 230680V01 230680V01
0GRAPHIX TWO 230681V01 230681V01
0GRAPHIX THREE 230682V01 230682V01

Connection cable, Sub-D 15-way female

to Sub-D 15-way male, shielded Type C Type C
05 m 124 55 124 55
10 m 230 022 230 022
15 m 124 56 124 56
20 m 124 57 124 57
30 m 124 58 124 58

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 19

Linear Pressure Sensors
DI/DU 200, DI/DU 201, DI/DU 2000,
DI/DU 2001, DI/DU 2001 rel
Piezo or capacitive pressure sensor
based on ceramics technology Avai-
lable as absolute or relative pressure
sensor

DI 200 (left) and DI 2000 (right), DU similar

Advantages to the User Typical Applications Operating Units

for DU sensors
- Absolute pressure ranges from - Pressure measurements in the
0 1 to 200 mbar or 1 to 2000 mbar rough vacuum range, and for corro- DISPLAY
- Relative pressure range from sive media (Solar, coating) - ONE
-1000 mbar to +1000 mbar - Chemical process engineering - TWO
- Excellent overload characteristic due - Vacuum packaging - THREE
to the AI2O3 ceramics diaphragm - Drying processes CENTER / GRAPHIX
- Highly corrosion resistant - Casting resin technology (degassing - ONE
- Independent of the type of gas of potting compounds)
- TWO
- Vibration resistant - Measurement of operating and filling
- THREE
- 2-wire pressure sensor (DI) pressure, during the production of
lamps
- 4-wire pressure sensor (DU)
- Filling systems for brake fluids
- Supply voltage range
(DI 201/DI 2001)
12 to 30 V DC (DI)
14 5 to 30 V DC (DU) - Filling systems for refrigerants

- Linear output signal 4 to 20 mA (DI) - Measurement of pressure relative to

atmospheric pressure
- Linear output signal 2 to 10 V (DU)
(DI/DU 2001 rel )
- Compact design
- Digital zero adjustment possible via
pushbutton
- IP 54 rated stainless steel housing
(DI/DU 200 und DI/DU 201),
IP 54 rated aluminum housing
(DI/DU 2000 und DI/DU 2001)
- DN 16 ISO-KF connection with
female G 1/4" inside thread

20 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

32

40

83
75
63
55

30 30 in mm

Dimensional drawing for the sensors

DI/DU 200 and DI/DU 201 (left), DI/DU 2000, DI/DU 2001 and DI/DU 2001 rel (right)

20 20
Iout (mA) = 0.08 x p(mbar) + 4.0 Iout (mA) = 0.008 x p(mbar) + 4.0
mA mA
p (mbar) = (Iout (mA) - 4.0) x 12.5 p (mbar) = (Iout (mA) - 4.0) x 125
15 15
Output

Output

10 10

5 5

0 0
0 50 100 150 mbar 200 0 500 1000 1500 mbar 2000
Pressure Pressure

Characteristic of the DI 200 and DI 201 Sensors Characteristic of the DI 2000 and DI 2001 Sensors

10 10
Vout (V) = 0.04 x p(mbar) + 2.0 Vout (V) = 0.004 x p(mbar) + 2.0
V V
p (mbar) = (Vout (V) - 2.0) x 25 p (mbar) = (Vout (V) - 2.0) x 250
8 8

6 6
Output

Output

4 4

2 2

0 0
0 50 100 150 mbar 200 0 500 1000 1500 mbar 2000
Pressure Pressure

Characteristic of the DU 200 and DU 201 Sensors Characteristic of the DU 2000 and DU 2001 Sensors

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 21

Technical Data DI/DU 200 DI/DU 201 DI/DU 2000 DI/DU 2001 DI/DU 2001
rel.

Measurement range mbar 0 1 to 200 0 1 to 200 1 to 2000 1 to 2000 -1000 to +1000

(Torr) (0 075 to 150) (0 075 to 150) (0 75 to 1500) (0 75 to 1500) (-750 to +750)
relative pressure
Overload range, max . (flange side) bar 6 6 5 5 5
Nominal temperature range °C 0 to +60 0 to +60 0 to +60 0 to +60 0 to +60
Measurement uncertainty 1)
% FS 0 25 0 25 0 25 0 25 0 25 3)

Repeatability % FS 0 05 0 05 0 05 0 05 0 05
Temperature error
Zero drift % FS/10°K 01 01 01 01 01
Sensitivity drift % FS/10°K 0 15 0 15 0 15 0 15 0 15
Measurement principle,
gas type independent Capacitive Capacitive Piezoresistive Piezoresistive Piezoresistive
Sensing head supply
DI Two-wire system Two-wire system Two-wire system Two-wire system Two-wire system
DU Four-wire system Four-wire system Four-wire system Four-wire system Four-wire system
Output signal
DI mA 4 to 20 4 to 20 4 to 20 4 to 20 4 to 20
DU V 2 to 10 2 to 10 2 to 10 2 to 10 2 to 10
Supply voltage
Operating range
DI V DC 12 to 30 12 to 30 12 to 30 12 to 30 12 to 30
DU V DC 14 5 to 30 14 5 to 30 14 5 to 30 14 5 to 30 14 5 to 30
Dead volume cm3 3,9 3,9 1,8 1,8 1,8
Vacuum connection DN 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF
Electrical connection
DI diode plug 7pole, diode plug 7pole, diode plug 7pole, diode plug 7pole, diode plug 7pole,
cable 5 m cable 5 m cable 5 m cable 5 m cable 5 m
DU plug FCC 68, plug FCC 68, plug FCC 68, plug FCC 68, plug FCC 68,
cable 5 m cable 5 m cable 5 m cable 5 m cable 5 m
Weight, approx .
DI kg (lbs) 0 36 (0 79) 0 36 (0 79) 0 26 (0 57) 0 26 (0 57) 0 26 (0 57)
DU kg (lbs) 0 34 (0 75) 0 34 (0 75) 0 24 (0 53) 0 24 (0 53) 0 24 (0 53)
Protection class IP 54 54 54 54 54
Materials in contact with the medium Stainless Steel Stainless Steel Stainless Steel Stainless Steel, Stainless Steel
1 4305 1 4305 1 4305 1 4305 1 4305
Al2O3 (96 %) Al2O3 (96 %) Al2O3 (96 %) Al2O3 (96 %) Al2O3 (96 %)
Ceramics Ceramics Ceramics Ceramics, Ceramics
FPM (FKM) EPDM FPM (FKM) EPDM EPDM
Operating units
DI series – – – – –
DU series 2)
DISPLAY ONE, DISPLAY ONE, DISPLAY ONE, DISPLAY ONE, DISPLAY ONE,
TWO, THREE TWO, THREE TWO, THREE TWO, THREE TWO, THREE
CENTER ONE, CENTER ONE, CENTER ONE, CENTER ONE, CENTER ONE,
TWO, THREE TWO, THREE TWO, THREE TWO, THREE TWO, THREE

1)
Sum of linearity, hysteresis and reproducibility
2)
May possibly require a firmware update
3)
0 25 % FS in the range of -1000 + 200 mbar / 0 5 % FS in the range of > +200 mbar

22 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information DI 200 DI 201 DI 2000 DI 2001 DI 2001 rel.

Part No. Part No. Part No. Part No. Part No.

Linear sensor
DI
complete with 5 m long connection cable
and connecting plug (circular connector) 158 12V01 158 14V01 158 13V01 158 15V01 245 000V01

Extension cable circular connector,

7-pole socket/plug
10 m 200 04 112 200 04 112 200 04 112 200 04 112 200 04 112
20 m 200 02 645 200 02 645 200 02 645 200 02 645 200 02 645

Ordering Information DU 200 DU 201 DU 2000 DU 2001 DU 2001 rel.

Part No. Part No. Part No. Part No. Part No.

Linear sensor
DU
complete with 5 m long connection cable
and connecting plug (FCC68) 230500V01 230501V01 230502V01 230503V01 230504V01

Extension cable FCC68,

socket/plug
10 m 230505V01 230505V01 230505V01 230505V01 230505V01
20 m 230506V01 230506V01 230506V01 230506V01 230506V01

Operating unit
GRAPHIX ONE / TWO / THREE please see chapter “Controller and Operating Units for Active Sensors”
DISPLAY ONE / TWO / THREE please see chapter “Controller and Operating Units for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 23

THERMOVAC-Transmitter
TTR 91 N (S), TTR 96 N, TTR 911 N (C), TTR 916 N
The THERMOVAC Transmitters are
active sensors using the unique
MEMS-Pirani technology (Micro-Elec-
tro-Mechanical-Systems) They offer
analog voltage output and the S-ver-
sions offer set point relays for improved
process control For chemical and
aggressive applications, the C-versions
are equipped with a Parylene HT®-
coated sensor The THERMOVAC
series is also equipped with a LED-ring
(360°) showing the status of the sensor

THERMOVAC Transmitter TTR N analog (left); digital RS232 (middle), with Display (right)
The TTR 911 N and 916 N have a
touch display and/or digital interfaces
available

Advantages to the User Typical Applications Sensor

- Very robust MEMS-Pirani solid state The THERMOVAC Transmitters offer a The THERMOVAC transmitters’ meas-
sensor resilient to vibration and high degree of versatility They are suit- urement principle is based on thermal
shock venting ed for applications in the medium and conductivity The transmitters are
rough vacuum range equipped with a MEMS-Pirani sensing
- Extended measuring range up to
Typical applications are: cell that consists of a silicon chip with
5 x 10-5 mbar and significantly higher
a heated resistive element
accuracy compared to conventional - Analytical instrumentation
The THERMOVAC transmitters with the
sensors - Research and development coated MEMS-Pirani are well suited for
- Reduced response times because - Vacuum Drying harsh processes and therefore more
of significantly improved signal pro- robust than the uncoated versions
- Controlling of ionization gauges
cessing Built-in relays allow switching functions
- Activation of UHV gauges
- High accuracy to be performed directly by the trans-
- System process control
- Individually temperature compensat- mitter, without the need of a program-
ed to ensure stable measurements - Process industry mable control
- Coated versions for improved An integration of the transmitters in
- High reproducibility
chemical resistance programmable control systems is facili-
- Measurement signal insensitive to
- General foreline vacuum measure- tated by the linear characteristic, which
mounting position
ment can be defined by entering a simple
- Robust stainless steel housing equation into a PLC or computer
- Available with display for pressure
units, set point parameters and
operation status 11
10
- Available with up to three set point V DC
relays for improved process control 8
7
- Optional Computer interfaces:
Analog Out

6
EtherCAT and RS 232 5
- Long tube version for reaching high- 4
3
er chamber bakeout temperatures
2
- LED ring to indicate status of the 1
sensor 0
10-5 10-4 10-3 10-2 10-1 100 101 102 103 mbar 104
Pressure
Parylene HT® is a registered trademark of
Characteristic of the THERMOVAC Transmitters TTR 91 N (S) / TTR 96 N and TTR 911 N (C) / TTR 916 N
Speciality Coating Systems Inc

24 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

39,30

34,10

12,84
22,28 115,00 52,29
30
33,78
DN 16 ISO-KF
DN 16 CF 33,78
10,29
DN 16 CF
1/8" NPT
15,90

16,65

40,75 in mm

Dimensional drawings for the THERMOVAC Transmitters TTR 91 N (S) / TTR 96 N

(Middle left – DN 16 CF standard version, middle right backable with elongated flange)

30,16

51,16

59,48 62,15
30,11
56,65
34,00
54,48 31,90

15,04

30
15,04
15,04
30
30 40,75

32,40
9,20

12,70
46
6,34
15,90
16,65

52,85
in mm

Dimensional drawings for the THERMOVAC Transmitters TTR 911 N (C) / TTR 916 N
left: with display, middle: with RS 232, right: with EtherCAT

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 25

Technical Data THERMOVAC Transmitter
TTR 91 N TTR 91 N S TTR 96 N S
Measurement range mbar (Torr) 5 0 x 10 to Atmosphere (3 75 x 10 to Atmosphere)
-5 -5

Measurement uncertainty mbar 5 x 10-4 to 1 x 10-3 ±10 %

of reading (typical) 1) 1 x 10-3 to 100 ±5 %
100 to atm ±25 %

Repeatability of reading (typical) 1)

mbar 1 x 10-3 to 100 ±2 %

Sensor MEMS-Pirani MEMS-Pirani Coated MEMS-Pirani

Measurement principle Thermal conductivity according to Pirani

Supply voltage V DC 9 – 30

Power consumption W <12

Electrical connection FCC 68, RJ45 (analog) / Sub-D 15 PIN (digital)

Analog output Vout = log10 (Pmbar) x 1 286 + 6 143

V DC 0 61 to 10
Resolution bit 16
Impedance Ω 100
Update rate Hz 16

Interfaces FCC 68, RJ45 (analog) / RS232, EtherCAT, Profibus (digital)

Set point
Range mbar (Torr) 2 7 x 10-4 to 1000 (2 0 x 10-4 to 750)
Relay 0 2 2
Relay contact rating 1 A at 30 V AC/ DC, resistive load
Relay contact resistance, max. mΩ 100
Relay contact endurance, min .
1 .0 A at 30 V DC load 100 000
0 .2 A at 30 V DC load 2 000 000

Status indicators LED-ring (360°)

Max . cable length m 100

Overpressure limit (abs .) bar 6 (10 bar for inert gases)

Operating temperature range 2)

°C (°F) 0 to 60 (32 to 140)

Storage temperature range °C (°F) -20 to +65 (-4 to 149)

Max . bakeout temperature °C (°F) 85 (185), non-operating [bakeable version up to 250 (482)]
Max . rel . humidity % n .c . ≤ 95
Installation orientation Any
Materials exposed to vacuum 304 stainless steel, 304 stainless steel,
Tin, Gold, Viton® Viton®, Parylene-HT®
Dead volume (DN 16 ISO-KF), approx . cm3 2 80
Weight (DN 16 ISO-KF) g 170
Protection class IP 40
CE certification EMC Directive 2014/30/EEC
Controller type DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

1)
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
2)
There may be minimal deviation tolerances in the range of 40 – 60 °C

26 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information THERMOVAC Transmitter
TTR 91 N (S) / TTR 96 N
Part No.

Without switching threshold

TTR 91 N, DN 16 ISO-KF 230035V02
TTR 91 N, 1/8" NPT 230038V02
TTR 91 N, DN 16 CF 230036V02
TTR 91 N, DN 16 CF, Flange extended
bakeable up to 250 °C (482 °F) 230037V02

With switching threshold

TTR 91 N, DN 16 ISO-KF, 2SP 230040V02
TTR 91 N, 1/8" NPT, 2SP 230043V02
TTR 96 N C, DN 16 ISO-KF, 2SP,
Parylene coated 230045V02
TTR 96 NC, DN 16 CF, 2SP, Flange extended
bakeable up to 250 °C (482 °F),
Parylene coated 230047V02

Calibration see chapter “Miscellaneous”, para “Leybold Calibration Service”

Operating Units
0DISPLAY ONE 230 001
0DISPLAY TWO 230 024
0DISPLAY THREE 230 025
0GRAPHIX ONE 230680V01
0GRAPHIX TWO 230681V01
0GRAPHIX THREE 230682V01

Connection cable, FCC 68 on both ends 1)

Type A
005 m 124 26
010 m 230 012
015 m 12427
020 m 12428
030 m 12429
050 m 12431
075 m 12432
100 m 12433

Optional accessories
Spiral tube DN 16 ISO-KF 230082
Connection cable, RS 232 1)
Type G
005 m 230550V01
010 m 230551V01
015 m 230552V01
020 m 230553V01

1)
See chapter “Connection cables for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 27

Technical Data THERMOVAC Transmitter
TTR 911 N (C/S) / TTR 916 N
Measurement range mbar (Torr) 5 0 x 10-5 to Atmosphere (3 75 x 10-5 to Atmosphere)
1 0 x 10-5 to Atmosphere (0 75 x 10-6 to Atmosphere) [RS 232 / Display]
Measurement uncertainty mbar 5 0 x 10-4 to 1 0 x 10-3 ±10 %
of reading 1) 1 0 x 10-3 to 100 ±5 %
100 to atm ±25 %
Repeatability of reading 1)
mbar 1 x 10-3 to 100 ±2 %
Sensor MEMS-Pirani
Measurement principle Thermal conductivity according to Pirani
Supply voltage V DC 9 - 30
Power consumption W <12
Electrical connection FCC 68, RJ45 (analog) / Sub-D 15 PIN (digital)
Analog output Vout = log10 (Pmbar) x 1 286 + 6 143
V DC 0 61 to 10
Resolution bit 16
Impedance Ω 100
Update rate Hz 16
Interfaces FCC 68, RJ 45 (analog) / RS 232, EtherCAT, Profibus (digital)
Set point
Range mbar (Torr) 1 0 x 10-4 to 1000 (0 75 x 10-5 to 750)
2 7 x 10-4 to 1000 (2 0 x 10-4 to 750) [RS 232 / Display]
Relay 2 [Profibus / Display] / 2 [RS 232]
Relay contact rating 1 A at 30 V AC/ DC, resistive load
Relay contact resistance, max. mΩ 100
Relay contact endurance, min .
1 .0 A at 30 V DC load 100 000
0 .2 A at 30 V DC load 2 000 000
Status indicators LED-ring (360°)
Max . cable length m 100
Overpressure limit (abs .) bar 6 (10 bar for inert gases)
Operating temperature range 2)
°C (°F) 0 to 60 (32 to 140)
Storage temperature range °C (°F) -20 to +65 (-4 to 149)
Max . bakeout temperature °C (°F) 85 (185), non-operating
Max . rel . humidity % n .c . 0 – 95
Installation orientation Any
Materials exposed to vacuum 304 stainless steel, Tin, Gold, Viton®, Parylene-HT® (coated)
Dead volume (DN 16 ISO-KF), approx . cm 3
2 80
Weight (DN 16 ISO-KF, RS 232 w/o Display) g 168
Protection class IP 40
CE certification EMC Directive 2014/30/EEC
Controller type DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

1)
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
2)
There may be minimal deviation tolerances in the range of 40 – 60 °C

28 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information THERMOVAC Transmitter
TTR 911 N (C/S) / TTR 916 N
Part No.

TTR 911 N, DN 16 ISO-KF, EtherCAT 230700V02

TTR 911 N C, DN 16 ISO-KF, EtherCAT,

Parylene coated 230701V02

TTR 911 N S, DN 16 ISO-KF, RS 232 89660V02

TTR 911 N, DN 16 ISO-KF, with display,

FCC 68 / RJ 45 89654V02

TTR 916 N C, DN 16 ISO-KF,

Parylene coated, FCC 68 / RJ 45 89656V02

Replacement sensor, DN 16 ISO-KF

TTR 911 N, without Parylene coating 230650V02
TTR 916 N SC, TTR 911 NC,
with Parylene coating 230651V02

Calibration See Section “Miscellaneous”, paragraph “Leybold calibration service”

Operating Units
0DISPLAY ONE 230 001
0DISPLAY TWO 230 024
0DISPLAY THREE 230 025
0GRAPHIX ONE 230680V01
0GRAPHIX TWO 230681V01
0GRAPHIX THREE 230682V01

Connection cable, FCC 68 on both ends Type A

005 m 124 26
010 m 230012
015 m 12427
020 m 12428
030 m 12429
050 m 12431
075 m 12432
100 m 12433

Optional accessories
Spiral tube DN 16 ISO-KF 230 082

RS232 / USB Converter for

setpoint definition of RS232 gauges 230399V02

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 29

THERMOVAC-Transmitter
TTR 101 N (S)
The THERMOVAC TTR 101 N models
utilize a thermal conductivity MEMS-
Pirani combined with a silicon mem-
brane Piezo They offer superior accu-
racy and gas type independent
readings between 10 mbar and 1500
mbar

THERMOVAC Transmitter TTR 101 N, analog (left), EtherCAT (middle), Display (right)

Advantages to the User Typical Applications Sensor

- Wide measurement range combin- The THERMOVAC TTR 101 N transmit- Dust and other particles may cause
ing two sensor technologies into a ters can be used in any application that measurement errors and reduced life-
single output requires absolute pressure measure- time Therefore we recommend the
ment and switching capabilities installation of a fine filter in critical appli-
- Extended measuring range up to
- General vacuum measurement and cations
5 x 10-5 mbar and significantly high-
control from low to medium vacuum Fine filters are listed in chapter “Gener-
er accuracy compared to conven-
pressure al”, para “Connection Accessories for
tional sensors
Small Flanges”
- Robust MEMS-Pirani and Piezo - Safety circuits in vacuum systems
solid state sensors resilient to vibra- - Control of high vacuum ionization
tion and shock venting gauges
- Rapid cycling by fast and repeatable - Analytical Instrumentation
pressure measurements - Research and development
- High reproducibility and high accu- - Vacuum Drying
racy
- System process control
- Gas type independent from 10 to
- Vacuum furnaces and sintering
1500 mbar
- Coating
- Autozero of Piezo
- Process industry
- Individually temperature compensat-
ed to ensure stable measurements
- Measurement signal insensitive to
mounting position
- Available with display for pressure
units, set point parameters and
operation status
- Available with up to three set point
relays for improved process control
- LED ring to indicate status of the
sensor

30 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

30,16
51,16

59,48
62,15

39,30 54,48 56,65

34,10

15,04

30
12,84
52,29 15,04
30 54,49
30 32,40
DN 16 ISO-KF
DN 16 ISO-KF
12,70 12,70
12,70
1/8" NPT 6,34
15,90

16,65
46
52,85
15,90
16,65

40,75

in mm in mm

Dimensional drawing for the THERMOVAC Transmitters TTR 101 N (S) (left) and TTR 101 N Display (right) Dimensional drawing for the TTR 101 N (EtherCAT)

30,11
11
34,00
10 31,90
V DC
8
7 15,04
Analog Out

6
30
5
4
3 40,75
2
1
0
9,20
10-5 10-4 10-3 10-2 10-1 100 101 102 103 mbar 104
Pressure
in mm

Characteristic of the THERMOVAC Transmitters TTR 101 N (S) Dimensional drawing for the TTR 101 N (RS 232)

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 31

Technical Data THERMOVAC Transmitter
TTR 101 N (S)
Measurement range mbar (Torr) 5 x 10-5 to 1500 (3 75 x 10-5 to 1125)
1 x 10-5 to 2000 (0 75 x 10-5 to 1500) [RS 232 / Display / EtherCAT]
Measurement uncertainty mbar 5 x 10-4 to 1 x 10-3 ±10 %
of reading 1) 1 x 10-3 to 10 ±5 %
11 to 1333 ±0 75 %
1333 to 2000 ±2 %
Repeatability of reading 1)
mbar 5 x 10-4 to 10 ±2 %
11 to 1067 ±0 2 %
Sensor
Measurement principle MEMS-Pirani and Piezo
Supply voltage V DC 9 – 30
Power consumption W < 1 2 [2 for EtherCAT]
Electrical connection FCC 68, RJ 45 (analog) / Sub-D 15 PIN (digital)
Analog output Vout = log10 (Pmbar) x 1 286 + 6 143
V DC 0 61 to 10 23
Resolution bit 16
Impedance Ω 100
Update rate Hz 16
Interfaces FCC 68, RJ 45 (analog) / RS 232, EtherCAT, Profibus (digital)
Set point
Range mbar (Torr) 2 7 x 10-4 to 1000 (2 7 x 10-4 to 750) / 1 0 x 10-4 to 1000 (0 75 x 10-4 to 750)
Relay 2/3
Relay contact rating 1 A at 30 V AC / DC, resistive load
Relay contact resistance, max. mΩ 100
Relay contact endurance, min .
1 .0 A at 30 V DC load 100 000
0 .2 A at 30 V DC load 2 000 000
Status indicators LED-ring (360°)
Max . cable length m 100
Overpressure limit (abs .) bar 2
Operating temperature range 2)
°C (°F) 0 to 60 (32 to 140)
Storage temperature range °C (°F) -20 to +65 (-4 to 149)
Max . bakeout temperature °C (°F) 85 (185), non-operating
Max . rel . humidity % n .c . 0 – 95
Installation orientation Any
Materials exposed to vacuum 304 stainless steel, Tin, Gold, Viton®
Dead volume (DN 16 ISO-KF), approx . cm3 28
Weight (DN 16 ISO-KF) g 168
Protection class IP 40
CE certification EMC Directive 2014/30/EEC
Controller type DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

1)
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
2)
There may be minimal deviation tolerances in the range of 40 – 60 °C

32 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information THERMOVAC Transmitter
TTR 101 N (S)
Part No.
TTR 101 N, DN 16 ISO-KF, FCC 68 / RJ 45 230350V02
TTR 101 N, 1/8" NPT, FCC 68 / RJ 45 230351V02
TTR 101 N, DN 16 ISO-KF, 2SP, FCC 68 / RJ 45 230352V02
TTR 101 N, 1/8" NPT, 2SP, FCC 68 / RJ 45 230353V02
TTR 101 N, DN 16 ISO-KF, Display,
FCC 68 / RJ 45 230354V02
TTR 101 N, 1/8" NPT, Display 230355V02
TTR 101 N, DN 16 ISO-KF, Display, 2SP,
FCC 68 / RJ 45 230356V02
TTR 101 N, DN 16 ISO-KF, 3SP, RS 232 230366V02
TTR 101 N, DN 16 ISO-KF, 2SP, EtherCAT 230702V02
Replacement sensor
Flange DN 16 ISO-KF 230361V02
Flange 1/8" NPT 230362V02
Centering ring with fine filter 16 ISO-KF 883 96
Calibration See Section “Miscellaneous”, paragraph “Leybold calibration service”

Operating Units
0DISPLAY ONE 230 001
0DISPLAY TWO 230 024
0DISPLAY THREE 230 025
0GRAPHIX ONE 230680V01
0GRAPHIX TWO 230681V01
0GRAPHIX THREE 230682V01

Connection cable, FCC 68 on both ends 1) Type A

005 m 124 26
010 m 230012
015 m 12427
020 m 12428
030 m 12429
050 m 12431
075 m 12432
100 m 12433

Optional accessories
Spiral tube DN 16 ISO-KF 230 082
Connection cable, RS 232 1) Type G
005 m 230550V01
010 m 230551V01
015 m 230552V01
020 m 230553V01

RS232 / USB Converter for

setpoint definition of RS232 gauges 230399V02

1)
See chapter “Connection cables for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 33

PENNINGVAC-Transmitter PTR 90 N
The PENNINGVAC transmitter com-
bines the cold cathode ionization prin-
ciple with the MEMS-Pirani sensor This
allows the complete coverage of the
measurement range from 1 x 10-8 mbar
to atmosphere by a single transmitter
The compact design, broad measure-
ment range and cost efficiency make
this transmitter the perfect gauge for
several applications

PENNINGVAC Transmitter PTR 90 N analog (left); digital (middle), with Display (right)

Advantages to the User Typical Applications Option

- Enhanced reliability through automa- Typical Applications within the meas- For protection of the sensor PTR 90 N
tically turning on the cold cathode urement range from 1 x 10-8 mbar to against contamination, radiation and
by the MEMS-Pirani atmosphere are: other disturbing factors the installation
- Significantly higher accuracy in the - General vacuum base pressure of a baffle is recommended
upper range by using the MEMS measurement Two types of baffles are available:
Pirani - Sputtering and coating technology A build-in version for CF connections is
- Longer lifetime due to low cold - Analytical technology (e g mass mounted in the sensor; the baffle for
cathode turn on pressure spectrometer control) ISO-KF connections is integrated in a
- High reproducibility centering ring
- Vacuum Furnaces
- Available with display for pressure - Multipurpose pressure measurement
units, set point parameters and ope- and control up to the high vacuum
ration status range
- Wide measurement range com- - Metallurgy
bining two sensor technologies into
- Scanning electron microscopes
a single output
- Process industry
- Ease of serviceability by modular
design of the cold cathode
- Automatic zeroing during pump
down cycle for improved accuracy
- LED ring to indicate status of the
sensor
- Measurement signal insensitive to
mounting position

34 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

51,16
30,11

114,80

85,10 107,00
87,20
90,30

85,10

8,60

40
8,60 10,60
28,92
40 8,60
55
DN 25 ISO-KF 40
40 ISO-KF 69,85 40,75
DN 40 CF
15,90 46,00 16,65

16,65 9,20 15,90

40,75
in mm in mm

Dimensional drawing for the PENNINGVAC transmitter PTR 90 N Dimensional drawing for the PENNINGVAC transmitters
PTR 90 N, RS 232 (left) and PTR 90 N, EtherCAT (right)

9
V DC
7
6
5
Analog Out

4
3
2
1
0
10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103 mbar 104
Pressure

Characteristics of the PENNINGVAC Transmitters PTR 90 N

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 35

Technical Data PENNINGVAC Transmitter
PTR 90 N

Measurement range mbar (Torr) 1 0 x 10-8 to 1000 (0 75 x 10-8 to 750)

Measurement uncertainty
of reading (typical) 1)
Cold cathode mbar 1 x 10-8 to 5 x 10-4 ±30 %
MEMS Pirani mbar 5 x 10-4 to 1 x 10-3 ±10 %
1 x 10-3 to 100 ±5 %
100 to 1000 ±25 %
Repeatability of reading (typical) 1)
mbar 1 x 10-3 to 100 ±2 %
Sensor Cold cathode and MEMS Pirani
Measurement principle Cold cathode ionization and thermal conductivity
Supply voltage V DC 9 – 30
Power consumption W <2
Electrical connection FCC 68, RJ 45 (analog) / Sub-D 15 PIN (digital)
Analog output Vout = log 0 6 (Pmbar) + 6 8
V DC 2 0 to 8 668 / 2 0 to 8 667 [RS 232]
Resolution bit 16
Impedance Ω 100
Update rate Hz 16
Interfaces FCC 68, RJ 45 (analog) / RS232, EtherCAT (digital)
Set point
Range mbar (Torr) 1 0 x 10-8 to 1000 (0 75 x 10-8 to 750)
Relay 0 / 2 [RS 232]
Relay contact rating 1 A at 30 V AC / DC, resistive load
Relay contact resistance, max. mΩ 100
Relay contact endurance, min .
1 .0 A at 30 V DC load 100 000
0 .2 A at 30 V DC load 2 000 000
Status indicators LED-ring (360°)
Max . cable lenght m 100
Overpressure limit bar 6
Operating temperature range 2)
°C (°F) 0 to 60 (32 to 140)
Storage temperature range °C (°F) -20 to +65 (-4 to 149)
Max . bakeout temperature (power off)
°C (°F) 85 (185)
Max . rel . humidity % n .c . 0 – 95
Installation orientation Any
Materials exposed to vacuum 304 stainless steel, 403 stainless steel, Ceramic (Al2O3),
Tin, Gold, Viton®, Titanium
Dead volume (DN 25 ISO-KF), approx . cm3 28 6
Weight (DN 25 ISO-KF) g 321
Protection class IP 40
CE certification EMC Directive 2014/30/EEC
Controller type DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

1)
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
2)
There may be minimal deviation tolerances in the range of 40 - 60 °C

36 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information PENNINGVAC Transmitter
PTR 90 N
Part No.

PTR 90 N
DN 25 ISO-KF, FCC 68 / RJ 45 230070V02
DN 25 ISO-KF, Display, FCC 68 / RJ 45 230085V02
DN 25 ISO-KF, EtherCAT 230089V02
DN 25 ISO-KF, 2 SP, RS 232 230088V02
DN 40 ISO-KF, FCC 68 / RJ 45 230071V02
DN 40 CF, FCC 68 / RJ 45 230072V02

Replacement cathode plate

for PTR 90 N / PTR 225 N
(up to serial no . 17022777352) EK16291V02
for PTR 90 N / PTR 225 N
(from serial no . 17022777353) EK16292V02

Replacement anode ring

for PTR 90 N / PTR 225 N
(up to serial no . 17022777352) 20028711V02
for PTR 90 N / PTR 225 N
(from serial no . 17022777353) E20028712V02

Baffle, with centering ring (FPM (FKM))

DN 25 ISO-KF 230 078
DN 40 ISO-KF 230 079

Calibration see chapter “Miscellaneous”, para “Leybold Calibration Service”

Operating Units
0DISPLAY ONE 230 001
0DISPLAY TWO 230 024
0DISPLAY THREE 230 025
0GRAPHIX ONE 230680V01
0GRAPHIX TWO 230681V01
0GRAPHIX THREE 230682V01

Connection cable, FCC 68 on both ends1) Type A

005 m 124 26
010 m 230 012
015 m 124 27
020 m 124 28
030 m 124 29
050 m 124 31
075 m 124 32
100 m 124 33

Connection cable, RS 232 1)

Type G
005 m 230550V01
010 m 230551V01
015 m 230552V01
020 m 230553V01

RS232 / USB Converter for

setpoint definition of RS232 gauges 230399V02

1)
See chapter “Connection cables for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 37

PENNINGVAC Transmitters
PTR 225 N, PTR 237 N
The PENNINGVAC Transmitters are
based on the cold cathode measure-
ment principle The compact design
and broad measuring range of the
PTR 225 N, makes it well suited for
easy system integration and process
control from medium to high vacuum
pressure Options include various serial
interfaces and programmable setpoint
relays, making it an ideal transmitter for
control systems

PENNINGVAC Transmitter PTR 225 N analog (left), PTR 225 N digital (middle), PTR 237 N analog (right)

Advantages to the User Typical Applications Option

- Good performance to price ratio - Analytical Instrumentation For protection the PTR sensors against
- Scanning electron microscopes contamination, radiation and other dis-
- Available with up to three setpoints
turbing factors the installation of a baff-
- Ease of serviceability by modular - Evaporation and sputtering systems
le is recommended
design of the cold cathode - High vacuum systems
- High reproducibility and high accu- - Coating systems
racy - Vacuum furnaces
- Available with display for pressure - Cryo processes
units, set point parameters and
- Systems control in the medium and
operation status
high vacuum range
- LED ring to indicate status of the
sensor
- Measurement signal insensitive to
mounting position
- Optional Computer interfaces:
Baffle DN 25 ISO-KF, with centering ring,
EtherCAT and RS 232
Part No 230 078

38 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

30,21

82,90

88,10
30,11

85 113,45

107,95

10,80 12,30 82,90

31,12
40
55 10,80 10,80
DN 25 ISO-KF
40 ISO-KF 69,85 40
40
DN 40 CF
15,90
40,75
16,65 32,40

12,70
9,20
6,34

40,75

57,71

in mm in mm

Dimensional drawing for the PENNINGVAC transmitters Dimensional drawing for the PENNINGVAC transmitters
PTR 225 N and PTR 237 N PTR 225 N, RS 232 (left) and PTR 225 N, EtherCAT (right)

10
V DC
8
7
Analog Out

6
5
4
3
2
1
0
10-9 10-8 10-7 10-6 10-5 10-4 10-3 mbar 10-2
Pressure

Characteristic of the PENNINGVAC transmitters PTR 225 S/237

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 39

Technical Data PENNINGVAC Transmitter
PTR 225 N / PTR 237 N
Measurement range mbar (Torr) 1 0 x 10-8 to 5 x 10-3 (0 75 x 10-8 to 3 75 x 10-3)
1 0 x 10-8 to 6 7 x 10-3 (0 75 x 10-8 to 5 0 x 10-3) [RS 232/EtherCAT]
Measurement uncertainty
of reading 1)
Cold cathode mbar 1 x 10-8 to 1 x 10-3 ±30 %
Repeatability of reading 1)
mbar 1 x 10-8 to 1 x 10-3 ±30 %
Sensor Cold cathode
Measurement principle Cold cathode ionization
Supply voltage V DC 9 – 30
Power consumption W <2
Electrical connection FCC 68 / RJ 45, RS 232
Analog output Vout = 1 33 x log 10 (Pmbar) + 12 66
V DC 2 0 to 9 6
Resolution bit 16
Impedance Ω 100
Update rate Hz 16
Interfaces FCC 68 / RJ 45
Set point
Relay range mbar (Torr) 1 x 10-8 to 5 x 10-3 (0 75 x 10-8 to 3 75 x 10-3)
Relay 2 [RS 232)
Relay contact rating 1 A at 30 V AC / DC, resistive load
Relay contact resistance mΩ 100
Relay contact endurance, min .
1 .0 A at 30 V DC load 100 000
0 .2 A at 30 V DC load 2 000 000
Status indicators LED-ring (360°)
Max . cable lenght m 100
Overpressure limit bar 6
Operating temperature range 2)
°C (°F) 0 to 60 (32 to 140)
Storage temperature range °C (°F) -20 to +65 (-4 to 149)
Max . bakeout temperature (power off)
°C (°F) 85 (185)
Max . rel . humidity % n .c . 0 – 95
Installation orientation Any
Materials exposed to vacuum 304 stainless steel, 403 stainless steel, Ceramic (Al2O3),
Viton®, Titanium
Dead volume (DN 25 ISO-KF), approx . cm3 25 6
Weight (DN 25 ISO-KF) g 318
Protection class IP 40
CE certification EMC Directive 2014/30/EC
Controller type DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

1)
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
2)
There may be minimal deviation tolerances in the range of 40 – 60 °C

40 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information PENNINGVAC Transmitter
PTR 225 N / PTR 237 N
Part No.

PTR 225 N
DN 25 ISO-KF, FCC 68 / RJ 45 15734V02
DN 25 ISO-KF, 3 SP, RS 232 89642V02
DN 25 ISO-KF, EtherCAT 230703V02
PTR 237 N
DN 40 CF, FCC 68 / RJ 45 15736V02

Replacement cathode plate

for PTR 90 N / PTR 225 N
(up to serial no . 17022777352) EK16291V02
for PTR 90 N / PTR 225 N
(from serial no . 17022777353) EK16292V02

Replacement anode ring

for PTR 90 N / PTR 225 N
(up to serial no . 17022777352) 20028711V02
for PTR 90 N / PTR 225 N
(from serial no . 17022777353) E200287112V02

Baffle, with centering ring (FPM (FKM))

DN 25 ISO-KF 230 078

Calibration see chapter “Miscellaneous”, para “Leybold Calibration Service”

Operating Units
0DISPLAY TWO 230 024
0DISPLAY THREE 230 025
0GRAPHIX ONE 230680V01
0GRAPHIX TWO 230681V01
0GRAPHIX THREE 230682V01

Connection cable, FCC 68 on both ends 1)

Type A
005 m 124 26
010 m 230 012
015 m 124 27
020 m 124 28
030 m 124 29
050 m 124 31
075 m 124 32
100 m 124 33

Connection cable, RS 232 1)

Type G
005 m 230550V01
010 m 230551V01
015 m 230552V01
020 m 230553V01

RS232 / USB Converter for

setpoint definition of RS232 gauges 230399V02

1)
See chapter “Connection cables for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 41

Loadlock Transmitter
THERMOVAC TTR 200 N
PENNINGVAC PTR 200 N
The TTR 200 N and PTR 200 N com-
bine different measurement technolo-
gies in one housing making them the
perfect gauges for load lock applica-
tions The transmitters offer a wide
absolute measurement range and a dif-
ferential range of -1013 to 1013 mbar
(relative to ambient pressure) The high-
ly accurate differential sensor is ideal
for loadlock control since it is insensi-
tive to changes in ambient pressure
conditions Efficient loadlock control will
improve throughput due to reduced
cycle time
THERMOVAC Transmitter TTR 200 N (left) and PENNINGVAC Transmitter PTR 200 N (right)

Advantages to the User Typical Applications Option

- Fast, accurate and repeatable pres- - Load lock applications For protection of the sensor TTR 200 N
sure measurements reduce process - Chamber over and under pressure and PTR 200 N against contamination,
cycle time control relative to ambient radiation and other disturbing factors
- Gas type independent pressure - Coating Systems (e g UNIVEX) the installation of a baffle is recommen-
measurements from 50 mbar to ded
- Vacuum chamber production
1500 mbar Two types of baffles are available:
- Processes requiring both absolute
- Combination of absolute and differ- pressure measurement and atmos- A build-in version for CF connections is
ential measurements offer unprece- pheric switching capabilities mounted in the sensor; the baffle for
dented loadlock control ISO-KF connections is integrated in a
- Analytical equipment (e g mass
- Three integrated setpoints centering ring
spectrometer control)
- Up to three sensors in one housing - Scanning electron microscopes
for a wide measurement range
- Measurement signal insensitive to
mounting position
- Ease of operation via analog output
and digital communication
- LED ring to indicate status of the
sensor

42 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

30,11

85,00
30,11

34,00
31,90 82,90

10,80
15,04
40
30

40,75 40,75

9,20 9,20

in mm in mm

Dimensional drawing for the THERMOVAC Dimensional drawing for the PENNINGVAC
transmitter TTR 200 N transmitter PTR 200 N

11
10
V DC
8
7
Analog Out

6
5
4
3
2
1
0
10-5 10-4 10-3 10-2 10-1 100 101 102 103 mbar 104
Pressure

Characteristic of the THERMOVAC Transmitter TTR 200 N

9
V DC
7
Analog Out

6
5
4
3
2
1
0
10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103 mbar 104
Pressure

Characteristic of the PENNINGVAC transmitter PTR 200 N

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 43

Technical Data Loadlock Transmitter
TTR 200 N PTR 200 N
Measurement range (N2 and air) mbar (Torr) 5 0 x 10-5 to 1500 (3 75 x 10-5 to 1125) 1 0 x 10-8 to 1500 (0 75 x 10-5 to 1125)
absolute mbar 5 x 10-5 to 1500 [RS 232] 1 x 10-8 to atm [RS 232]
(Torr) (3 75 x 10-5 to 1125) [RS 232] (0 75 x 10-8 to atm ) [RS 232]
differential mbar -1013 to 1013 [RS 232] -1013 to 1013 [RS 232]
(Torr) (-760 to 760) [RS 232] (-760 to 760) [RS 232]
Measurement uncertainty
of reading (typical) 1)
Cold cathode mbar – 1 x 10-8 to 1 x 10-3 ±30 %
– 1 x 10-4 to 1 x 10-3 ±10 %
– 1 x 10-3 to 100 ±5 %
– 100 to atm ±25 %
MEMS-Pirani mbar 1 x 10-4 to 1 x 10-3 ±10 % 1 x 10-4 to 1 x 10-3 ±10 %
1 x 10-3 to 100 ±5 % 1 x 10-3 to 100 ±5 %
100 to atm ±25 % 100 to atm ±25 %
Diff . Piezo mbar -10 to 10 ±10 % ±0 67 mbar - 10 to 10 ±10 % ±0 67 mbar
-100 to -10 ±8 % -100 to -10 ±8 %
-1013 to -100 ±1 % -1013 to -100 ±1 %
10 to 100 ±5 % 10 to 100 ±5 %
Repeatability of reading (typical) 1)

Penning mbar 1 x 10-3 to 100 ±2 % 1 x 10-8 to 1 x 10-3 ±30 %

MEMS-Pirani mbar 1 x 10-3 to 100 ±2 % 1 x 10-3 to 100 ±2 %
Diff . Piezo mbar -1013 to 10 ±1 % -1013 to -10 ±1 %
Sensor MEMS-Pirani and Diff Piezo Cold cathode, MEMS-Pirani and Diff Piezo
Measurement principle Thermal conductivity, combined with Piezo Thermal conductivity, combined with Piezo
and cold cathode ionization
Supply voltage V DC 9 – 30 9 – 30
Power consumption W <12 <2
Electrical connection D-Sub 15 pin D-Sub 15 pin
Analog output Vout = log10 (Pmbar) x 1 286 + 6 143 Vout = log 0 6 (Pmbar) + 6 8
V DC 0 61 to 10 23 2 0 to 8 667
Resolution bit 16 16
Impedance Ω 100 100
Update rate Hz 16 16
Interfaces RS 232 RS 232
Set point
Range
Absolute mbar (Torr) 1 x 10-4 to 1333 (0 75 x 10-4 to 1000) 1 x 10-8 to 1333 (0 75 x 10-8 to 1000)
Differential mbar (Torr) -1013 to 133 (-775 to 100) -1013 to 133 (-775 to 100)
Relay 3 3
Relay contact rating 1 A at 30 V AC / DC, resistive load 1 A at 30 V AC / DC, resistive load
Relay contact resistance, max. mΩ 100 100
Relay contact endurance, min .
1 .0 A at 30 V DC load 100 000 100 000
0 .2 A at 30 V DC load 2 000 000 2 000 000
Status indicators LED-ring (360°) LED-ring (360°)
Max . cable length m 20 20
Overpressure limit (abs .) bar 2 2
Operating temperature range 2)
°C (°F) 0 to 60 (32 to 140) 0 to 60 (32 to 140)
Storage temperature range °C (°F) -20 to +65 (-4 to 149) -20 to +65 (-4 to 149)
Max . bakeout temperature (power off) °C (°F) 85 (185) 85 (185)
Max . rel . humidity % n .c . 0 – 95 0 – 95
Installation orientation Any Any
Materials exposed to vacuum 304 stainless steel, 304 stainless steel,
Tin, Gold, Viton®, Ceramic (Al2O3),
Tin, Gold, Viton®, Titanium,
Dead volume (DN 16 ISO-KF), approx . cm3 28 28 6
Weight (DN 16 ISO-KF) g 305 321
Protection class IP 40 40
CE certification EMC Directive 2014/30/EC EMC Directive 2014/30/EC
Controller type GRAPHIX ONE / TWO / THREE GRAPHIX ONE / TWO / THREE

1)
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
2)
There may be minimal deviation tolerances in the range of 40 - 60 °C

44 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information Loadlock Transmitter
TTR 200 N PTR 200 N
Part No. Part No.

THERMOVAC TTR 200 N

DN 16 ISO-KF, 3SP 230365V02 –

PENNINGVAC PTR 200 N

DN 25 ISO-KF, RS 232, 3 SP – 230087V02

Replacement cathode plate

for PTR 90 N / PTR 225 N
(up to serial no . 17022777352) – EK16991V02
for PTR 90 N / PTR 225 N
(from serial no . 17022777353) – EK16992V02

Replacement anode ring

for PTR 90 N / PTR 225 N
(up to serial no . 17022777352) – 20028711V02
for PTR 90 N / PTR 225 N
(from serial no . 17022777353) – E20028712V02

Baffle, with centering ring (FPM (FKM))

DN 25 ISO-KF – 230 078

Centering ring with fine filter DN 16 ISO-KF 883 96 –

Optional accessories
Connection cable, RS 232 1)
Type G Type G
5m 230550V01 230550V01
10 m 230551V01 230551V01
15 m 230552V01 230552V01
20 m 230553V01 230553V01

RS232 / USB Converter for

setpoint definition and parametrization
of RS232 gauges 230399V02 230399V02

1)
See chapter “Connection cables for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 45

IONIVAC Transmitter ITR 90
The ITR 90 is a optimized combination
transmitter The combination of a hot
cathode ionisation sensor according to
Bayard-Alpert and a Pirani sensor per-
mits vacuum pressure measurements
of nonignitable gases and gas mixtures
in the pressure range from 5 x 10-10 to
1000 mbar

The ITR 90 can be ordered with inte-

grated display or Profibus interface

Advantages to the User Typical Applications

- Continuous pressure measurements - Analytical
from 10-10 mbar to atmospheric - Evaporation and coating
pressure
- Vacuum furnaces
- High degree of reproducibility within
- General purpose pressure measure-
the typical range for process pres-
ments in the fine and high vacuum
sures of 10-2 to 10-8 mbar
ranges
- Controlled switching on and off
sequencing through the integrated
double Pirani optimized the service
life of the yttrium coated iridium
cathodes
- Compact design
- Enclosed, rugged electrode geome-
try in a rugged metal housing
- Efficient degassing by electron bom-
bardment
- Simple fitting of the sensor
- Extension for higher bake out tem-
peratures during the measurements
- One signal covering 13 decades
- One flange joint for 13 decade
- ITR 90 model with built-in display for
stand-alone operation without addi-
tional display components
- RS 232 C interface

46 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Sensor
The sensor of the ITR 90 contains a When using the bake out extension,
dual filament Pirani system as well as a measurements will be possible also at
Bayard-Alpert measurement system flange temperatures up to 150 °C

10
Volt
8 Equation
7
p = 10(u-7.75)/ 0.75
6
U(a)

5
4
3
2
1
0
10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 10 mbar 1000
Pressure

Characteristic of the ITR 90

58 (2.28")

67 (2.64")

153 (6")

~105

48 (1.89") 42 (1.65")

DN 40 CF-R DN 25 ISO-KF ø40

in mm

Dimensional drawing for the ITR 90; dimensions in mm, in brackets ( ) are in inch Dimensional drawing for the bake out extension
(Image with integrated display; Profibus interface differing)

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 47

Technical Data IONIVAC-Transmitter
ITR 90
Measurement range mbar (Torr) 5 x 10-10 to 1000 (3 75 x 10-10 to 750)

Measurement uncertainty, 10-1 – 1000 mbar ≥ 15% of the meas. value

Measurement uncertainty, 10-8 – 10-2 mbar 15% of the meas value
Reproducibility, 10-8 – 10-2 mbar 5% of the meas value

Principles of measurement Hot cathode ionization according to Bayard-Alpert

combined with thermal conductivity according to Pirani

Degas Electron bombardment 3 minutes, max

Supply voltage 20 to 28 V DC, typ 24 V DC16

Power consumption, max . W 16

Storage / nominal temperature range °C -20 to +70 / 0 to +50

Protection class IP 30

Weight, approx .
ITR 90, DN 25 ISO-KF kg (lbs) 0 285 (0 64)
ITR 90, DN 40 CF kg (lbs) 0 550 (1 24)

Sensor Fully sealed, exchangeable

Degassing temperature, max . °C 150 1)

Dead volume, approx . cm3 24 at DN 25 ISO-KF

34 at DN 40 CF

Materials in contact with the medium Cu, W, Glass, NiFe, Mo, Stainless steel, Aluminum, Iridium, Yttrium, NiCr

Overpressure rating (abs .) bar 2

Signal output (Ra ≥ 10 kΩ)

Measurement signal 0 – 10 V, 0 774 – 10 V, 0 75 V pro decade
Error signal < 0,5 V

Interface (standard / optional) RS 232 C / ProfiBus

Electrical connection 15-way Sub-D male connector / pin contacts

Cable length, max . m 100 / 30 at RS 232 C

1)
Flange temperature when using the bake out extension

48 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information IONIVAC-Transmitter ITR 90
without Display with Display
Part No. Part No.

ITR 90, DN 25 ISO-KF 120 90 120 91

ITR 90, DN 25 ISO-KF, Profibus interface 230 030 –

ITR 90, DN 40 CF-R, rotatable CF flange 120 92 120 94

ITR 90, DN 40 CF-R, rotatable CF flange 230 031 –

Profibus interface

Power supply for IONIVAC transmitter

100 – 240 V AC / 24 V DC
incl . 5 m connection cable and
5 m RS 232 C cable 121 06 121 06
Bake out extension (100 mm, approx .) 127 06 127 06
Baffle, DN 25 ISO-KF, with
Installation baffle for CF/ISO-KF variant 121 07 121 07

Replacement sensor
IE 90, DN 25 ISO-KF 1)
E 121 02 E 121 02
IE 90, DN 40 CF-R 1) E 121 03 E 121 03

Calibration see chapter “Miscellaneous”, para see chapter “Miscellaneous”, para

“Leybold “Leybold
Calibration Service” Calibration Service

Connection cable see chapter “Products”, para see chapter “Products”, para
“Connection Cable for Active Sensors” “Connection Cable for Active Sensors”

1)
Including hex socket screw key

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 49

IONIVAC Transmitter ITR 200 S
The ITR 200 S is an optimized dual
cathode combination transmitter on the
basis of the well proven ITR 90 The
combination of a hot cathode ionization
sensor according to Bayard-Alpert and
a Pirani sensor allows vacuum pressure
measurements of non-ignitable gases
and gas mixtures in the pressure range
from 5 x 10-10 to 1000 mbar

Upon request, the pressure can be

displayed on an integrated display

Advantages to the User Typical Applications Sensor

- Service life increase and increased - Analytical engineering The sensor of the ITR 200 S includes
operational reliability through inte- - Sputtering and coating technology besides the Pirani system a dual cath-
gration of a second hot cathode ode measurement system according to
- Vacuum furnaces
- Full coverage of the pressure range Bayard-Alpert If one of the hot cath-
- Multipurpose pressure measurement odes should burn out during operation,
from 5 x 10-10 mbar to atmospheric
in the medium and high vacuum then the second cathode is automati-
pressure
range cally switched on Moreover, each sen-
- High repeatability within the typical
sor contains a memory chip with the
process pressure range of 10-2 to
Options relevant system data Thus after having
10-8 mbar
exchanged a sensor, an automatic
- Controlled switching on and switch- Upon request, the ITR 200 S can be alignment is performed between sensor
ing off through the integrated dual supplied with an integrated display or a and operating electronics (plug and
Pirani optimized the service life of Profibus interface play)
the yttrium-coated iridium cathodes
- Compact design
- Enclosed, stable electrode geometry
in rugged metal casing
- Efficient degassing through electron
bombardment
- Simple to install
- ITR 200 S version with built-in dis-
play allows for stand-alone opera-
tion without the necessity for addi-
tional displays
- RS 232 C interface

50 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

58 (2.28")

67 (2.64")

153 (6")
Top View

48 (1.89") 42 (1.65")

DN 40 CF-R DN 25 ISO-KF

Dimensional drawing for the ITR 200 S; dimensions in mm, in brackets ( ) are in inch
(Image with integrated display; Profibus interface differing)

10
Volt
8 Equation
7
p = 10(u-7.75)/ 0.75
6
U(a)

5
4
3
2
1
0
10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 10 mbar 1000
Pressure

Characteristic of the ITR 200 S

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 51

Technical Data IONIVAC-Transmitter
ITR 200 S
Measurement range mbar (Torr) 5 x 10-10
to 1000 (3 75 x 10-10 to 750)

Measurement uncertainty, 10-1 – 1000 mbar ≥ 15% of the meas. value

Measurement uncertainty, 10-8 – 10-2 mbar 15% of the meas value
Reproducibility, 10-8 – 10-2 mbar 5% of the meas value

Principles of measurement Hot cathode ionization according to Bayard-Alpert

combined with thermal conductivity according to Pirani

Degas Electron bombardment 3 minutes, max

Supply voltage 20 to 28 V DC, typ 24 V DC

Power consumption, max . W 20

Storage / nominal temperature range °C -20 to +70 / 0 to +50

Protection class IP 30

Weight, approx .
ITR 200 S, DN 25 ISO-KF kg (lbs) 0 50 (1 10)
ITR 200 S, DN 40 CF kg (lbs) 0 75 (1 65)

Sensor Fully sealed, exchangeable

Degassing temperature, max . °C 150 1)

Dead volume, approx . cm3 24 at DN 25 ISO-KF

34 at DN 40 CF

Materials in contact with the medium Cu, W, Glass, NiFe, Mo, Stainless steel, Iridium, Yttrium, NiCr

Overpressure rating (abs .) bar 2

Signal output (Ra ≥ 10 kΩ)

Measurement signal 0 – 10 V, 0 774 – 10 V, 0 75 V pro decade
Error signal < 0,5 V

Interface (standard / optional) RS 232 C / Profibus

Switching function
Standard 1 normally open contact
Profibus 2 normally open contacts

Electrical connection 15-way Sub-D male connector / pin contacts

Cable length, max . m 100 / 30 at RS 232 C

1)
Flange temperature when using the bake out extension

52 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information IONIVAC-Transmitter ITR 200 S
without Display with Display
Part No. Kat.-Nr

ITR 200 S, DN 25 ISO-KF

1 switching function 230 250 230 251

ITR 200 SP, DN 25 ISO-KF,

Profibus interface, 2 switching functions 230 252 –

ITR 200 S, DN 40 CF-R, rotatable CF flange

1 switching function 230 254 230 255

ITR 200 SP, DN 40 CF-R, rotatable CF flange

Profibus interface, 2 switching functions 230 256 –

Options
Power supply for IONIVAC transmitter
100 – 240 V AC / 24 V DC
incl . 5 m connection cable and
5 m RS 232 C cable 121 06 121 06
Baffle, DN 25 ISO-KF, with
Installation baffle for CF/ISO-KF variant 121 07 121 07

Replacement sensor
IE 200, DN 25 ISO-KF 2) 240 020 240 020
IE 200, DN 40 CF-R 2) 240 021 240 021
IE 200 SL 1), DN 40 CF-R 2)
– 240 022

Calibration see chapter “Miscellaneous”, para see chapter “Miscellaneous”, para

“Leybold “Leybold
Calibration Service” Calibration Service”

Connection cable see chapter “Products”, para see chapter “Products”, para
“Connection Cable for Active Sensors” “Connection Cable for Active Sensors”

1)
SL = long version (bake out version)
2)
Including hex socket screw key

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 53

Spiral Tube

Installation position
of the sensor

DN

65

51
in mm

Dimensional drawing for the spiral tube

Advantages to the User Operating Principle Note

Pressure sensors may through the use Through the specially developed geo- - Measurement errors caused by the
of the spiral tube be better protected metry which provides a constant slope, increased conductance of the com-
against contamination like condensate, possibly occurring contamination is ponent need to be taken into
vapours and dusts Thus measurement removed account
accuracy is improved and a longer ser- - Low vibration mounting must be
vice life of the pressure sensors is ensured
attained Maintenance
- The sensor must be connected at
Installation is recommended in connec- Depending on the type of application the upper end
tion with regular maintenance on the spiral tube
is recommended
- measurement system TTR
(preferred)
- CERAVAC CTR

Technical Data Spiral Tube

Materials Stainless steel

Ordering Information Spiral Tube

Part No.

Spiral Tube
DN 16 ISO-KF 230 082
DN 25 ISO-KF 230 083
DN 40 ISO-KF 230 084

54 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Notes

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 55

Connection Cables for Active Sensors
Active Sensors Operating Units for Active Sensors
DISPLAY ONE DISPLAY TWO GRAPHIX ONE
DISPLAY THREE GRAPHIX TWO
GRAPHIX THREE
THERMOVAC Transmitter (FCC 68)
TTR 91 N, TTR 91 NS, TTR 96 NS a . o . Type A Type A Type A
TTR 101 N, TTR 101 NS2
TTR 911 N, TTR 916 N
THERMOVAC Transmitter (RS 232)
TTR 911 N, TTR 101 N, TTR 200 N - - Type G
PENNINGVAC Transmitter (FCC 68)
PTR 90 N, PTR 225 N, PTR 237 N Type A (only PTR 90) Type A Type A
PENNINCVAC Transmitter (RS 232)
PTR 90 N, PTR 225 N, PTR 200 N - - Type G
CERAVAC Transmitter (RS 232)
CTR 100 N, CTR 101 N (digital signal) – – Type C
IONIVAC Transmitter (RS 232)
ITR 90, ITR 200 S – – Type C

Active Sensors Operating Units for Active Sensors

IONIVAC IM 540 CMove Bare wire ends
(Channel 3 and 4)
THERMOVAC Transmitter (FCC 68)
TTR 91 N, TTR 91 NS, TTR 96 NS a . o . Type A Type A –
TTR 101

CERAVAC Transmitter (RS 232)

CTR 91 N, CTR 100 N, CTR 101 N Type B Type B Type E
(analog signal)

IONIVAC Transmitter (RS 232)

ITR 90, ITR 200 S – Type C Type E

Active Sensors Operating Unit for Active Sensors

TURBOVAC iX Extension Box
THERMOVAC Transmitter (FCC 68)
TTR 91 N, TTR 91 NS, TTR 96 NS a . o . Type F
TTR 101 N

PENNINGVAC Transmitter (FCC 68)

PTR 90 N, PTR 225 N, PTR 237 N Type F

56 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Connection Cable
Sensor side Controller-/Customer side
Cable
Type A FCC 68 (RJ45) on both ends, FCC 68 (RJ45) on both ends,
8-way, shielded 8-way, shielded

Type B Sub-D 15-way female FCC 68 (RJ45),

8-way, shielded 8-way, shielded

Type C Sub-D 15-way female, Sub-D 15-way male,

shielded shielded

Type E Sub-D 15-way female bare wire ends,

shielded shielded

Type F FCC 68 (RJ45), Sub-D 15-way male,

shielded shielded

Type G Sub-D 15-way HD female Sub-D 15-way male,

shielded shielded

Ordering Information Connection Cable

Type A Type B
Part No. Part No.

Cable length
1 .5 m 800103V0032 -
005 m 124 26 230 013
010 m 230 012 230 014
015 m 124 27 230 015
020 m 124 28 230 016
030 m 124 29 230 017
050 m 124 31 230 019
075 m 124 32 230 020
100 m 124 33 230 021

Ordering Information Connection Cable

Type C Type E
Part No. Part No.

Cable length
05 m 124 55 124 63
10 m 230 022 163 69
15 m 124 56 124 64
20 m 124 57 124 65
30 m 124 58 –
50 m 230 345 V01 –

Ordering Information Connection Cable

Type F Type G
Part No. Part No.

Cable length
05 m 230 032 V01 230 550 V01
10 m 230 023 V01 230 551 V01
15 m - 230 552 V01
20 m - 230 553 V01

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 57

Controller and Operating Units for Active Sensors

GRAPHIX ONE, TWO, THREE

Universal 1 to 3 channel display and
operating unit with persistent display of
all measurement channels, suited for
the active sensors of the THERMOVAC,
CERAVAC, linear sensors (DU series),
PENNINGVAC and IONIVAC series

Controller GRAPHIX with different displays and rear panel (right)

Advantages to the User

- Display range from 1 x 10-10 to - 3 separate chart recorder outputs running on a PC
2000 mbar 0 to 10 V for each measurement Connectable Sensors
channel (analogue output)
- 3 5" touch screen display with intui- THERMOVAC
tive menu interface - 4th programmable chart recorder
- TTR 211 / TTR 216 S
output optional
- Graphic display of the measurement - TTR 90 / TTR 91 / TTR 91 N
data - RS 232 C / RS 485 C interface with
adjustable baud rate - TTR 96 S / TTR 96 N S
- Internal and external (front side USB)
- Relay output for error indication - TTR 100 / TTR 100 S2
storing of measurement data and
configuration files - Display selectable between mbar, - TTR 101 / TTR 101 N /
Torr, micron, Pascal or psi TTR 101 S2 / TTR 101 N 2S
- Leak rate indication based on the
pressure rise method - Compact installation and benchtop - TTR 911 / TTR 911 N

- 6 adjustable variable hysteresis enclosure (1/4 19" 3 HU) - TTR 916 / TTR 916 N
switching thresholds, floating - Software update via USB optional CERAVAC
changeover contacts and visual indi- - Languages: English, German, Chi- - CTR 90 / CTR 91
cation of the switching status in the nese, Japanese, French; Italian, - CTR 100 / CTR 100 N
display area, freely assignable to the Spanish, Korean
- CTR 101 / CTR 101 N
individual measurement channels
- Visualisation through LEYASSIST
Linear pressure sensors
- Different visualisation options
(graphs and decimal display with - DU 200 / DU 201
zoom function) - DU 2000 / DU 2001
- For connection of all active sensors - DU 2001 rel
of other brands PENNINGVAC
- Degas function for ITR transmitters - PTR 90 / PTR 90 N
- Zero alignment for CTR transmitters - PTR 225 / PTR 225 N
- PTR 225 S / PTR 225 N S
- PTR 237 / PTR 237 N
IONIVAC
M3 - 3,2 mm
- ITR 90
- ITR 200 S
122,4 - ITR 200 SL
128,4
112
Other brands
- Active sensors with linear or loga-
160 rithmic output
91,5 106,4 171,5
106,4 174
in mm

Front panel cut-out and dimensional drawing for the controller GRAPHIX ONE to THREE

58 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data GRAPHIX ONE GRAPHIX TWO GRAPHIX THREE

Number of measurement channels 1 2 3

Measured values display 3 5" graph TFT touch display
Display range mbar (Torr) 1 x 10-10 to 2000 (0 75 x 10-10 to 1500)
Unit of measurement (selectable) mbar, Torr, microns, Pa, Psi
Gas type correction factor adjustable
Sensor connection 15-way Sub-D socket and FCC68 (RJ45)
Sensor power supply V DC 24 ±5%
Relay inputs and outputs 25-way Sub-D socket
Switching threshold freely assignable to the measurement channels
Number 6
Adjustment range sensor dependent
Hysteresis adjustable
Relay contact floating changeover contact
Load rating 1 A / 30 V AC / 30 V DC
Error message
Relay contact floating normally open contact
Load rating 1 A / 30 V AC / 30 V DC
Chart recorder output (Ra > 10 kΩ) 0 to 10 V per measurement channel,
output characteristic corresponds to the connected sensor,
additionally one further chart recorder output can be programmed
Control input PTR: high voltage on, ITR 90/200: emission on
Interface RS 232 C / RS 485 C 9-way Sub-D socket
Mains connection V AC / Hz 100 – 240 / 50/60
Power consumption W < 50 < 70 < 100
Nominal temperature range °C +5 to +45
Weight kg (lbs) 1 7 (3 75)
Protection class 20
Possible languages English, German, Chinese, Japanese, French, Italian, Spanish, Korean

Ordering Information GRAPHIX ONE GRAPHIX TWO GRAPHIX THREE

Part No. Part No. Part No.

GRAPHIX controller including 230680V01 230681V01 230682V01
2 m EURO- and US mains cord
THERMOVAC, PENNINGVAC, CERAVAC,
linear sensors (DU) and IONIVAC transmitter
see chapter “Products”, see chapter “Products”, see chapter “Products”,
para “Active Sensors” para “Active Sensors” para “Active Sensors”
Connection cables for
THERMOVAC and PENNINGVAC (Type A),
CERAVAC (Type B analog, Type C digital
and IONIVAC (Type C) see chapter “Products”, see chapter “Products”, see chapter “Products”,
para “Connection Cables para “Connection Cables para “Connection Cables
for Active Sensors” for Active Sensors” for Active Sensors”
Adapter USB/RS 232 C 800110V0103 800110V0103 800110V0103
LEYASSIST GRAPHIX visualisation and
operating software, including data storage
and export (CSV file) 230440V01 230440V01 230440V01

LabView® 1)
driver, online via download available
1)
LabView is a registered trademark of the company National Instruments

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 59

DISPLAY ONE
Cost-effective, compact single channel
display unit for the transmitters from
the THERMOVAC series and for
PTR 90

Advantages to the User Connectable Sensors

- Power supply voltage for the trans- - The transmitter switching threshold THERMOVAC
mitters settings are displayed - TTR 100 *)
- Four digit mantissa in the range from - Compact bench top enclosure - TTR 101 / TTR 101
5 x 10-9 to 2000 mbar (1/4 19", 2 HU)
- TTR 101 S / TTR 101 N S
- Readout selectable between mbar, - For fitting into 19", 3 HU racks
- TTR 211 *)
Torr or Pascal - Supply voltage 100 – 240 V
- TTR 216 S *)
- 0 to 10 V chart recorder output via
plug-in screw terminals - TTR 90 *)

- The switching threshold of the trans- - TTR 90 S *)

mitters has been looped through to - TTR 91 / TTR 91 N
plug-in terminals - TTR 91 S / TTR 91 N S
- TTR 96 S / TTR 96 N S
M3 - 3,2 mm - TTR 911 / TTR 911 N
- TTR 916 / TTR 916 N
PENNINGVAC
65 78,5 84,5
- PTR 90 / PTR 90 N
Linear pressure sensor
100
91 106 170 - DU 200
105 172
- DU 201
in mm - DU 2000
Dimensional drawing and panel cut-out for the DISPLAY ONE - DU 2001
- DU 2001 rel

*) Connecting of older sensors possible

60 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data DISPLAY ONE

Number of measurement channels 1

Display for measured values digital, 7 segment LED

Measurement range mbar (Torr) 5 x 10-9 to 2000 (3 8 x 10-9 to 1500)

Unit of measurement (selectable) mbar, Torr, Pa

Switching thresholds from the transmitter are run to a terminal strip

Chart recorder output (Ra > 2,5 kΩ) 0 – 10 Volt, characteristic corresponds to the connected transmitter

Mains connection
EURO version V AC / Hz 100 – 240 / 50/60
US version V AC / Hz 100 – 240 / 50/60

Ordering Information DISPLAY ONE

Part No.

DISPLAY ONE
with mains cord
(EURO and US) 230 001

THERMOVAC Transmitter
PENNINGVAC Transmitter PTR 90 see chapter “Products”, para “Active Sensors”

Linear pressure sensors DU see chapter “Products”, para “Additional Sensors”“

Connection cables
for THERMOVAC and
PENNINGVAC (Type A) see chapter “Products”, para “Connection Cables for Active Sensors”

Adapter panel
for installation in a 3 HU, 19" rack 230 005

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 61

DISPLAY TWO, THREE
Cost-effective, operating and display
units for the transmitters from the
THERMOVAC and PENNINGVAC
series

All channels are displayed simultane-

ously

Advantages to the User Connectable Sensors

- Power supply voltage for the trans- - Option of entering gas correction THERMOVAC
mitters factors - TTR 211 *)
- Display range from 1 x 10 to -9
- Separate chart recorder outputs - TTR 216 S *)
2000 mbar (0 75 x 10-9 to 1500 Torr) 0 – 10 V for each measurement
- TTR 90 *)
- Readout selectable between mbar, channel
- TTR 91 / TTR 91 N
Torr or Pascal - Compact bench top enclosure
(1/4 19", 3 HU) - TTR 96 S / TTR 96 N S
- Adjustable switching thresholds with
variable hysteresis, floating change- - For fitting into 19", 3 HU racks - TTR 100 *)
over contacts and visual indication - TTR 100 S *)
of the switching status in the display - TTR 101 / TTR 101 N
- TTR 101 S / TTR 101 N S
- TTR 911 / TTR 911 N
M3 - 3,5 mm
- TTR 916 / TTR 916 N
PENNINGVAC
122,4
106,0 128,4 - PTR 90 / PTR 90 N
122,4 - PTR 225 / PTR 225 N
162 - PTR 225 S / PTR 225 N S
91,5 164,5
91,5 3,5 mm - PTR 237 / PTR 237 N
106,0 106,5
in mm Linear pressure sensor
Dimensional drawing and panel cut-out for the DISPLAY TWO and THREE - DU 200
- DU 201
- DU 2000
- DU 2001
- DU 2001 rel

*) Connecting of older sensors possible

62 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data DISPLAY TWO DISPLAY THREE

Number of measurement channels 2 3

Display for measured values 2 (1 per channel) 3 (1 per channel)

Measurement range mbar (Torr) 1 x 10-10

to 2000 1 x 10-10 to 2000

Unit of measurement (selectable) adjustable adjustable

Gas type correction (for PTR) 4 floating changeover contacts 6 floating changeover contacts

Sensor connection 60 V, 1 A DC / 30 V, 1 A AC 60 V, 1 A DC / 30 V, 1 A AC

Sensor power supply V DC 1 per channel, 1 per channel,

Electrical outputs configurable as 2nd switching threshold configurable as 2nd switching threshold

Switching thresholds
Number 2 (1 per channel) 3 (1 per channel)
Adjustment range sensor dependent sensor dependent
Hysteresis adjustable adjustable
Relay contact 4 floating changeover contacts 6 floating changeover contacts
Load rating 60 V, 1 A DC / 30 V, 1 A AC 60 V, 1 A DC / 30 V, 1 A AC
Ready signal relay 1 per channel, 1 per channel,
configurable as 2nd switching threshold configurable as 2nd switching threshold

Error message
Relay contact normally open contact normally open contact
Load rating 60 V, 1 A DC / 30 V, 1 A AC 60 V, 1 A DC / 30 V, 1 A AC

Chart recorder output (Ra > 10 kΩ) 0 - 10 V per measurement channel, 0 - 10 V per measurement channel,
output characteristic corresponds to output characteristic corresponds to
the connected transmitter the connected transmitter

Control input PENNINGVAC PTR: high voltage on PENNINGVAC PTR: high voltage on

Mains connection V AC / Hz 85 – 240 / 50/60 85 – 240 / 50/60

Power consumption W < 10 < 15
Nominal temperature range °C +5 to +50 +5 to +50
Weight kg (lbs) 1 3 (2 87) 1 4 (3 09)
Protection class IP 40 40

Ordering Information DISPLAY TWO DISPLAY THREE

Part No. Part No.

DISPLAY TWO / THREE

with mains cord (EURO and US) 230 024 230 025

THERMOVAC Transmitter see chapter “Products”, see chapter “Products”,

para “Active Sensors” para “Active Sensors”

PENNINGVAC Transmitter see chapter “Products”, see chapter “Products”,

para “Active Sensors” para “Active Sensors”

Connection cables
for THERMOVAC and
PENNINGVAC (Type A) see chapter “Products”, para see chapter “Products”, para
“Connection Cables for Active Sensors” “Connection Cables for Active Sensors”

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 63

Passive Sensors

THERMOVAC Sensors
TR 211, TR 211 NPT, TR 212, TR 216
These passive sensors use thermal
conductivity technology according to
Pirani

Advantages to the User TR 211 TR 216

- Measurement range 5 x 10 to 1000 -4
- Aluminum sensing cell with tungsten - Stainless steel sensing cell with pla-
mbar (3 75 x 10-4 to 750 Torr) filament tinum filament and ceramics feed
- Tungsten or platinum filament - Improved temperature compensa- through

- Cost-effective sensing cell tion - Well suited for corrosive processes

and water vapor atmospheres
- Fully aligned and temperature com-
pensated 0 to +40 °C TR 212
- Constant filament temperature
- Stainless steel sensing cell with
tungsten filament
- Overpressure resistant

35

135 133
(144) (122)

5 20 40
in mm

Dimensional drawing for the TR 211, TR 212 and TR 216; TR 211 NPT in brackets

64 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data TR 211 TR 211 NPT TR 212 TR 216

Measurement range mbar 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000
(Torr) (3 8 x 10 to 7 5 x 10 ) (3 8 x 10 to 7 5 x 10 ) (3 8 x 10 to 7 5 x 10 ) (3 8 x 10-4 to 7 5 x 102)
-4 2 -4 2 -4 2

Operating temperature range

(compensated) °C 0 to +40 0 to +40 0 to +40 0 to +40

Storage temperature range, max . °C 80 80 80 80

Filament Tungsten Tungsten Tungsten Platin

Filament temperature °C 110 110 110 110

Permissible overload (abs .), max . bar 3 3 10 10

Volume of the sensing cell, approx . cm 3

11 11 11 11

Vacuum connection DN 16 ISO-KF 1/8" NPT 16 ISO-KF/16 CF 16 ISO-KF

Materials in contact with the medium Aluminum, Vacon, Aluminium Vacon, Stainless steel, Vacon, Stainless steel 1 4301
Glass, Tungsten Glass, Tungsten Glass, Tungsten (SS 304),
CrNi 8020, CrNi 8020 CrNi 8020 Al2O32,
epoxy cement epoxy cement CrNi 8020, Platinum

Operating units THERMOVAC THERMOVAC THERMOVAC THERMOVAC

TM 21, 22, 23 / TM 21, 22, 23 / TM 21, 22, 23 / TM 21, 22, 23 /
COMBIVAC COMBIVAC COMBIVAC COMBIVAC
CM 31, 32, 33, 51 / CM 31, 32, 33, 51 / CM 31, 32, 33, 51 / CM 31, 32, 33, 51 /
PIEZOVAC PV 20 PIEZOVAC PV 20 PIEZOVAC PV 20 PIEZOVAC PV 20

Ordering Information TR 211 TR 211 NPT TR 212 TR 216

Part No. Part No. Part No. Part No.

THERMOVAC sensors Series 200

DN 16 ISO-KF 157 85 – 158 52 157 87
DN 16 CF – – 157 86 –
DN 1/8" NPT – 896 33 – –

Replacement sensing cell E 157 75 E 896 34 – E 157 77

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 65

PENNINGVAC Sensors
PR 25, PR 26, PR 27, PR 28
These passive sensors use cold catho-
de ionization technology according to
Penning

Advantages to the User Option

- Rugged For protection of the PENNINGVAC
- Insensitive to air inrushes and vibra- sensors against contamination, radia-
tions tion and other disturbing factors the in-
stallation of a baffle is recommended
- Easy disassembly and cleaning of
the measurement system
- Exchangeable cathode plate
- Improved ignition characteristic
through titanium cathodes

50
50

132 132

94
94

DN 25 KF / DN 40 KF
DN 25 KF / DN 40 KF
in mm

Dimensional drawing for the PENNINGVAC PR sensors

66 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data PR 25 PR 26 PR 27 PR 28

Measurement range mbar 1 x 10-9 to 10-2 1 x 10-9 to 10-2 1 x 10-9 to 10-2 1 x 10-9 to 10-2
(Torr) (0 75 x 10-9 to 10-2) (0 75 x 10-9 to 10-2) (0 75 x 10-9 to 10-2) (0 75 x 10-9 to 10-2)

High voltage supply (anode potential)

Trigger voltage kV 33 33 33 33
Operation voltage kV 16 16 16 16

Storage temperature range °C -25 to +80 -25 to +80 -25 to +80 -25 to +80

Nominal temperature range °C 0 to +80 0 to +80 0 to +80 0 to +200

Bake out temperature (flange) °C – – – 200

Permissible overload (abs .) bar 6 1)

6 1)
6 1)
6 1)

Dead volume cm3 21 21 21 21

Materials in contact with the medium Stainless steel, Stainless steel, Stainless steel, Stainless steel,
Nichrome, Nichrome, Nichrome, Nichrome,
Ceramics, Titanium Ceramics, Titanium Ceramics, Titanium Ceramics, Titanium

Weight, approx . kg (lbs) 0 75 (1 66) 0 75 (1 66) 0 8 (1 66) 0 8 (1 66)

Vacuum connection DN 25 ISO-KF 40 ISO-KF 40 CF 40 CF

Operating units COMBIVAC COMBIVAC COMBIVAC COMBIVAC

CM 31, 32, 33, 51 / CM 31, 32, 33, 51 / CM 31, 32, 33, 51 / CM 31, 32, 33, 51 /
PENNINGVAC PENNINGVAC PENNINGVAC PENNINGVAC
PM 31 PM 31 PM 31 PM 31

Ordering Information PR 25 PR 26 PR 27 PR 28

Part No. Part No. Part No. Part No.

PENNINGVAC sensors 157 52 136 46 136 47 136 48

Replacement cathode plate, titanium

(5 pcs ., incl . 5 ceramics discs) EK 162 91 EK 162 91 EK 162 91 EK 162 91
Replacement anode ring 200 28 711 200 28 711 200 28 711 200 28 711

Baffle, with centering ring (FPM (FKM))

DN 25 230 078 – – –
DN 40 – 230 079 – –

1)
When using an ultra sealing gasket at the vacuum connection

Note:
PR 26 replaces PR 31, 32, 35
PR 27 replaces PR 36

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 67

IONIVAC Sensors IE 414 and IE 514
These passive sensors use hot cath-
ode ionization technology

33
69,4
DN 40 CF

25
IE 414 IE 514 12,8 Advantages to the User
- Bayard-Alpert sensing system - Extractor sensing system - Exchangeable cathode
- Measurement range to - Reliable to 1 x 10-12
mbar 66 - High accuracy of the measurements
2 x 10-11 mbar (1 5 x 10-11 Torr) (0 75 x 10-12 Torr) due to individually calibrated sens-
- Protection shield welded in place - Significant reduction of X-ray 98
and ing system
ion desorption effects

33 33
69,4 69,4
DN 40 CF

25 55
DN 40 CF
12,8
12,8

66
58
90
98

in mm

Dimensional drawing for the IE 414 (left) and IE 514 (right)

33
69,4

55
DN 40 CF

12,8

58
90

68 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data IE 414 IE 514

Measurement range mbar (Torr) 2 x 10-11 to 10-2 (1 5 x 10-11 to 10-2) 10-12 to 1 x 10-4 (10-12 to 7 5 x 10-5)

X-ray limit mbar (Torr) ≤ 10-11 (≤ 10-11) ≤ 10-12 (≤ 10-12)

Operating temperature range °C 0 to +80 0 to +80

Degassing temperature
at the flange, max . °C 250 1)
/ 400 2)
250 1)
/ 400 2)

Material
Cathode Iridium with yttric oxid coating IIridium with yttric oxid coating
Feedthrough pins NiFe 42 NiFe 42
Anode Pt/Ir 90/10/pt wire Mo and CoNiCr

Vacuum connection DN 40 CF 40 CF

Adjustment data
Ion detector potential V 0 0
Cathode potential V 80 100
Anode potential V 220 220

Emission current mA 0 06 to 0 6 16

Hot cathode current A 14 14

Hot cathode voltage V 27 37

Sensitivity for Nitrogen mbar -1

17 0 66

Bake out operation,

Electron bombardment V / mA 700 / 30 700 / 30

Operating units IM 540, CM 52 IM 540, CM 52

Ordering Information IE 414 IE 514

Part No. Part No.

IONIVAC sensors 158 66 158 67

Replacement cathode 158 63 158 61

1)
With bakeable gauge head cable
2)
With gauge head cable detached

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 69

Operating Unit for Passive Sensors

COMBIVAC CM 51/CM 52
The COMBIVAC CM 51 covers the
complete pressure range between
10-9 and 1000 mbar by combining two
measurement principles -
THERMOVAC and PENNINGVAC -
providing both monitoring and control
functions

The COMBIVAC CM 52 offers by com-

bining two UHV principles of measure-
ment (THERMOVAC absolute pressure
sensor and Bayard-Alpert measure-
ment system IE 414 or extractor meas-
urement system IE 514) measurements
of vacuum pressures in the range
between 10-12 and 1000 mbar

Rear side of the COMBIVAC CM 51 (left) and CM 52 (right)

Advantages to the User

- Compact 3 channel operating unit - Easy to operate - Aligned and temperature compen-
for a pressure range for passive sen- - Keyboard locking through SOFT- sated THERMOVAC sensors (see
sors of LOCK para “Sensors”)
- 10-9 to 1000 mbar (CM 51) - Cost-effective replacement sensors
- Two adjustable switching thresholds
- 10-12 to 1000 mbar (CM 52) and electrodes
with a relay contact for each measu-
- Automatic switchover from rement channel - Error message for each channel, for
THERMOVAC operation to example in the case of broken fila-
- Logarithmic chart recorder output
- Penning (cold cathode) operation ment, defective sensor line or failed
0 – 10 V or 2 – 10 V
(CM 51) plasma discharge
- UHV sensors (Bayard-Alpert - Wide range power supply
100 – 240 V - Compact benchtop enclosure
measurement system IE 414 or
(1/4 19", 3 HU) made of metal for
extractor measurement system - Unit of pressure selectable between
installation in front panel cut outs
IE 514 (CM 52) mbar, Torr und Pascal
and 19" racks
- Measurement cable lengths up to - Compact, rugged Penning sensor
- RS 232 C and Profibus interface
100 meters are possible depending insensitive to operation at high pres-
on the type of application sures (see para “Sensors”) - CE mark
- RoHS-compliant

70 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Typical Applications Connectable Sensors
- Universal monitoring the operation THERMOVAC
of high vacuum pump systems like: - TR 211
Turbomolecular pump systems
- TR 211 NPT
Diffusion pump systems
Cryogenic pump systems - TR 212

- Annealing, melting, brazing and har- - TR 216

dening furnaces PENNINGVAC (only CM 51)
- Coating systems - PR 25
- Analytical instrumentation - PR 26
- Deployment in thermal radiation - PR 27
resistant and degassable systems is - PR 28
possible
IONIVAC (only CM 52)
- Particle accelerators
- IE 414
- IE 514

M3 - 3,5 mm

122,4 105
106,0 128,4

122,4

162
91,5 164,5 105
91,5 3,5 mm
106,0 106,5
in mm

Front panel cut-out (left) and dimensional drawing (right) for the COMBIVAC CM 51 and CM 52

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 71

Technical Data COMBIVAC
CM 51 CM 52
Number of measurement channels 3 3
Measurement range
Channel 1, 2 (THERMOVAC) mbar (Torr) 5 x 10-4 to 1000 (3 5 x 10-4 to 750) 5 x 10-4 to 1000 (3 5 x 10-4 to 750
Channel 3 (PENNINGVAC) mbar (Torr) 10-9 to 10-2 (10-9 to 10-2) –
Channel 3
(IE 414 Bayard-Alpert) mbar (Torr) – 2 x 10-11 to 1 x 10-2 (1 5 x 10-11 to 0 75 x 10-2)
(IE 514 Extractor) mbar (Torr) – 2 x 10-12 to 1 x 10-4 (1 5 x 10-12 to 0 75 x 10-4)
Unit of measurement (selectable) mbar, Torr, Pa mbar, Torr, Pa

Measurement uncertainty
THERMOVAC ≤ 20% of the measured value ≤ 20% of the measured value
in the range 10-3 to 10-2 mbar (± 20%) in the range 10-3 to 10-2 mbar (± 20%)
in the range 10-2 to 102 mbar (± 15%) in the range 10-2 to 102 mbar (± 15%)
PENNINGVAC ± 30% of the measured value –
in the range 10-8 to 10-4 mbar
IE 414/514 – ± 10% of the displayed value
(however, this value may increase
depending on the type of application)
Measurement cable m up to 100 (application dependent) up to 100 (application dependent)

Display for measured values digital, 7 segment LED, digital, 7 segment LED
4 digit mantissa and 2 digit exponent 4 digit mantissa and 2 digit exponent
Type of gas (selectable) factor adjustable factor adjustable
Switching thresholds 2 per channel 2 per channel
Operating mode single, interval-trigger single, interval-trigger
Adjustable switching thresholds
THERMOVAC mbar (Torr) 5 x 10-3 to 500 (5 x 10-3 to 375) 5 x 10-3 to 500 (5 x 10-3 to 375)
PENNINGVAC mbar 1 x 10-8 to 9 9 x 10-3 –
(Torr) (0 75 x 10-8 to 7 4 x 10-3)
Bayard-Alpert mbar – 1 x 10-8 to 5 x 10-3
(Torr) (0 75 x 10-8 to 3 75 x 10-3)
Extractor mbar – 1 x 10-11 to 1 x 10-11
(Torr) (0 75 x 10-11 to 0 75 x 10-11)
Switching relay hysteresis 10% of the trigger value (default), 10% of the trigger value (default),
freely adjustable for freely adjustable for
THERMOVAC and PENNINGVAC THERMOVAC and IE 414 or 514
Relay contact load rating AC/DC, max 30 V / 1 A AC/DC, max 30 V / 1 A

Chart recorder output (default) 0 to 10 V, log divisions 0 to 10 V, log divisions

THERMOVAC linear: 3 decades, linear: 3 decades,
approximately 10 5 V in case of a failure, approximately 10 5 V in case of a failure
logarithmic: (1 x 10-3 mbar), 1 67 V/decade logarithmic: (1 x 10-3 mbar), 1 67 V/decade
PENNINGVAC logarithmic: (1 x 10-9 mbar), 1 43 V/decade –
IE 414 or 514 – logarithmic: (1 x 10-12 mbar), 1 00 V/decade
Interface RS 232 C, RS 485 and Profibus RS 232 C, RS 485 and Profibus
Mains connection 50/60 Hz V AC 100 – 240 100 – 240
Power consumption W < 10 65
Storage temperature range °C -20 to +60 -20 to +65
Nominal temperature range °C +5 to +50 +5 to +50
Max . rel . humidity % n .c . 80 80
Weight kg (lbs) 1 4 (3 09) 1 4 (3 09)
Dimension (W x H x D) mm 106 4 x 128 5 x 164 5 106 4 x 128 5 x 164 5
Installation depth mm approx 220 approx 220
Protection class IP 40 40

72 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Ordering Information COMBIVAC
CM 51 CM 52
Part No. Part No.
Operating unit COMBIVAC CM 51/52
including EURO and US mains cord, 2 m
with RS 232 C / 485 230 110 230 115
with Profibus DB 230 111 230 116
Cable adapter CM 31 – CM 51 230 112 V01 –
Options
19" installation frame 161 00 161 00
1/4 19" blank panel 161 02 161 02
THERMOVAC sensors for CM 51/52
TR 211, DN 16 ISO-KF 157 85 157 85
TR 211, 1/8" NPT 896 33 896 33
TR 212, DN 16 ISO-KF 158 52 158 52
TR 212, DN 16 CF 157 86 157 86
TR 216, DN 16 ISO-KF 157 87 157 87
Gauge head cables for TR sensors
005 m 162 26 162 26
010 m 162 27 162 27
015 m 124 34 124 34
020 m 162 28 162 28
030 m 124 35 124 35
050 m 124 37 124 37
075 m 124 38 124 38
100 m 124 39 124 39
PENNINGVAC sensors for CM 51
PR 25, DN 25 ISO-KF 157 52 –
PR 26, DN 40 ISO-KF 136 46 –
PR 27, DN 40 CF 136 47 –
PR 28, DN 40 CF, bakeable 136 48 –
Gauge cables for PR sensors
005 m 162 88 –
010 m 162 89 –
015 m 124 49 –
020 m 157 56 –
030 m 124 50 –
050 m 124 52 –
075 m 124 53 –
100 m 124 54 –
IONIVAC sensors for CM 52
IE 414, DN 40 CF – 158 66
IE 514, DN 40 CF – 158 67
Mains cable
3 m (US) 800 102 V1002 800 102 V1002
Gauge head cables for IE sensors
05 m – 158 68
10 m – 150 88
15 m – 230 670 V01
05 m, bakeable to 200 °C – 158 44
10 m, bakeable to 200 °C – 230 671 V01
Extension cables for IE 414/514
10 m – 245 002
20 m – 200 02 937
30 m – 245 011 V01
50 m – 245 010 V01
up to 100 m (application dependent) – upon request

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 73

IONIVAC IM 540
The 3-channel display and operating
unit IONIVAC IM 540 offers, by combi-
nation of up to 4 different principles of
measurement – Pirani, capacitive,
Bayard-Alpert and Extractor –,
complete coverage and control of the
vacuum pressure in the range between
10-12 mbar and atmospheric pressure

Advantages to the User Connectable Sensors

- Precise UHV pressure measure- - Compact benchtop enclosure - Bayard-Alpert sensor IE 414
ments with the Bayard-Alpert sensor (1/2 19", 3 HU)
- Extractor sensor IE 514
IE 414 (offering excellent longterm - RS 232 C interface provided as
(see Chapter “Additional Sensors”)
stability) or the Extractor sensor standard
IE 514 (offering an extremely low combined with
- Simple software updates possible
X-ray limit of < 1 x 10-12 mbar) through the RS 232 interface - THERMOVAC TTR 211, TTR 216 S,
- 1 measurement channel for TTR 90, TTR 91 and TTR 96 S
- Profibus interface (optional)
IONIVAC sensor (Bayard-Alpert or - CERAVAC CTR 90, CTR 91 and
- CE mark
Extractor) CTR 100
- Possibility of simultaneously con- (see Chapter “Active Sensors”)
necting a second IONIVAC sensor Typical Applications Two passive sensors working with ioni-
- Degassing of the anode through - Pressure measurement and control zation technology (IE 414 and/or
electron bombardment with time- in the UHV range IE 514) could be connected simulta-
limit neously to the IONIVAC IM 540 while
- Measurement of ultimate pressure in
- Continuous UHV measurement also only one is in operation
UHV systems
during the degassing phase (up to A pressure dependent emission control
- Checking of ultimate pressure in
+250 °C with bakeable gauge head of these sensors is possible if a
semiconductor production
cable) THERMOVAC TTR or CERAVAC
- Total pressure measurements in the
- 2 measurement channels for direct CTR 100/CTR 91 of suitable range
128,5

area of cryo technology

connection of transmitters from the overlap is connected
- Total pressure measurements in cali-
series THERMOVAC TTR and 228,6
bration systems
CERAVAC CTR 213 355 2,5

- Selectable pressure units (mbar,

Torr, Pascal, Micron)
122,5
112

- Display of a single measurement

channel with pressure trend through
128,5

analogue bargraph or simultaneous 198

display of all measurement channels 209

228,6
213 355 2,5
- Two adjustable thresholds with
adjustable hysteresis and freely assi- in mm
gnable to the measurement chan- Front panel cut-out (left) and dimensional drawing (right) for the IONIVAC IM 540
122,5

nels
112

198
209

74 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data IONIVAC IM 540

Number of measurement channels 3

Bayard-Alpert / Extractor Channel 1 or 2

THERMOVAC / CERAVAC Channel 3 and 4

Measurement range mbar (Torr) 1 x 10-12 to 1100 (0 75 x 10-12 to 825)

Measurement range Extractor mbar (Torr) 1 x 10-12 to 1 x 10-4 (0 75 x 10-12 to 0 75 x 10-4)
Measurement range Bayard-Alpert mbar 1 x 10-11 to 1 x 10-2
(Torr) (0 75 x 10-11 to 0 75 x 10-2)

Measurement range switching automatic or decade pre-select

Units of measurement (selectable) mbar, Torr, microns, Pa

Measurement uncertainty % ±10 of the value displayed

Trend indication bargraph

Measurement value display rate 1 x 10 to 1 x 10-2 mbar, 5 s-1

-10

1 x 10-12 to 1 x 10-10 mbar, 0 5 s-1

Emission current
Extraktor sensor mA 16
Bayard-Alpert sensor mA 0 1 to 10; automatic control

Emission current shutdown at p > 1 x 10-2 mbar, broken cathode, short-circuit,

interruption of the electric circuit

Bake out power

Extractor / Bayard-Alpert W 20 / 40

Sensor power supply, potential for anode Extractor / Bayard-Alpert: 220 V,

cathode Extractor / Bayard-Alpert: 100 V/80 V,
Reflector Extractor: 205 V

Sensor connections Bayard-Alpert and Extractor - single operation is possible

2 x Bayard-Alpert or Extractor (redundant operation)

Measurement system detection automatically

Measurement system switchover automatically, pressure dependent, error dependent

Chart recorder outputs logarithmic 0 to 10 V (1 V / dec ) or

Extractor / Bayard-Alpert linear 0 to 10 Volt
(Ra = 2,5 kΩ) error indication U > 10 5 V

Interface (standard / optional) RS 232 C / Profibus

Switching thresholds
(single operation or interval) 2 with floating changeover contact

Mains connection V AC / Hz 90 – 264 / 50/60

Storage temperature range °C -40 to +60

Nominal temperature range °C +5 to +50

Dimensions of the benchtop instrument

(W x H x D) mm 213 x 128,5 x 250

Weight, approx . kg (lbs) 3 0 (6 62)

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 75

Ordering Information IONIVAC IM 540

Part No.

IONIVAC IM 540 230 100

with mains cord 2 m (EURO and US)

Options
230 101
Profibus DP interface

Calibration see chapter “Miscellaneous”, para “Leybold Calibration Service”

IONIVAC sensors
IE 414, DN 40 CF 158 66
Replacement cathode IE 414 158 63
IE 514, DN 40 CF 158 67
Replacement cathode IE 514 158 61

Gauge head cables for IE 414/514

05 m 158 68
10 m 150 88
15 m 230 670 V01
05 m, bakeable to 200 °C 158 44
10 m, bakeable to 200 °C 230 671 V01

Extension cables for IE 414/514

10 m 245 002
20 m 200 02 937

THERMOVAC transmitter TTR see chapter “Products”, para “Active Sensors”

Connection cable for THERMOVAC (Type A) see chapter “Products”, para “Connection Cable for Active Sensors”

CERAVAC transmitter CTR see chapter “Products”, para “Active Sensors”

Connection cable for CERAVAC (Type B) see chapter “Products”, para “Connection Cable for Active Sensors”

76 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Mechanical Gauges
Bourdon Vacuum Gauges
Rugged relative pressure vacuum
gauges based on the Bourdon principle
covering the pressure range from 1 to
1020 mbar (0 75 to 765 Torr)

80 30

105

64

Advantages to the User Typical Applications 101 50

- Highly reliable, rugged, insensitive to - Vacuum distillation 140

vibrations - Drying processes
- Linear readout, independent of the - Vacuum conveying systems
81
type of gas
- Excellent media compatibility owing
to the stainless steel movement in mm
(BOURDONVAC C)
Dimensional drawing for the BOURDONVAC A
- IP 54 protection (BOURDONVAC C) (top) and the BOURDONVAC C (bottom)

Technical Data BOURDONVAC A BOURDONVAC C

Measurement range mbar (Torr) 1 to 1020 (0 75 to 765) 1 to 1020 (0 75 to 765)

Measurement uncertainty % FS 1 1
Class 1 (EN 837) % FS 1 1
Overload range (abs . briefly) bar 15 13
Storage temperature range °C -25 to +60 -25 to +60
Nominal temperature range °C +10 to +60 +10 to +100 (max )
Flange connection DN 16 ISO-KF 16 ISO-KF
Length of scale mm 207 188
Diameter mm 80 101
Overall height mm 105 140
Weight kg (lbs) 0 25 (0 55) 0 5 (1 10)
Leak tightness mbar x l/s 1 x 10 -8
1 x 10-8
Materials in contact with the medium Nickel plated standard steel, Stainless steel 1 4404
bronze, soft solder

Ordering Information BOURDONVAC A BOURDONVAC C

Part No. Part No.

Bourdon vacuum gauge 160 40 161 20

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 77

Capsule Vacuum Gauges
Rugged absolute pressure gauges for
the pressure range from 1 to
1000 mbar (0.75 to 750 Torr).

Advantages to the User Typical Applications

- Rugged and insensitive to vibra- - Measurement of absolute pressures
tions (for inert gases only)
- Models available for two measure- - Vacuum conveying systems
ment ranges (1 to 100 mbar (0 75 to - Operation monitoring
75 Torr) and 1 to 1000 mbar
- Packaging
(0 75 to 750 Torr))
- Readout independent of the type of
gas and changes in atmospheric
pressure
- Linear pressure readout
- Installation direct via the connection
flange or panel mounting
- Model with integrated isolation valve
for use on packaging machines
(Part No 160 68)

132 11 0

68
14,5
60 10
11 6 73 100 40
53

3,5
101+1 92
53
4,5
13
120 ° in mm

Dimensional drawings for the capsule vacuum gauges

Part Nos 160 63/64 (left) and Part No 160 68 (right)

78 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Capsule Vacuum Gauge

Measurement range mbar (Torr) 1 to 100 (0 75 to 75) 1 to 100 (0 75 to 75) 1 to 1000 (0 75 to 750)

Measurement uncertainty % FS 10 25 16

Overload range (abs . briefly) bar 15 15 15

Storage temperature range °C -25 to +60 -25 to +60 -25 to +60

Nominal temperature range °C +10 to +50 +10 to +50 +10 to +50

Length of scale mm 205 180 205

Dead volume, approx . cm3 235 167 235

Diameter mm 132 110 132

Weight kg (lbs) 0 7 (1 54) 0 6 (1 32) 0 7 (1 54)

Vacuum connection DN 16 ISO-KF 10 mm dia hose nozzle 16 ISO-KF

with integrated isolation valve

Max . inclination when installed 45° 45° 45°

Materials in contact with the medium Brass Brass Brass

Standard steel nickel plated Standard steel nickel plated Standard steel nickel plated
Glass Glass Glass
NBR NBR NBR
Aluminum Aluminum Aluminum
Copper beryllium Copper beryllium Copper beryllium
Soft and hard solder Soft and hard solder Soft and hard solder
Resin Resin Resin

Ordering Information Capsule Vacuum Gauge

Part No. Part No. Part No.

Capsule vacuum gauge 160 63 160 68 160 64

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 79

Diaphragm Vacuum Gauge DIAVAC DV 1000
Rugged mechanical diaphragm
vacuum gauge of high accuracy for the
rough vacuum range from 1 to 1000
mbar (1 to 750 Torr)

Advantages to the User Typical Applications

- Wide measurement range from - Chemical processes
1 to 1000 mbar (1 to 750 Torr) with - Vacuum destillation
high resolution in the range from
- Absolute pressure measurements
1 to 100 mbar (1 to 75 Torr)
for gas mixtures
- The scale of each gauge is individu-
- For use in explosion hazard rated
ally calibrated
areas
- Absolute pressure gauge
- Drying processes
- Readout independent of the type of
- Lamp manufacture
gas and changes in atmospheric
pressure
- Stainless steel diaphragm for excel-
lent compatibility with most media
- Laser welding technology for high
precision diaphragm mount
- Rugged table-top housing, can be
freely mounted above the flange
connection; also for panel mounting
- Measurement chamber can be easi-
ly cleaned owing to the detachable
measurement flange

45°

170
166 203,5 152 155
156

4,5

180 166 166

in mm

Dimensional drawing and panel cut-out for the DIAVAC DV 1000

80 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data DIAVAC DV 1000

Measurement range mbar (Torr) 1 to 1000 (1 to 750)

Measurement uncertainty
01 – 10 mbar (1 .0 - 7 .5 Torr) ±1 mbar (Torr)
10 – 600 mbar (7 .5 - 450 Torr) ± 10% of meas value

Storage temperature range °C -10 to +60

Nominal temperature range °C 0 to +60

Permissible overload (abs .) bar 3

Length of scale mm 270

Dead volume cm3 130

Vacuum connection DN 40 ISO-KF

Dimension (W x H x D) mm 180 x 166 x 100

Weight kg (lbs) 2 7 (5 95)

Materials in contact with the medium Stainless steel 1 4301, 1 4310 (diaphragm), FPM (FKM)

Ordering Information DIAVAC DV 1000

Part No.

DIAVAC DV 1000
mbar display 160 67 1)

Torr display 896 06 1)

Factory calibration 154 22

Replacement sinter filter

with centering ring, DN 40 ISO-KF 231 93 515
Replacement housing, complete 240 000

1)
Complete with centering ring and sintered filter

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 81

Additional Sensors

Older Sensors / Replacement Sensors

Linear pressure sensor Replacement sensor TTR 211 Replacement sensor TTR 216

Type Corresponding Sensors/ Ordering Information

Operating Units
Part No.

Replacement sensor TTR 211 TTR 211 PB / D E 157 75

Replacement sensor TTR 216 TTR 216 PB / D E 157 77

Replacement spare sensor IE 100

DN 25 ISO-KF ITR 100 E 163 61
DN 40 CF ITR 100 E 163 67

Replacement spare cathode IE 413 IM 510 158 63

Linear pressure sensor DI 200 158 12

(Previous version) DI 201 158 14
DI 2000 158 13
DI 2000 Adaptor 245022V01

1)
For all DI-Sensors

82 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Notes

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 83

Pressure Switches and Control Instruments

Pressure Control System Move

z B PC, SPS,
(optional)
Process Chamber

Sensor
Controller CMove 1250

or

PLC, PC

Interface module IMove 1250

Control valve Move 1250

84 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Control Valve Move 1250
Technical Data Control Valve
Move 1250
Vacuum connection DN 16 ISO-KF

Mounting orientation Any

Leak tightness mbar x l/s 1 x 10-9

Pressure range 1 x 10-8 mbar to 2 5 bar (absolute)

Gas flow 1)

with filter, on the inlet side 5 x 10-6 to 1250 mbar x l/s

with filter, on the inlet and
the vacuum side mbar x l/s 5 x 10-6 to 1000

Control valve Move 1250 Power supply

Operation voltage V DC 24 (± 10%)
Control Valve Move 1250 Power consumption VA 12
Current consumption mA 500, 20 to 30 (closed circuit current)
Advantages to the User
Actuation Step motor
- Extended control range from CMove or IMove 1250
Digital
1 x 10-6 to 1250 mbar x l/s Analog V DC 0 to 10
- High controllable gas throughput
Type of protection IP 40
- Corrosion resistant owing to
Closing time / opening time s 3/4
FPM (FKM)/stainless steel
- In combination with CMove the Ambient temperature °C +5 to +40
valve closes automatically in the Bake out temperature
event of a power failure Valve body °C 80
- Valve driven either by the controller Actuator °C 60
CMove 1250 or by a PC or a PLC
Material
through the IMove interface Stainless steel 1 4435
Valve body
- Electromotive pressure control with Valve needle, valve disc Stainless steel 1 4301
variable gas flow (upstream regula- Filter Stainless steel 1 4404
tion) or with variable conductance Seals FPM
(downstream regulation) Dosing sleeve Fluorplastomer

Weight kg (lbs) 0 5 (1 1)

1)
For air at a differential pressure of ∆p = 1 bar
60 60
mbar x l
2)
1 sccm = 1 69 x 10-2 s
3)
Minimum flow: in each case 1% of FS (full-scale)

Gas flow [mbar l/s]

1000
100
10
152 30 1
1E-1
90 DN 16 ISO-KF
1E-2
1E-3
1E-4
35
1E-5
1E-6
0 1 2 3 4 5 6 7 8 9 10
USTG [V]
in mm

Dimensional drawing for the Move 1250 Gas flow curve of the Move 1250

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 85

Ordering Information Control Valve
Move 1250
Part No.
Control Valve
Move 1250 230 219
Filter for the inlet or vacuum side
consisting of filtering candle, O-ring and
two securing rings 109 63
Connection cable
CMove 1250 - Control valve Move 1250
03 m 230 220
05 m 230 221
10 m 230 222
15 m 230 223
20 m 230 224
25 m 230 225

86 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Notes

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 87

Controller CMove 1250

Controller CMove 1250

Technical Applications Typical Applications

- Simple to operate The controller CMove in connection
- Self-explanatory LCD display and with the electric control valve Move
function keys 1250 or Move X is suited for applica-
- Analog/digital inputs/outputs and tions in the areas like for example
interfaces - Semiconductor industry
- Digital input valve control, switch- - Analytical
over - Coating
Pressure and gas flow adjustment
- Quality control
Digital output valve control, error
message - Surface treatment

- Adjustable PID control algorithms as well as in all applications where sim-

ple, fast and accurate pressure control
- 99 pre-programmed PI control algo-
is desired and necessary
rithms for fast and simple operation
- For installation or tabletop use
(1/4 19")

106

Ø 3,5 91 228,5 3 103

128 122,5 110

command edit

in mm

Dimensional drawing for the CMove 1250

88 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Controller CMove 1250

Power supply
Mains voltage, 50/60 Hz V AC 90 – 250
Power consumption VA 50

Control types
Auto = (PI) adjustable in 1 to 99 selectable steps
PID = PID is user adjustable
Control accuracy 1)
0,5% F S sensor

Display LCD 64 x 128 Pixel

Display units (selectable)

Pressure mbar, Torr, Pa, mV
Flow mbar l/s, Torr l/s, Pa l/s, mV

Measurement range
Pressure control
CERAVAC
THERMOVAC
PENNINGVAC (not for PTR 90)
IONIVAC
Pressure control mV 0 to 10 000
Flow control
with MOVE 1250 CLOSED, 5 0 x 10-6 to 1 25 x 10+3 mbar x l/s
with MOVE X CLOSED, 1 0 x 10-5 to 1 0 x 10+2 mbar x l/s
with analog output AA 2 mV 0 to 10 000

Operating mode Gas flow regulation (upstream regulation)

Pressure regulation (downstream regulation)

Operating Local operation or remote control

Digital input Flow matching, opening/closing of external valves /

operating mode flow/regulation / switching on of emission/degas

Digital output Valve position indication; valve fault; sensor fault;

status message for sensor and valve;
pressure regulation upstream/downstream

Analog input 0 to 10 V DC setpoint pressure/flow

Analog output 0 to 10 V DC,

Pressure sensor signal, valve signal, valve position MOVE 1250

Serial interface RS 232 C, RS 485 C

Housing 1/4 19", for installation or tabletop use

Weight kg (lbs) 1 65 (3 64)

Temperature
Operation °C +5 to +50
Storage °C -40 to +60

Protection class IP 30 (EN 60 529)

1)
Valid for sensor setting 0 to +10 V linear and analog output A02

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 89

Ordering Information Controller CMove 1250

Part No.
Controller CMove 1250 230 200
Control valve
Move 1250 230 219
Connection cable
CMove 1250 – Control valve Move 1250
03 m 230 220
05 m 230 221
10 m 230 222
15 m 230 223
20 m 230 224
25 m 230 225
Sensor cable
TTR 90, TTR 100, TTR 101, TTR 211,
TTR 216, PTR 225, PTR 237
005 m 124 26
010 m 230 012
015 m 124 27
020 m 124 28
030 m 124 29
050 m 124 31
075 m 124 32
100 m 124 33
ITR 90, ITR 100, ITR 200
005 m 124 55
010 m 230 022
015 m 124 56
020 m 124 57
030 m 124 58
CTR 90, CTR 91, CTR 100, CTR 101
005 m 230 013
010 m 230 014
015 m 230 015
020 m 230 016
030 m 230 017
050 m 230 019
075 m 230 020
100 m 230 021

90 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Interface Module IMove 1250
for Move 1250
Advantages to the User Typical Applications
- Status query and valve position The interface module IMove 1250 con-
nects a RS 232C interface (for example
from a computer or a PLC) to the digi-
tal interface of the Move 1250 control
valve

Technical Data Interface Module IMove 1250

Temperature
Operation °C +5 to +50
Storage °C -10 to +65
Protection class IP 30
Operation voltage V DC 24 ± 10%
Current consumption
IMove 1250 mA < 50 (own consumption)
Move 1250 mA < 500
Provide upfront fusing 1 AT
Interface RS 232 C
Mounting
Support rails EN 50022-35 (symmetrical
EN 50035-G32 (asymmetrical)
Weight g 40 (0 09)

Ordering Information Interface Module IMove 1250

Part No.
Interface-Modul IMove 1250 230 201

54 18 Computer or PLC

Control valve Move 1250

62

in mm

Dimensional drawing for the IMove 1250 Connection of the IMove 1250

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 91

Low Pressure Safety Switch PS 113 A
Switch indicating whether or not the
pressure has reached the level of the
atmospheric pressure after venting
Preset diaphragm pressure switch set
to a trigger of 6 mbar (4 Torr) below
atmospheric pressure

Advantages to the User Typical Applications Technical Note

- Rugged design - Venting facilities Due to the diaphragm material used
- High switching capacity - Safety shutdown of vacuum sys- (EPDM) the PS 113 A is not suited for
tems applications in which the process gas
- Corrosion protected
contains large quantities of helium
- Easy to use - Load locks
Owing to helium permeation, the leak
- IP 44 protection - Increased switching capacity when
rate of the diaphragm for helium
using the switching amplifier SV 110
- Can be connected to a programma- amounts to values ≤ 1 x 10-4 mbar
ble control x l/s

72

50

48,5 DN 16 KF
in mm

Dimensional drawing for the low pressure safety switch PS 113 A

92 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Low Pressure Safety Switch

Switching pressure mbar (Torr) Approx 6 (4 5) below atmospheric pressure

Return switching pressure mbar (Torr) 3 (2 3) below atmospheric pressure

Switching inaccuracy mbar (Torr) 2 (1 5)

Max . permissible operating pressure (abs .)

mbar (Torr) 2000 (1500)

Storage temperature range °C -25 to +85

Nominal temperature range °C 0 to +85

Switching contact Changeover contacts, gold-plated, for prog controls

Contact life > 105 switching cycles

Switching capacity 100 mA / 24 V AC

30 mA / 24 V DC

Electrical connection 6 3 mm flat plug

Vacuum connection DN 16 ISO-KF

Helium permeation mbar (Torr) ≤ 5 x 10-5

Dead volume cm3 2

Materials in contact with the medium Stainless steel 1 4305, Stainless steel 1 4310,
Stainless steel 1 4300 PTFE coated, EPDM

Weight g 315 (0 70)

Protection class IP 44

Ordering Information Low Pressure Safety Switch

Part No.

Low pressure safety switch

PS 113 A, DN 16 ISO-KF;
complete with 3 m long cable 230 011

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 93

Pressure Switch PS 115
Rugged absolute pressure switch with
electrical switching contact and a
adjustable switching pressure between
0 5 and 2000 mbar (0 4 and 1500
Torr)

Through the differential pressure adap-

ter (optional) the PS 115 pressure
switch may be converted to operate as
a differential pressure switch The
adapter consists of a DN 16 ISO-KF
flange with screw-in thread and a
sealing arrangement, and it is screwed
into the PS 115 instead of the adjust-
Advantages to the User ment valve The operating range ext-
ends to 2000 mbar (1500 Torr) Brief
- High switching accuracy (±0 1 mbar) - Switching contact (n c ) in the refe-
over-loading to 3000 mbar (2250 Torr)
rence chamber and thus protected
- Stable long term operating charac- is permissible without impairing swit-
against corrosion
teristics ching accuracy In this operating range
- For operating pressures up to 3 bar
- Rugged, corrosion protected design differential values of +5 to -20 mbar
- For high ambient temperatures (+3 75 to -15 Torr) can be adjusted via
- Increased switching capacity
(floating) when using the switching - Upon request, the switching the set screw
amplifier SV 110 threshold may be set in the factory

Option:
Differential pressure
adapter DN 16 KF

21
133
105

19
51

14
18
DN 16 KF 85
in mm

Dimensional drawing for the pressure switch PS 115

94 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Pressure Switch PS 115

Switching range mbar (Torr) 0 5 to 2000 (0 375 to 1500)

Overload limit mbar (Torr) 3000 (2250)

Sensitivity mbar (Torr) 0 1 (0 75)

Switching hysteresis mbar (Torr) 0 5 (0 375)

Temperature coefficient %/K 0 4 of the switching value

Nominal temperature range

briefly (max . 8 h) °C 120
continuous °C 0 to +90

Switching contact Plug

Switching voltage V 24
Switching current (max .) mA 10
Contact resistance, max . kW 1
Electrical connection Plug (DIN 43 650)

Protection class IP 65

Vacuum connection DN 16 ISO-KF

Materials in contact with the medium

Measurement chamber Stainless steel 1 4301; 1 4401; 1 4310; 1 3541; FPM /FKM
Reference chamber Stainless steel 1 4301; 1 4401; 1 3541; Glass; Gold

Volume of the measurement chamber approx .

cm3 4

Volume of the reference chamber, approx .

cm3 20

Weight kg (lbs) 1 3 (2 87)

Ordering Information Pressure Switch PS 115

Part No.

Pressure Switch PS 115, DN 16 ISO-KF 160 04

Pressure switch adjustment 160 05

For floating installations without SV 110,

Clamping ring DN 16 ISO-KF, plastic 200 28 306
Centering ring, DN 16 ISO-KF, plastic 200 28 307

Option
Differential pressure adapter,
DN 16 ISO-KF
for connection to the PS 115 160 74

Spare parts kit PS 115 E 160 06

SV 110 switching amplifier 160 78

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 95

Switching Amplifier SV 110
The diaphragm contact of the pressure The electrical connections are provided Advantages to the User
switches is connected on one side to via screw terminals and are run out of
- Increased ratings for the switch
ground and is rated to 24 V / 10 mA the plastic enclosure through PG fit-
max When wanting to switch higher tings - Changeover contact
voltages or currents, a switching ampli-
fier will be needed The switching amp-
lifier is equipped with powerful floating
changeover contacts The output relay
is energized as soon as the pressure
drops below the switching threshold
set up on the pressure switch

55,5 121

15 109

4,2

80 21
50,5

Pg 9

Pg 9
21,5 163
in mm

Dimensional drawing for the switching amplifier SV 110

96 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Switching Amplifier SV 110

Mains connection 50/60 Hz (selectable) 110/130/220/240 V

Power consumption VA 3

Output relay
Switching voltage / current V/A 250 / 5
Switching power, max . VA 500

Response time ms 30

Release time ms 7

Control circuit V / mA 24 / 10

Ambient temperature, max . °C 50

Weight, approx . kg (lbs) 0 36 (0 79)

Ordering Information Switching Amplifier SV 110

Part No.

Switching amplifier SV 110 160 78

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 97

Diaphragm Pressure Regulators MR 16/MR 50
The MR 16/50 diaphragm regulators
are absolute pressure regulators which
automatically adapt the pumping speed
of a vacuum pump depending on the
amount of gas, without the need for an
external power supply

Advantages to the User Typical Applications

- Non-incremental, automatic - Distillation processes of all kinds
pressure control - Solvent recovery
- Simple setting of the control pressu- - Drying processes
res
- Temperature control on bath
- High control accuracy cryostats
- Corrosion protected stainless steel - Degassing of liquids and plastics
design
- Easy to disassemble for cleaning
and maintenance
- Trouble-free operation in ex areas
- Built-in isolation valves for the pro-
cess connection and the vacuum
pump (MR 16)

135
98
120
58,5
39

67
130
92,5
165
in mm

Dimensional drawing for the diaphragm regulator MR 16 (left) and MR 50 (right)

98 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold

Technical Data Diaphragm Pressure Regulator
MR 16 MR 50
Control range mbar (Torr) 10 to 1000 (7 5 to 750) 10 to 1000 (7 5 to 750)

Control inaccuracy ± 2% of the pressure control ± 2% of the pressure control

(10 – 90% of flow) (10 – 90% of flow)

Throughput m3/h 16 50

Nominal temperature range °C +5 to +100 +5 to +100

Storage temperature range °C -25 to +60 -25 to +60

Temperature coefficient %/K 03 03

Setting time ms 5 5

Permissible overload for brief periods bar 3 3

Diaphragm material FPM (FKM)/EPDM FPM (FKM)/EPDM

Housing material stainless steel 1 4571 stainless steel 1 4571

Installation orientation Any Any

Dimensions see dimensional drawing see dimensional drawing

Vacuum connection 2x DN 16 ISO-KF 40 ISO-KF

Measurement connection 3x thread R 1/8" 1/8"

Weight, approx . kg (lbs) 2 7 (6 0) 8 0 (17 6)

Ordering Information Diaphragm Pressure Regulator

MR 16 MR 50
Part No. Part No.

Diaphragm pressure regulator

MR 16, DN 16 ISO-KF 160 25 –
MR 50, DN 40 ISO-KF – 160 27

Options
Stainless steel measurement flange,
DN 16 ISO-KF,
for connection to a reference and/or
process chamber or pumping stud 160 26 160 26
KALREZ diaphragm – 200 28 597
Spare Parts
EPDM diaphragm and seal kit EK 160 29 –
Viton diaphragm and seal kit EK 160 31 –
Seal kit MR 50,
incl . EPDM and Viton diaphragms – EK 160 32

Adjustment screw for

the adjustable valve,
complete with seal 240 001 240 001

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 99

Miscellaneous

Leybold Calibration Service

Calibration of vacuum gauges in the
pressure range from 10-8 to 1000 mbar
(10-8 to 750 Torr) as DAkkS or factory
calibration

Advantages to the User DAkkS / Factory Calibration

- Clear reference to the reference - If an unambiguous reference is re- It is the task of the Deutschen Akkredi-
quantities quired for a large number of pres- tierungsstelle (DAkkS) to ensure tracea-
sure gauges bility of industrial measurements and
- Reproducible measurements
- If an unambiguous description for testing to national standards
- Constantly high quality over time
processes is required
- Reliable checking of existing gauges The DAkkS is supported jointly by the
- If for experiments and processes Federal Institution for Physics and
- Unambiguous description of the unambiguous traceability of the Technology (PTB), the industry, the
process measured pressures to basic quanti- Federal Minister for Economics and the
Since 1981 Leybold has been offering ties is demanded by the authorities Western European Metrology Club
to all customers an impartial calibration - If testing to DIN/ISO 9000 is (WEMC)
service for gauges and sensors of any required in the following areas
make A DAkkS calibration certificate or The transfer standards in the DAkkS
- Research calibration facility used by Leybold are
a factory calibration certificate is issued
for every calibration Instruments with - Thin-film engineering checked regularly
insufficient long-term stability or such - Manufacture of systems (recalibrated) by the PTB
instruments where the principle of mea- - Military Within the framework of the DAkkS, the
surement is not suited for calibration, calibration system at Leybold has been
- Energy
can not be calibrated checked and approved by the PTB and
- Chemistry production
the applied transfer standards have
- Production of pharmaceuticals and
been calibrated by the PTB
Typical Applications herbicides
Factory calibrations were performed
Calibrated vacuum gauges are used - Sputtering systems
with standards which have not been
under the following conditions: - Aircraft and space industry
calibrated directly at the PTB; instead
- If the requirements concerning - Manufacture of lamp the transfer standards of the in-house
reproducibility and comparability of calibration service are used Thus tra-
experiment runs are high ceability to national standards is en-
sured in both cases

100 Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling leybold
Technical Data DAkkS Calibration

Calibration range mbar (Torr) to 10-3 to 10-5 to 10-8

Ordering Information DAkkS Calibration

Part No. Part No. Part No.

DAkkS calibration 157 12 157 13 157 14

Technical Data Factory Calibration

Calibration range mbar (Torr) to 10-3 to 10-5 to 10-8

Ordering Information Factory Calibration

Part No. Part No. Part No.

Factory calibration 154 22 154 23 154 24

For PENNINGVAC transmitters only Factory Calibration is available .

Calibration Systems are described in the Catalog Part “Vacuum Pump Systems”.

leybold Leybold Full Line Catalog 2018 - Vacuum Measuring, Controlling 101
Sales and Service
Germany Great Britain America Leybold Japan Co., Ltd.
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T: +49-(0)221-347-0
F: +49-(0)221-347-1250
info@[Link]