Fiber optics low-coherence IR interferometry for defense sensors manufacturing
Abstract
We present novel fiber optics low coherence interferometer apparatus, and novel probe for in-situ characterization of semiconductor structures for IR detector manufacturing. Probe does not exhibit polarization, or strain sensitivity observed in earlier invented systems. In addition it is demonstrated to be able to operate with varying length of optical fibers.
- Publication:
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Photonic Microdevices/Microstructures for Sensing
- Pub Date:
- May 2009
- DOI:
- Bibcode:
- 2009SPIE.7322E..0KW