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IGC ® II Inte grated Gas Compone nts

Substrate s, Ma nifolds, Mounting Compone nts,
a nd As se mbly Ha rdwa re

IGC II Se r ie s
■ 1.5 in. (38.1 mm) C-seal modular design

■ Compact footprint minimizes space requirements

■ Lightweight, easy-to-assemble components

2 IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware

Contents
Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
The IGC II System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Substrate Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Substrate Components
Surface-Mount Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Substrate End Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Mass Flow Controller Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Jumper Tube Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Spacer Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Drop-Down Connector and Plugs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Manifold Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Manifold Components—Tee Connectors
Elbow-to-Elbow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Elbow-to-“H” Type VCR® Fitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Elbow-to-Butt Weld . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
“H” Type VCR-to-“H” Type VCR Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
“H” Type VCR Fitting-to-Butt Weld . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Butt Weld-to-Butt Weld . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Parallel Manifold Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Parallel Manifold Components­
Jumper Tube Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Caps and Conversion Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Support Blocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Assembly Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Technical Data
Service Ratings Internal Surface Finish
■ Pressure rating: 3000 psig (206 bar) at 70°F (20°C) for ■ Wetted components: electropolished to 5 µin. (0.13 µm) Ra
substrate and manifold components average
■ Temperature rating: 120°C (248°F) operating; 150°C (302°F)
bakeout. Cleaning and Processing
■ Wetted components: Swagelok Ultrahigh-Purity Process
Materials of Construction Specification (SC-01), MS-06-61.
■ Wetted flow components: 316L VIM-VAR stainless steel
■ Nonwetted components: aluminum (hard-coat anodized,
alloy 2024-T351), stainless steel (316, 303, and alloy A286),
and plastic (polyethersulfone)
IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware 3

The IGC II System

■ A typical IGC II system consists of three layers—a substrate assembly, a manifold assembly, and mounting components.
■ The manifold and substrate assemblies are combined to form the conduit for the process gas and can be customized for any
flow configuration.
■ The IGC II system is assembled with simple mounting components and standard hardware.
■ The IGC II system accepts any 1.5 in. (38.1 mm) C-seal surface-mount component. See the Swagelok Modular Surface-Mount
Components and Seals catalog, MS-02-135, for details.
■ The Swagelok IGC II System Configurator is available to simplify the layout, selection, and ordering of IGC II components. The
Configurator can be downloaded from www.swagelok.com.

Flow components
Substrate Assembly
■ The assembly provides the flow path for the process gas
through the gas stick.
■ The substrate assembly consists of a substrate channel
and a variety of drop-in flow components.
■ The substrate channels are available in a variety of lengths
to accommodate up to 14 surface-mount components.
Substrate channel
■ See pages 4 through 7 for ordering numbers.

Manifold Assembly
Flow component
■ The manifold assembly provides the flow path between two
or more parallel gas sticks.
■ The manifold assembly consists of a manifold channel and
a variety of drop-in flow components.
■ The manifold channels are available in a variety of lengths
to accommodate up to 10 parallel gas sticks.
■ Optional parallel manifold assemblies are available to Manifold channel
provide an additional flow path parallel to the gas stick.
■ See pages 7 through 10 for ordering numbers.

Substrate-Manifold Assembly Substrate assembly

■ The substrate assembly bolts over the manifold assembly.
■ A C-seal gasket assembly (not visible) provides a leak-tight
seal between the substrate component and the manifold
below.
■ The substrate-manifold assembly accepts any 1.5 in.
(38.1 mm) C-seal surface-mount component.

Manifold assembly
Mounting Components and Caps
■ A foot block bolts to each end of the gas stick, providing
panel-mount capability.
■ A support block provides midline support for longer gas Support
sticks.
■ A conversion plate provides the mounting capacity for a Foot
Conversion
mass flow controller. plate
■ A cap is available to cover an unused position on a
substrate or manifold.
Cap
■ A tube port is available to provide a 1/4 in. vertical tube port
on a manifold or substrate.
■ See pages 11 and 12 for ordering numbers.
SWAGELOK IGC II COMPONENTS SB-** N-ELD-708
4 IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware

Substrate Channels Number of Number

Dimensions, in inches (millimeters), are for Surface- of Surface
reference only and are subject to change. Mount Ordering A Mount Ordering A
Positions Number in. (mm) Positions Number in. (mm)
1.53
(38.9) 1 A-IG2-SB-01 2.60 (66.0) 8 A-IG2-SB-08 13.3 (338)
2 A-IG2-SB-02 4.13 (105) 9 A-IG2-SB-09 14.8 (376)
1.51 3 A-IG2-SB-03 5.66 (144) 10 A-IG2-SB-10 16.4 (416)
(38.4)
4 A-IG2-SB-04 7.19 (183) 11 A-IG2-SB-11 17.9 (455)

0.88
5 A-IG2-SB-05 8.72 (221) 12 A-IG2-SB-12 19.4 (493)
A
(22.3) 6 A-IG2-SB-06 10.2 (259) 13 A-IG2-SB-13 21.0 (533)
7 A-IG2-SB-07 11.8 (300) 14 A-IG2-SB-14 22.5 (572)

SWAGELOK IGC II COMPONENTS N-ELD-805

Bottom view of surface mounts

Port Descriptions for Substrate Components

From left to right:
Side Port 1 corresponds
Center or Manifold Center or Manifold to the connection
Side Side port on the first
surface-mount
component.
Typical 3-port Typical 2-port N-ELD-709A
surface-mount surface mount Port 2 corresponds SWAGELOK IGC II COMPONENTS LGLG WITH CALLOUTS

to the connection
port on the second
surface-mount
Bottom View of Surface-Mount Components component.

A
Port 1 B Port 2
Substrate Components
0.18 (4.6)
Surface-Mount Connectors
SWAGELOK IGC II COMPONENTS SHSH N-ELD-710

Wetted Internal
Description Dimensions, in. (mm) Surface Area
SWAGELOK IGC II COMPONENTS SHLG N-ELD-711
Ordering Volume
Cutaway Port 1 Port 2 Number A B in.2 (cm2) in.3 (cm3)
SWAGELOK IGC II COMPONENTS SHDT N-ELD- 712
1.22 0.92
Side 6LVV-IG2-WS-SHSH 0.69 (4.4) 0.031 (0.51)
(31.0) (23.4)

Center 6LVV-IG2-WS-SHLG 0.86 (5.5) 0.039 (0.64)

SWAGELOK IGC II COMPONENTS SHDE N-ELD-713

Center
Side and 6LVV-IG2-WS-SHDT 1.18 (7.6) 0.054 (0.89)
1.53 1.23
manifold (38.9) (31.2)

SWAGELOK IGC II COMPONENTS LGLG

N-ELD-709

SWAGELOK IGC II COMPONENTS LGDT N-ELD-714 Manifold 6LVV-IG2-WS-SHDE 1.15 (7.4) 0.052 (0.85)

Center 6LVV-IG2-WS-LGLG 1.03 (6.7) 0.047 (0.76)

SWAGELOK IGC II COMPONENTS LGDE N-ELD-715

Center
and 6LVV-IG2-WS-LGDT 1.83 1.53 1.36 (8.7) 0.062 (1.0)
Center manifold (46.5) (38.9)
SWAGELOK IGC II COMPONENTS DTDT N-ELD-716

Manifold 6LVV-IG2-WS-LGDE 1.32 (8.5) 0.060 (0.97)

SWAGELOK IGC II COMPONENTS DTDE N-ELD-717

Center
and 6LVV-IG2-WS-DTDT 1.68 (10.8) 0.078 (1.3)
Center manifold
1.83 1.53
SWAGELOK IGC II COMPONENTS DEDE
and
N-ELD-718
(46.5) (38.9)
manifold
Manifold 6LVV-IG2-WS-DTDE 1.65 (10.6) 0.075 (1.2)

1.83 1.53
Manifold Manifold 6LVV-IG2-WS-DEDE 1.61 (10.3) 0.073 (1.2)
(46.5) (38.9)
SWAGELOK IGC II COMPONENTS SHVM WITH CALLOUTS N-ELD-728A

IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware 5

Substrate Components A
B Port 2
Dimensions, in inches (millimeters), are for reference only and Port 1
are subject to change.
0.18 (4.6)
Substrate End Connectors
SWAGELOK IGC II COMPONENTS SHVM N-ELD-728
Wetted Internal
Description Dimensions, in. (mm) Surface Area
Ordering Volume
Cutaway Port 1 Port 2 Number A B in.2 (cm2) in.3 (cm3)
SWAGELOK IGC II COMPONENTS LGVM N-ELD-729

2.31 2.16
Side 6LVV-IG2-WS-SHVM 1.31 (8.4) 0.059 (0.96)
(58.7) (54.9)
SWAGELOK IGC II COMPONENTS DTVM N-ELD-730

Center 6LVV-IG2-WS-LGVM 1.48 (9.5) 0.067 (1.1)

N-ELD-731
Center
and 6LVV-IG2-WS-DTVM 1.80 (11.6) 0.082 (1.3)
SWAGELOK IGC II COMPONENTS DEVM

2.61 2.46
manifold (66.3) (62.5)
1/4 in.
male
VCR Manifold 6LVV-IG2-WS-DEVM 1.77 (11.4) 0.080 (1.3)
SWAGELOK IGC II COMPONENTS VMMA N-ELD-732 fitting

Standard 2.36 2.18

6LVV-IG2-WS-VMMA 1.54 (9.9) 0.070 (1.1)
SWAGELOK IGC II COMPONENTS VMMB N-ELD-733
MFC (59.9) (55.4)

Compact 2.60 2.42

6LVV-IG2-WS-VMMB 1.68 (10.8) 0.076 (1.2)
SWAGELOK IGC II COMPONENTS SHVF N-ELD-785 MFC (66.0) (61.5)

SWAGELOK IGC II COMPONENTS LGVF N-ELD-788

2.31 2.16
Side 6LVV-IG2-WS-SHVF 1.31 (8.4) 0.059 (0.96)
(58.7) (54.9)

Center 6LVV-IG2-WS-LGVF 1.48 (9.5) 0.067 (1.1)

SWAGELOK IGC II COMPONENTS DTVF N-ELD-786

SWAGELOK IGC II COMPONENTS DEVF N-ELD-787 Center

and 6LVV-IG2-WS-DTVF 2.61 2.46 1.80 (11.6) 0.082 (1.3)
1/4 in. manifold (66.3) (62.5)
female
VCR
SWAGELOK IGC II COMPONENTS VFMA fitting
N-ELD-784 Manifold 6LVV-IG2-WS-DEVF 1.77 (11.4) 0.080 (1.3)

Standard 2.36 2.18

N-ELD-783
6LVV-IG2-WS-VFMA 1.54 (9.9) 0.070 (1.1)
MFC
SWAGELOK IGC II COMPONENTS VFMB

(59.9) (55.4)

SWAGELOK IGC II COMPONENTS SHEC N-ELD-740

Compact 2.60 2.42

6LVV-IG2-WS-VFMB 1.68 (10.8) 0.076 (1.2)
MFC (66.0) (61.5)
SWAGELOK IGC II COMPONENTS LGEC N-ELD-741

1.48 1.33
Side 6LVV-IG2-WS-SHEC 0.84 (5.4) 0.038 (0.62)
(37.6) (33.8)
SWAGELOK IGC II COMPONENTS DTEC N-ELD-742

Center 6LVV-IG2-WS-LGEC 1.01 (6.5) 0.045 (0.74)

N-ELD-743

Center
SWAGELOK IGC II COMPONENTS DEEC

and 6LVV-IG2-WS-DTEC 1.78 1.63 1.33 (8.6) 0.061 (0.99)

manifold (45.2) (41.4)
1/4 
0.035 in.
SWAGELOK IGC II COMPONENTS ECMA N-ELD-744
butt Manifold 6LVV-IG2-WS-DEEC 1.30 (8.4) 0.059 (0.96)
weld

N-ELD-745 Standard 1.53 1.35

6LVV-IG2-WS-ECMA 1.08 (6.9) 0.048 (0.79)
SWAGELOK IGC II COMPONENTS ECMB

MFC (38.9) (34.3)

Compact 1.77 1.59

6LVV-IG2-WS-ECMB 1.21 (7.8) 0.054 (0.89)
MFC (45.0) (40.4)
SWAGELOK IGC II COMPONENTS LGMA WITH CALLOUTS N-ELD-720A

6 IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware

Substrate Components Port 1

A
B
Dimensions, in inches (millimeters), are for reference only and Port 2
are subject to change.
0.18 (4.6)
Mass Flow Controller Connectors
Wetted Internal
SWAGELOK IGC II COMPONENTS SHMA
N-ELD-719

Description Dimensions, in. (mm) Surface Area

Ordering Volume
Cutaway Port 1 Port 2 Number A B in.2 (cm2) in.3 (cm3)
N-ELD-720
SWAGELOK IGC II COMPONENTS LGMA

1.27 0.94
Side 6LVV-IG2-WS-SHMA 0.93 (5.9) 0.042 (0.68)
(32.2) (23.9)

SWAGELOK IGC II COMPONENTS DTMA N-ELD-721

Center 6LVV-IG2-WS-LGMA 1.10 (7.1) 0.050 (0.81)

SWAGELOK IGC II COMPONENTS DEMA N-ELD-722

Center
and 6LVV-IG2-WS-DTMA 1.58 1.25 1.42 (9.2) 0.065 (1.1)
manifold (40.1) (31.8)
Standard
MFC
SWAGELOK IGC II COMPONENTS MAMA N-ELD-780

Manifold 6LVV-IG2-WS-DEMA 1.39 (8.9) 0.063 (1.0)

SWAGELOK IGC II COMPONENTS MAMB N-ELD-781

Standard 1.33 0.97

6LVV-IG2-WS-MAMA 1.17 (7.5) 0.053 (0.87)
MFC (33.8) (24.6)

SWAGELOK IGC II COMPONENTS SHMB N-ELD-723

Compact 1.58 1.21

6LVV-IG2-WS-MAMB 1.30 (8.4) 0.059 (0.97)
MFC (40.1) (30.7)

1.51 1.18
SWAGELOK IGC II COMPONENTS LGMB N-ELD-724

Side 6LVV-IG2-WS-SHMB 1.06 (6.8) 0.048 (0.78)

(38.4) (30.0)

SWAGELOK IGC II COMPONENTS DTMB N-ELD-725

Center 6LVV-IG2-WS-LGMB 1.23 (7.9) 0.056 (0.91)

Center
N-ELD-726
and 6LVV-IG2-WS-DTMB 1.56 (10.0) 0.071 (1.2)
SWAGELOK IGC II COMPONENTS DEMB

Compact 1.82 1.49

MFC manifold (46.2) (37.8)

SWAGELOK IGC II COMPONENTS MBMB N-ELD-782

Manifold 6LVV-IG2-WS-DEMB 1.52 (9.8) 0.069 (1.1)

SWAGELOK IGC II COMPONENTS SHTB**LG N-ELD-727

Compact 1.83 1.45

6LVV-IG2-WS-MBMB 1.43 (9.2) 0.065 (1.1)
MFC (46.5) (36.8)

A
Jumper Tube Connectors Port 1 B Port 2

Number of Wetted 0.18 (4.6)

Surface-Mount Surface Internal
Dimensions, in. (mm)
Positions Ordering Area Volume
Skipped Number A B in.2 (cm2) in.3 (cm3)
1 6LVV-IG2-WS-SHTB01LG 3.06 (77.7) 2.76 (70.1) 1.73 (11.1) 0.078 (1.3)
2 6LVV-IG2-WS-SHTB02LG 4.59 (116) 4.28 (109) 2.59 (16.7) 0.12 (1.9)
3 6LVV-IG2-WS-SHTB03LG 6.12 (155) 5.82 (148) 3.46 (22.3) 0.16 (2.5)
4 6LVV-IG2-WS-SHTB04LG 7.65 (194) 7.34 (186) 4.32 (27.9) 0.20 (3.2)
5 6LVV-IG2-WS-SHTB05LG 9.18 (233) 8.88 (226) 5.19 (33.5) 0.23 (3.8)
6 6LVV-IG2-WS-SHTB06LG 10.7 (272) 10.4 (264) 6.05 (39.0) 0.27 (4.5)
7 6LVV-IG2-WS-SHTB07LG 12.2 (310) 11.9 (302) 6.92 (44.6) 0.31 (5.1)
8 6LVV-IG2-WS-SHTB08LG 13.8 (350) 13.5 (343) 7.78 (50.2) 0.35 (5.7)
9 6LVV-IG2-WS-SHTB09LG 15.3 (389) 15.0 (381) 8.65 (55.8) 0.39 (6.4)
10 6LVV-IG2-WS-SHTB010LG 16.8 (427) 16.5 (419) 9.51 (61.4) 0.43 (7.0)
IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware 7

Substrate Components
A
Dimensions, in inches (millimeters), are for reference only and Port 1 1.23 B Port 2
(31.2)
are subject to change.
N-ELD-795
SWAGELOK IGC II COMPONENTS SHTASH 0.18 (4.6)
Spacer Connectors
N-ELD-796
SWAGELOK IGC II COMPONENTS SHTALG
Wetted Internal
Description Dimensions, in. (mm) Surface Area
Ordering Volume
Cutaway Port 1 Port 2 Number A B in.2 (cm2) in.3 (cm3)
2.75 1.23
Side Side 6LVV-IG2-WS-SHTASH 1.06 (10.3) 0.072 (1.2)
(69.9) (31.2)

3.06 1.53
Side Center 6LVV-IG2-WS-SHTALG 1.77 (11.4) 0.080 (1.3)
(77.7) (38.9)

Drop-Down Connector and Plugs N-ELD-775A

SWAGELOK IGC II components
DOWN PLUG FOR MANIFOLD PORT
6LVV-IG2-WC-DP

Wetted Internal
SWAGELOK IGC II components N-ELD-775B
Ordering A Surface Area Volume A
Cutaway Description Number in. (mm) in.2 (cm2) in.3 (cm3)
DOWN PLUG FOR MANIFOLD PORT
6LVV-IG2-WC-DP

Drop-down connector for 0.86

6LVV-IG2-WC-DD 0.49 (3.2) 0.022 (0.36)
SWAGELOK IGC II components N-ELD-774
substrate-to-manifold connection (21.8)
PLUG FOR SIDE PORT
6LVV-IG2-WC-PG

Plug for manifold port with a 0.50

6LVV-IG2-WC-PG 0.030 (0.19) —
SWAGELOK IGC II components
DOWN PLUG FOR MANIFOLD PORT
6LVV-IG2-WC-DP
N-ELD-775
substrate component above (12.7)

Plug for manifold port with no 0.86

6LVV-IG2-WC-DP 0.030 (0.19) —
substrate component above (21.8)

SWAGELOK IGC II COMPONENTS MB -** N-ELD-746

Manifold Channels Number

Dimensions, in inches (millimeters), are for reference only and of Surface
are subject to change. Mount Ordering A
Positions Number in. (mm)
1.60
(40.6) 1 A-IG2-MB-01 1.68 (42.7)
2 A-IG2-MB-02 3.28 (83.3)
3 A-IG2-MB-03 4.88 (124)
1.51
(38.4) 4 A-IG2-MB-04 6.48 (164)
5 A-IG2-MB-05 8.08 (205)
6 A-IG2-MB-06 9.68 (246)
A
7 A-IG2-MB-07 11.3 (287)
0.80 8 A-IG2-MB-08 12.9 (328)
(20.3) 9 A-IG2-MB-09 14.5 (368)
10 A-IG2-MB-10 16.1 (409)
8 IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware
SWAGELOK IGC II COMPONENTS MEMT**ME N-ELD-747
Manifold Components—Tee Connectors
Dimensions, in inches (millimeters), are for reference only and
are subject to change.

Elbow-to-Elbow A
1.60
(40.6)
Number of Wetted
Surface Mount Surface Internal
Positions Ordering A Area Volume
Skipped Number in. (mm) in.2 (cm2) in.3 (cm3) 0.31 0.18
(7.9) (4.6)
2 6LVV-IG2-MS-MEME 2.04 (51.8) 1.59 (10.3) 0.10 (1.7)
3 6LVV-IG2-MS-MEMT01ME 3.64 (92.5) 3.15 (20.3) 0.22 (3.7)
4 6LVV-IG2-MS-MEMT02ME 5.24 (133) 4.68 (30.2) 0.34 (5.6)
5 6LVV-IG2-MS-MEMT03ME 6.84 (174) 6.23 (40.2) 0.46 (7.5)
6 6LVV-IG2-MS-MEMT04ME 8.44 (214) 7.76 (50.1) 0.58 (9.5)
7 6LVV-IG2-MS-MEMT05ME 10.0 (254) 9.30 (60.0) 0.70 (11.4)
8 6LVV-IG2-MS-MEMT06ME 11.6 (295) 10.9 (70.0) 0.82 (13.4)
9 6LVV-IG2-MS-MEMT07ME 13.2 (335) 12.4 (80.0) 0.93 (15.3)
10 SWAGELOK IGC
6LVV-IG2-MS-MEMT08ME
II COMPONENTS MEMT**MF
14.8N-ELD-748
(376) 13.9 (89.9) 1.05 (17.2)SWAGELOK IGC II COMPONENTS MEMT**MM N-ELD-749

Elbow-to-“H” Type VCR Fittings

A A
1.60 2.10 1.60 2.10
(40.6) (53.3) (40.6) (53.3)
0.18 0.18
(4.6) (4.6)

0.31 0.25 0.31 0.25

(7.9) (6.4) (7.9) (6.4)

Female VCR Fitting Male VCR Fitting

Wetted
Number of Surface Internal
Surface Mount Female VCR Fitting Male VCR Fitting A Area Volume
Positions Ordering Number Ordering Number in. (mm) in.2 (cm2) in.3 (cm3)
1 6LVV-IG2-MS-MEMF 6LVV-IG2-MS-MEMM 2.32 (58.9) 1.86 (12.0) 0.12 (2.0)
2 6LVV-IG2-MS-MEMT01MF 6LVV-IG2-MS-MEMT01MM 3.92 (99.6) 3.41 (22.0) 0.24 (4.0)
3 6LVV-IG2-MS-MEMT02MF 6LVV-IG2-MS-MEMT02MM 5.52 (140) 4.94 (31.9) 0.36 (5.9)
4 6LVV-IG2-MS-MEMT03MF 6LVV-IG2-MS-MEMT03MM 7.12 (181) 6.49 (41.8) 0.48 (7.9)
5 6LVV-IG2-MS-MEMT04MF 6LVV-IG2-MS-MEMT04MM 8.72 (221) 8.03 (51.8) 0.60 (9.8)
6 6LVV-IG2-MS-MEMT05MF 6LVV-IG2-MS-MEMT05MM 10.3 (262) 9.57 (61.7) 0.72 (11.7)
7 6LVV-IG2-MS-MEMT06MF 6LVV-IG2-MS-MEMT06MM 11.9 (302) 11.1 (71.7) 0.84 (13.7)
8 6LVV-IG2-MS-MEMT07MF 6LVV-IG2-MS-MEMT07MM 13.5 (343) 12.7SWAGELOK 0.95 MEMT**MC
(81.7)IGC II COMPONENTS (15.6) N-ELD-750

9 6LVV-IG2-MS-MEMT08MF 6LVV-IG2-MS-MEMT08MM 15.1 (384) 14.2 (91.9) 1.07 (17.6)

10 6LVV-IG2-MS-MEMT09MF 6LVV-IG2-MS-MEMT09MM 16.7 (424) 15.7 (102) 1.19 (19.5)

Elbow-to-Butt Weld A
1.60 0.81
(40.6) (20.6)
Wetted 0.18
Number of Surface Internal (4.6)
0.31 (7.9)
Surface Mount Ordering A Area Volume
Positions Number in. (mm) in.2 (cm2) in.3 (cm3)
0.375 (9.6)
1 6LVV-IG2-MS-MEMC 1.02 (25.9) 0.80 (5.1) 0.052 (0.86)
2 6LVV-IG2-MS-MEMT01MC 2.62 (66.5) 2.35 (15.2) 0.17 (2.81)
3 6LVV-IG2-MS-MEMT02MC 4.22 (107) 3.88 (25.1) 0.29 (4.73)
4 6LVV-IG2-MS-MEMT03MC 5.82 (148) 5.43 (35.0) 0.41 (6.68)
5 6LVV-IG2-MS-MEMT04MC 7.42 (188) 6.97 (45.0) 0.53 (8.62)
6 6LVV-IG2-MS-MEMT05MC 9.02 (229) 8.51 (54.9) 0.64 (10.6)
7 6LVV-IG2-MS-MEMT06MC 10.6 (269) 10.1 (64.9) 0.76 (12.5)
8 6LVV-IG2-MS-MEMT07MC 12.2 (310) 11.6 (74.8) 0.88 (14.5)
9 6LVV-IG2-MS-MEMT08MC 13.8 (350) 13.1 (84.8) 1.00 (16.4)
10 6LVV-IG2-MS-MEMT09MC 15.4 (391) 14.7 (94.7) 1.12 (18.3)
N-ELD-754
IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware
SWAGELOK IGC II COMPONENTS MFMT**MM
9

Manifold Components—Tee Connectors A

1.60 2.10
Dimensions, in inches (millimeters), are for reference only and (40.6) (53.3)
0.18
are subject to change. SWAGELOK IGC II COMPONENTS MMMT**MM
(4.6)
N-ELD-756

“H” Type VCR Fitting-to-“H” Type VCR Fitting 0.31 0.25

(7.9) (6.4)
SWAGELOK IGC II COMPONENTS MFMT**MF N-ELD-751
Female-to-Male

A A
1.60 2.10 1.60 2.10
(40.6) (53.3) (40.6) (53.3)
0.18 0.18
(4.6) (4.6)

0.31 0.25 0.31 0.25

(7.9) (6.4) (7.9) (6.4)

Female-to-Female Male-to-Male

Wetted
Number of Surface Internal
Surface Mount Female-to-Female Female-to-Male Male-to-Male A Area Volume
Positions Ordering Number Ordering Number Ordering Number in. (mm) in.2 (cm2) in.3 (cm3)
1 6LVV-IG2-MS-MFMT01MF 6LVV-IG2-MS-MFMT01MM 6LVV-IG2-MS-MMMT01MM 4.21 (107) 3.68 (23.7) 0.26 (4.24)
2 6LVV-IG2-MS-MFMT02MF 6LVV-IG2-MS-MFMT02MM 6LVV-IG2-MS-MMMT02MM 5.81 (148) 5.24 (33.8) 0.38 (6.21)
3 6LVV-IG2-MS-MFMT03MF 6LVV-IG2-MS-MFMT03MM 6LVV-IG2-MS-MMMT03MM 7.41 (188) 6.80 (43.8) 0.50 (8.18)
4 6LVV-IG2-MS-MFMT04MF 6LVV-IG2-MS-MFMT04MM 6LVV-IG2-MS-MMMT04MM 9.01 (229) 8.36 (53.9) 0.62 (10.1)
5 6LVV-IG2-MS-MFMT05MF 6LVV-IG2-MS-MFMT05MM 6LVV-IG2-MS-MMMT05MM 10.6 (269) 9.91 (63.9) 0.74 (12.1)
6 6LVV-IG2-MS-MFMT06MF 6LVV-IG2-MS-MFMT06MM 6LVV-IG2-MS-MMMT06MM 12.2 (310) 11.5 (74.0) 0.86 (14.1)
7 6LVV-IG2-MS-MFMT07MF 6LVV-IG2-MS-MFMT07MM 6LVV-IG2-MS-MMMT07MM 13.8 (350) 13.0 (84.1) 0.96 (16.1)
8 6LVV-IG2-MS-MFMT08MF 6LVV-IG2-MS-MFMT08MM 6LVV-IG2-MS-MMMT08MM 15.4 (391) 14.6 (94.1) 1.10 (18.0)
9 6LVV-IG2-MS-MFMT09MF 6LVV-IG2-MS-MFMT09MM 6LVV-IG2-MS-MMMT09MM 17.0 (432) 16.2 (104) 1.22 (20.0)
10 6LVV-IG2-MS-MFMT10MF
SWAGELOK IGC II COMPONENTS MFMT**MC
6LVV-IG2-MS-MFMT10MM
N-ELD-755 6LVV-IG2-MS-MMMT10MM 18.6 (472) 17.7 (114) 1.35 (22.0)

SWAGELOK IGC II COMPONENTS MMMT**ML N-ELD-752

“H” Type VCR Fitting-to-Butt Weld

A A
2.10 1.60 0.81 2.10 1.60 0.81
(53.3) (40.6) (20.6) (53.3) (40.6) (20.6)
0.18 (4.6) 0.18 (4.6)

0.31 (7.9) 0.31 (7.9)

0.25 0.375 0.25

(6.4)
0.375
(9.6) (6.4) (9.6)
Female VCR Fitting Male VCR Fitting

Wetted
Number of Surface Internal
Surface Mount Female VCR Fitting Male VCR Fitting A Area Volume
Positions Ordering Number Ordering Number in. (mm) in.2 (cm2) in.3 (cm3)
1 6LVV-IG2-MS-MFMT01MC 6LVV-IG2-MS-MMMT01MC 2.91 (73.9) 1.06 (6.80) 0.07 (1.17)
2 6LVV-IG2-MS-MFMT02MC 6LVV-IG2-MS-MMMT02MC 4.51 (114) 2.61 (16.8) 0.19 (3.12)
3 6LVV-IG2-MS-MFMT03MC 6LVV-IG2-MS-MMMT03MC 6.11 (155) 4.14 (26.7) 0.31 (5.05)
4 6LVV-IG2-MS-MFMT04MC 6LVV-IG2-MS-MMMT04MC 7.71 (196) 5.69 (36.7) 0.43 (7.00)
5 6LVV-IG2-MS-MFMT05MC 6LVV-IG2-MS-MMMT05MC 9.31 (236) 7.23 (46.6) 0.55 (8.93)
6 6LVV-IG2-MS-MFMT06MC 6LVV-IG2-MS-MMMT06MC 10.9 (277) 8.77 (56.6) 0.66 (10.9)
7 6LVV-IG2-MS-MFMT07MC 6LVV-IG2-MS-MMMT07MC 12.5 (318) 10.3 (66.6) 0.78 (12.8)
8 6LVV-IG2-MS-MFMT08MC 6LVV-IG2-MS-MMMT08MC 14.1 (358) 11.8 (76.5) 0.90 (14.8)
9 6LVV-IG2-MS-MFMT09MC 6LVV-IG2-MS-MMMT09MC 15.7 (399) 13.4 (86.5) 1.02 (16.7)
10 6LVV-IG2-MS-MFMT10MC 6LVV-IG2-MS-MMMT10MC 17.3 (439) 14.9 (96.4) 1.14 (18.6)
10 IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware

Manifold Components—Tee Connectors N-ELD-753

SWAGELOK IGC II COMPONENTS MCMT**MC

Dimensions, in inches (millimeters), are for reference only and

are subject to change.

Butt Weld-to-Butt Weld A

1.60 0.81
(40.6) (20.6)
Wetted 0.18 (4.6)
Number of Surface Internal
Surface Mount Ordering A Area Volume 0.31 (7.9)
Positions Number in. (mm) in.2 (cm2) in.3 (cm3)
1 6LVV-IG2-MS-MCMT01MC 1.61 (40.9) 1.55 (10.0) 0.12 (2.0) 0.375 (9.6)

2 6LVV-IG2-MS-MCMT02MC 3.21 (81.5) 3.09 (19.9) 0.24 (3.9)

3 6LVV-IG2-MS-MCMT03MC 4.81 (122) 4.63 (29.9) 0.36 (5.8)
4 6LVV-IG2-MS-MCMT04MC 6.41 (163) 6.17 (39.8) 0.47 (7.8)
5 6LVV-IG2-MS-MCMT05MC 8.01 (203) 7.71 (49.7) 0.59 (9.7)
6 6LVV-IG2-MS-MCMT06MC 9.61 (244) 9.26 (59.8) 0.71 (11.7)
7 6LVV-IG2-MS-MCMT07MC 11.2 (284) 10.8 (69.7) 0.83 (13.6)
8 6LVV-IG2-MS-MCMT08MC 12.8 (325) 12.3 (79.6) 0.95 (15.5)
9 6LVV-IG2-MS-MCMT09MC 14.4 (366) 12.3 (79.6) 1.07 (17.5)
10 6LVV-IG2-MS-MCMT10MC 16.0 (406) 15.4 (99.5) 1.18 (19.4)

SWAGELOK IGC II COMPONENTS PB -** N-ELD-757

Parallel Manifold Channels Number

Dimensions, in inches (millimeters), are for reference only and of Surface
are subject to change. Mount Ordering A
Positions Number in. (mm)
1.53
(38.9) 1 A-IG2-PB-03 4.47 (114)
2 A-IG2-PB-04 6.00 (152)
3 A-IG2-PB-05 7.53 (191)
1.51
(38.4) 4 A-IG2-PB-06 9.06 (230)
5 A-IG2-PB-07 10.6 (269)
6 A-IG2-PB-08 12.1 (307)
0.73 A
(18.5) 7 A-IG2-PB-09 13.6 (345)
N-ELD-758
8 SWAGELOK
MEPT**ME A-IG2-PB-10
IGC II COMPONENTS
15.2 (386)
9 A-IG2-PB-11 16.7 (424)
10 A-IG2-PB-12 18.2 (462)

Parallel Manifold Components A

Dimensions, in inches (millimeters), are for reference only and Port 1 B Port 2
are subject to change.
0.31 (7.9) 0.18 (4.6)
Jumper Tube Connectors
Number of Wetted
Surface- Surface Internal
Dimensions, in. (mm)
Mount Ordering Area Volume
Positions Number A B in.2 (cm2) in.3 (cm3)
3 6LVV-IG2-MS-MEPT01ME 3.50 (88.9) 3.06 (77.7) 3.00 (19.4) 0.21 (3.5)
4 6LVV-IG2-MS-MEPT02ME 5.03 (128) 4.59 (116) 4.47 (28.8) 0.32 (5.3)
5 6LVV-IG2-MS-MEPT03ME 6.56 (167) 6.12 (155) 5.94 (38.3) 0.44 (7.1)
6 6LVV-IG2-MS-MEPT04ME 8.09 (205) 7.65 (194) 7.41 (47.8) 0.55 (9.0)
7 6LVV-IG2-MS-MEPT05ME 9.62 (244) 9.18 (233) 8.87 (57.3) 0.66 (10.8)
8 6LVV-IG2-MS-MEPT06ME 11.1 (282) 10.7 (272) 10.3 (66.7) 0.77 (12.7)
9 6LVV-IG2-MS-MEPT07ME 12.7 (322) 12.2 (310) 11.8 (76.2) 0.88 (14.5)
10 6LVV-IG2-MS-MEPT08ME 14.2 (361) 13.8 (350) 13.3 (85.7) 1.01 (16.3)
11 6LVV-IG2-MS-MEPT09ME 15.7 (399) 15.3 (389) 14.8 (95.1) 1.11 (18.2)
12 6LVV-IG2-MS-MEPT10ME 17.3 (439) 16.8 (427) 16.2 (105) 1.22 (20.0)
SWAGELOK IGC II COMPONENTS CONVERSION PLATE N-ELD-771

IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware 11

Caps and Conversion Plate

Item Description Ordering Number Function Material

N-ELD-770
Provides mounting
SWAGELOK IGC II COMPONENTS SUBSTRATE CAP

Conversion plate 6LVV-IG2-DM-01

capability for MFC

N-ELD-769
Covers unused
SWAGELOK IGC II COMPONENTS MANIFOLD CAP

Substrate cap 6LVV-IG2-DM-04

position on substrate

SWAGELOK IGC II COMPONENTS SUBSTRATE TUBE PORT N-ELD-794

Covers unused
Manifold cap 6LVV-IG2-DM-05 316L VIM-VAR SS
position on manifold
SWAGELOK IGC II COMPONENTS MANIFOLD TUBE PORT N-ELD-793

Provides a vertical
Substrate tube port 6LVV-IG2-DM-06 tube port on a
substrate

Provides a vertical
Manifold tube port 6LVV-IG2-DM-07 tube port on a
manifold

Support Blocks
SWAGELOK IGC II COMPONENTS SUPPORT N-ELD-766

Item Description Ordering Number Function Material

Bolts to bottom of a
substrate to provide
midline support to
Support A-IG2-MH-01
a substrate channel
SWAGELOK IGC II COMPONENTS FOOT N-ELD-767 with five or more
positions

Bolts to each end

N-ELD-778 of a gas stick to
Aluminum alloy
SWAGELOK IGC II COMPONENTS TUBE SUPPORT BLOCK

Foot A-IG2-MH-02 provide mounting

2024-T351
capability to the
base plate➀

Adapts the Swagelok

tube support system
Tube support A-IG2-MH-15
to the center line of
the substrate

➀ The base plate is a customer-supplied plate to which the assembled gas stick(s) is mounted.
Assembly Hardware
SWAGELOK IGC II COMPONENTS LOCKDOWN N-ELD-762

Item Description Ordering Number Function Material

SWAGELOK IGC II COMPONENTS
SUBSTRATE CLIP N-ELD-761
PES-IG2-MH-04
Secures the substrate
Lock-down plate SS-IG2-MH-03 components at each end 303 SS
of the substrate channel

N-ELD-760
Provides horizontal alignment
SWAGELOK IGC II COMPONENTS
MANIFOLD CLIP
PES-IG2-MH-04

Substrate clip PES-IG2-MH-04 of substrate components Polyethersulfone

in a channel

SWAGELOK IGC II COMPONENTS PARALLEL MANIFOLD CLIP N-ELD-779 Provides horizontal alignment
Manifold clip 1 PES-IG2-MH-05 of manifold components Polyethersulfone
in a channel
N-ELD-0847

Provides horizontal alignment

SWAGELOK IGC II COMPONENTS MANIFOLD C-RING
SS-IGC II-MH-07

of manifold end connections

Manifold clip 2 PES-IG2-MH-17 Polyethersulfone
and parallel manifold
components in a channel

Provides seal between

C-seal
SS-IG2-MH-07 a substrate drop-down 316L SS
gasket assembly
SWAGELOK IGC II COMPONENTS
Hex socket CAP SCREW 10-32 x 1.00 in.
N-ELD-763-12 component and the manifold

Hex socket cap screw, Secures MFC conversion plate

A286-IG2-MH-10
10-32  0.50 in. to substrate assembly

Torx® head cap screw, Secures surface mount➀

A286-IG2-MH-11
10-32  0.75 in. to substrate assembly

Hex socket
Hex socket cap screw, Secures substrate assembly
cap screw A286-IG2-MH-12
SWAGELOK IGC II COMPONENTS
Torx head CAP SCREW 10-32 x 1.25 in.
N-ELD-763-1310-32  1.00 in. to manifold assembly
Alloy A286
Secures MFC component with
Torx head cap screw,
A286-IG2-MH-13 25 or 26 mm flange thickness
10-32  1.25 in.
to MFC conversion plate

Hex socket cap screw, Secures substrate assembly

A286-IG2-MH-20
10-32  1.375 in. to foot

Secures MFC component with

Torx head cap screw,
Torx head A286-IG2-MH-25 32 mm flange thickness to
10-32  1.50 in.
cap screw MFC conversion plate

Hex socket cap screw,

SS-IG2-MH-14 Secures foot to base plate 303 SS
1/4-20  0.75 in.

➀ Designed for use with 1.5 in. (38.1 mm) surface-mount components with a 0.312 in. (7.9 mm) base thickness.

Safe Product Selection Warranty Information

When selecting a product, the total system design must Swagelok products are backed by The Swagelok Limited
be considered to ensure safe, trouble-free performance. Lifetime Warranty. For a copy, visit swagelok.com or contact
Function, material compatibility, adequate ratings, your authorized Swagelok representative.
proper installation, operation, and maintenance are the
responsibilities of the system designer and user.
Swagelok, IGC, VCR—TM Swagelok Company
Torx—TM Textron Inc.
Caution: Do not mix or interchange surface-mount © 2012–2013 Swagelok Company
component parts with those of other manufacturers. Printed in U.S.A. AGS
MS-02-134, R5